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ON YES Hysteresis mode OFF P-1 P-2 Real-time flow rate "P" H H ON Window comparator mode H: Hysteresis NO OFF P-1 P-2 Real-time flow rate OUT1 Output mode ON YES Hysteresis mode OFF n-1 n-2 Real-time flow rate "n" H H ON Window comparator mode H: Hysteresis OFF NO n-2 n-1 Real-time flow rate Accumulated pulse output ( ) Accumulated switch output ( ) Refer to "Flow Rate Setting Mode

Dimensions 1 2 3 4 5 6 7 8 (mm) K J 5 6 E F n L1 L2 Note 2) The above dimensions are for ZQ1 3M2 .

VH*-OMQ0023-C PRODUCT NAME Pressure Relief 3 Port Valve With Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~02A,B(-B,S)(-K,R,Z) VHS30-(F,N)02~03A,B(-B,S)(-K,R,Z) VHS40-(F,N)02~04A,B(-B,S)(-K,R,Z) VHS40-(F,N)06A,B(-B,S)(-K,R,Z) VHS50-(F,N)06~10A,B(-B,S)(-K,R,Z) VHS2510-(F,N)01~02A,B(-B,S)(-K,R,Z) VHS3510-(F,N)02~03A,B(-B,S)(-K,R,Z) VHS4510-(F,N)02~04A,B(-B,S)(-K,R,Z) VHS4510-(

3 ISE30A -0.11 MPa Y ZSE30A 0-101 kPa ZSE30AF -100100 kPa K T 2 01 R1/8(M5) N01 NPT1/8 (M5) A1 A C4H 4mm5/32 inch C6H 6mm A2 B NH7 1/4 inch N7H A3 C C4L 4mm5/32 inch C6L 6mm B N7L 1/4 inch D + N NPN1 P PNP1 A NPN2 B PNP2 C NPN1+ D NPN1+ E PNP1+ F PNP1+ 1 L (2 m) 1 (2 m 1 G 1 M SI2 P (psi)1 1NP3 4 1 2kPaMPa -8No.PS-OML0002CN-G / A ZS-38-A1 (M35 L 2 ) B ZS-38-A2 (M35 L

AR-OMY0028-A PRODUCT NAME Common Supply Regulator MODEL / Series / Product Number AR20M(K)-(F,N)(0101,0201,0202)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR30M(K)-(F,N)(0202,0302)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR40M(K)-(F,N)(0302,0303,0402,0403)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D Contents Page 1. Safety Instructions 26 2. Application 7 3. Standard Specifications 7 4.

M5 0.8 1 (SUP) port 2-M5 0.8 3 (EXH) port L2 L1 3 10.5 7 P = 7.2 4.3 8 21.5 4.3 4.0 11.9 3 1 3 1 18.9 24 22 5 150 (lead wire AWG#26) 22 2-3.4 Mounting hole 6.4 n U side 1 2 3 4 5 D side (21.5) (10.5) 21.5 2 2 3.9 P = 7.2 11 n-M3 0.5 2 (OUT) port Dimensions Formulas: L1 = n 7.2 + 8.8, L2 = n 7.2 + 14.8, n: Stations (maximum 20 stations) n L 12 95.2 101.2 19 145.6 151.6 2 23.2 29.2 3 30.4

2 position single 2 1 1/8 With sub-plate 01 F N T JIS Symbol Body ported 3 position closed center 3 position exhaust center 5 3 position pressure center 2 position single 2 position double (B) 2 (A) 4 (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 3 position closed center 3 position exhaust center (A) 4 (A) 4 (B) 2 (B) 2 How to Order Manifold Base 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (

*The bracket cannot be retrofitted later. *2 position single only SYJA7 20 1 01 Body ported SYJA7 40 2 Base mounted Symbol Body ported Port size Thread type Type of actuation Nil Rc G NPT NPTF Without sub-plate Nil 2 position single 2 position double 4 3 2 position double 2 position single 2 1 1/8 With sub-plate 01 F N T 2(B) (A)4 2(B) (A)4 3 position closed center 1/4 With sub-plate 02 3

Rod Theoretical Force Operating pressure Piston area MPa 0.3 psi 43.5 MPa 0.5 psi 72.5 MPa 0.7 psi 101.5 Bore size Operation Rod diameter Theoretical Force (in 2) (mm 2) (inch) N lbf N lbf N lbf (mm) 25 84.8 0.131 IN 5.6 42 13.3 59 9.4 12 6 0.24 34 113 0.175 OUT 7.6 57 17.8 79 12.8 45 151 0.234 IN 10.1 75 23.8 106 16.9 16 8 0.31 60 201 0.312 OUT 13.5 101 31.7 141 22.7 71 236 0.366 IN 16.0

External pilot solenoid 1 Y A G 1 T Z B1 10 1 70 2 SGH SGHA Air operated 1 A G B1 10 1 2 70 q w e r t y u i o !0 !1 !2 q Series w Valve type e Seal material 70 r Pressure range t Thread type y Port size 1 2 3 4 1 2 A B 10 15 20 25 Nil G N T SGH100 SGH200 SGH300 SGH400 SGH100 SGH200 SGH300 SGH400 N.C. N.O.

1in = 25.4mm W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CL2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231

2 Port for Steam Dimensions (mm) 1in = 25.4mm T (Y) R Z 16 T 25 IN port 2-3/8 : Thread type S l = 280 l = 300 (X) 2.5 (N) E C D G Q SMC SMC C A B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 N-1/4 N-1/8 : Thread type H H P = J (pitch) 2 L dimensions (mm) n (stations) Model Dimensions 3 5 8 4 6 10 7 2 9 103.5 172.5 276 138 207 345 241.5 L1 69 310.5 VV2CS2 115.5 184.5 288 150 219

W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (Pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5

D side U side Stations 1 2 3 4 5 n 21 16 H H P=J (Pitch) OUT port n-1/4 n-1/8 T : Thread type 2 5.5 25 IN port 2-3/8 l=280 l=300 (V) (X) 2.5 (N) (U) E C D G Q S A C B L1 L2 16 L3 (44) W T R Z (Y) L dimensions (mm) n (stations) Model Dimension 4 3 5 9 2 6 10 7 8 138 103.5 172.5 310.5 L1 69 207 345 241.5 276 VV2CW2 150 115.5 184.5 322.5 L2 81 219 357 253.5 288 162 127.5 196.5 334.5 L3 93 231

W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (Pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CW2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231 334.5 265.5

1in = 25.4mm W (44) Z (X) (V) T R (Y) T 25 IN port 2-3/8 l=280 l=300 2.5 (N) E A (U) S Q D G C C B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 16 OUT port n-1/4 n-1/8 H H P=J (pitch) 2 : Thread type L dimensions (mm) n (stations) Model Dimension 2 3 4 6 9 7 5 8 10 L1 69 103.5 138 207 310.5 241.5 172.5 276 345 VV2CL2 L2 81 115.5 150 219 322.5 253.5 184.5 288 357 L3 93 127.5 162 231

port) 2 x 18 (R1, R2 port) 1764 Series VFA3000 5 Port Air Operated Valve Dimensions: Body Ported 2 position double: VFA3230-01 02 2 x 18 (Pilot port) 2 x 4.3 (Mounting hole for manifold) Max. 3 Max. 3 2 x 4.2 (Mounting hole) 3 x , 14 18 (P , A, B port) 2-3 (Breathing port) 2 x 3 2 x 18 (R1, R2 port) SYA 3 position closed center/exhaust center/pressure center: VFA3 30-X1 3 4 5 01 02 SYJA

2 Port for Steam Dimensions (mm) 1in = 25.4mm T (Y) R Z 16 T 25 IN port 2-3/8 : Thread type S l = 280 l = 300 (X) 2.5 (N) E C D G Q SMC SMC C A B L1 L2 L3 16 D side U side Stations 1 2 3 4 5 n 21 5.5 N-1/4 N-1/8 : Thread type H H P = J (pitch) 2 L dimensions (mm) n (stations) Model Dimensions 3 5 8 4 6 10 7 2 9 103.5 172.5 276 138 207 345 241.5 L1 69 310.5 VV2CS2 115.5 184.5 288 150 219

Connecting thread IN 1 OUT 2 2 OUT 01 male thread, M5 female thread 8 1 Thread type Nil N Rc NPT Note) A standard model is equipped with a backflow function. A main valve opens when the inlet pressure is released, and then an outlet pressure backflows into the inlet side. Note) Use caution not to tighten excessively when mounting a pressure gauge, otherwise it may result in a breakdown.