1.5% F.S. or less (0.7 MPa, at 20C)?1.0% F.S. or less (0.7 MPa, at 20C), ?3.0% of F.S. or less in case of analog output?1.5% F.S. or less (0.1 to 1.5 MPa, based on 0.7 MPa)?

1.5% F.S. or less (0.7 MPa, at 20C)?1.0% F.S. or less (0.7 MPa, at 20C), ?3.0% of F.S. or less in case of analog output?1.5% F.S. or less (0.1 to 1.5 MPa, based on 0.7 MPa)?

1.5% F.S. or less (0.7 MPa, at 20C)?1.0% F.S. or less (0.7 MPa, at 20C), ?3.0% of F.S. or less in case of analog output?1.5% F.S. or less (0.1 to 1.5 MPa, based on 0.7 MPa)?

1.5% F.S. or less (0.7 MPa, at 20C)?1.0% F.S. or less (0.7 MPa, at 20C), ?3.0% of F.S. or less in case of analog output?1.5% F.S. or less (0.1 to 1.5 MPa, based on 0.7 MPa)?

1.5% F.S. or less (0.7 MPa, at 20C)?1.0% F.S. or less (0.7 MPa, at 20C), ?3.0% of F.S. or less in case of analog output?1.5% F.S. or less (0.1 to 1.5 MPa, based on 0.7 MPa)?

(mm)Thickness (mm)BundleStraight pipeColorApplicable fluidMax. operating Note 1)pressure (at 20C)Burst pressure (at 20C)Note 2)radius (mm)Max. operating temperature (Fixed use)MaterialBasic diameterTolerance10 m20 m50 m100 m50 Ft. (16 m)100 Ft. (33 m)2 mInch sizes (Series TIL)TIL011/8andquot;1/8andquot; x 0.086andquot;3.18?0.10.5?0.05?

(mm)Thickness (mm)BundleStraight pipeColorApplicable fluidMax. operating Note 1)pressure (at 20C)Burst pressure (at 20C)Note 2)radius (mm)Max. operating temperature (Fixed use)MaterialBasic diameterTolerance10 m20 m50 m100 m50 Ft. (16 m)100 Ft. (33 m)2 mInch sizes (Series TIL)TIL131/2andquot;1/2andquot; x 3/8andquot;12.7+0.2?0.11.6?

Table of Contents

How to Find the Flow Rate (At air temperature of 20C) Choke flow: (P2 + 0.1)/(P1 + 0.1) 0.5 293 273 + t Q = 120 x S x (P1 + 0.1) x Subsonic flow: when (P2 + 0.1)/(P1 + 0.1) > 0.5 Q = 240 x S x (P1 P2)(P2 + 0.1) x 293 273 + t Q: Air flow rate [ /min (ANR)] S: Effective area (mm2) P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] t: Air temperature [C] Note 1) Formulas above are applied

Electro-pneumatic Proportional Valve Series VEF/VEP 1

Linearity 3% F .S. or less AMR Lubrication Not required (Use turbine oil Class 1, ISO VG32, if lubricated.) 0.9 0.9 1.0 1.4 1.4 Weight (kg) ITV Proportional Solenoid Specifications IC 1 (Applicable power amplifier: VEA25) Proportional solenoid recognition symbol VEA25 VBA Applicable power amplifier VEF3121 (Flow type) VEP3121 (Pressure type) Max. current 1 A VE Coil resistance 13 (20C) Rated

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

LQ2 E 31 32 Different dia. tubing size (B side) Applicable tubing size (A side) Union elbow 17-5-113 18 Series LQ2 Specifications Model Feature LQ230 LQ220 LQ240 LQ250 NEW PFA Material Maximum operating pressure (at 20C) 1.0 MPa Refer to the withstand pressure and heat resistance performance curves.

VXD21/22/23

When the ambient temperature is 20C 5C and rated voltage is applied. Changing coils from AC to DC and vice versa is impossible, because of different core shapes. VXD21 0, 22 0, 23 0 are possible to exchange coil from AC to DC, but impossible from DC to AC. (Hum sound may generate because of no shading coil for DC.)

VXP21/22/23

When the ambient temperature is 20C 5C and rated voltage is applied. Changing coils from AC to DC and vice versa is impossible, because of different core shapes. VXP21 0, 22 0, 23 0 are possible to exchange coil from AC to DC, but impossible from DC to AC. (Hum sound may generate because of no shading coil for DC.

VXR21/22/23

Solenoid Specifications Apparent power (VA) Inrush Holding Power consumption (W) (Holding) Temperature rise (C ) (Rated voltage) Frequency (Hz) 50 25 12 60 20 8 Model Power source 5 50 3.5 35 6 50 8 55 6.5 45 8 50 0.5 60 9.5 50 11.5 55 Note) They are values in an ambient temperature of 20C 5C and application of rated voltage.

VXZ

When the ambient temperature is 20C 5C and rated voltage is applied. Changing coils from AC to DC and vice versa is impossible, because of different core shapes.

VCA

Low temperature operation Unless otherwise indicated in each valve's specifications, the valve can be used at temperatures as low as 20C, but take measures to prevent freezing or solidification of drainage and moisture, etc. Selection Warning 1. Air quality 1) Use clean air.

VKF300

(coil temperature 20C, at rated voltage, without surge voltage suppressor) When equipped with DC solenoid/surge voltage suppressor, a delay of about 20 to 30msec occurs in the OFF response time.

Series VQ Metal Seal/Rubber Seal Body Ported

station 14 ( ) ( + ) Yellow Black Socket side 14 25 2 ( ) ( + ) Brown 15 ( ) ( + ) Pink Black 3 ( ) ( + ) Red 3 stations { 16 ( ) ( + ) Blue White 1 13 Terminal No. 4 ( ) ( + ) Orange 4 stations { 47.04 17 ( ) ( + ) Violet D-sub connector cable ass'y (Option) Electric characteristics 5 ( ) ( + ) Yellow 5 stations { 18 ( ) ( + ) Gray Item Characteristic Conductor resistance /km, 20C

Shuttle Valve/AND Valve with One-Touch Fittings

Inch size 3/8" 5/16" 1/4" 5/16" 1/4" 5/32" 1/8" 1000 680 440 480 420 210 150 Flow rate l/min ANR (SCFM) INOUT (35.0) (23.8) (15.4) (16.8) (14.7) (7.35) (5.25) Effective area mmCv 15.2 10.4 6.7 7.3 6.4 3.2 2.3 (0.84) (0.58) (0.37) (0.41) (0.36) (0.18) (0.13) Note 1) Flow rate values are at a pressure of 0.5MPa (72 psi) and temperature of 20C (68F).

45

Mfg, Co., Ltd. 1.5 m 3 m 5 m AXT100-DS25-015 AXT100-DS25-030 AXT100-DS25-050 Cable 25 cores x 24AWG 21 Brown White Voltage limit VAC, 1 min. 1000 22 Pink Red 23 Gray Red Insulation resistance Mkm, 20C 5 or less For other commercial connectors, use a 25 pins type with female connector conforming to MIL-C-24308. 24 Black White 25 White None The minimum bending radius of D-sub connector cable

45

Mfg, Co., Ltd. 1.5 m 3 m 5 m AXT100-DS25-015 AXT100-DS25-030 AXT100-DS25-050 Cable 25 cores x 24AWG 21 Brown White Voltage limit VAC, 1 min. 1000 22 Pink Red 23 Gray Red Insulation resistance Mkm, 20C 5 or less For other commercial connectors, use a 25 pins type with female connector conforming to MIL-C-24308. 24 Black White 25 White None The minimum bending radius of D-sub connector cable