42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

VQ7-6/7-8

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement Parts (For valve) FHG FJG FIG FHG FJG FIG Description VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-

VQ7-6/7-8

q VQ7-6-FG-DVQ7-6-FG-D-R o o t r u t r u w y e q w y e q FHG FJG FIG FHG FJG FIG VQ7-6-DVQ7-6-D-R o o t r u t r u w y e q w y e q VQ7-6-FPG-Do t r u w y e q i Replacement Parts (For valve) FHG FJG FIG FHG FJG FIG Description VQ7-6-FG-SVQ7-6-FG-DVQ7-6-FPG-DVQ7-6-FG-S-R VQ7-6-FG-D-R VQ7-6-D-R VQ7-6-DNo.

Cylinder

to. : 5.5,5 1 10 '0 '2 '5 ,7 I 5 8 I M4 XO.7 M'2XlO 8 1 6.5 6 J 7 20 7 '0 I 8.5 6 I 7 I 24 9 110 30.5 35.5 40.5 45.5 55.5 I 15 '2 14 20 _' 9 i 6 -8 I MS X: O.8 M14xtO -Flange Mount : CO JPF z H s p A' F GA 2-M3 GB ~-IJ~J I A ~ u: > !

ITV

74 64 2 x 6 ERR PWR 38 27 15 ERR PWR 2 x 3.5 Mounting hole 4 x 3.5 Mounting hole L-bracket (Option) Flat bracket (Option) M8 x 1 Cable connection thread 15 6 50 82 73 Breathing hole Note) 3.7 3.7 (M3 x 0.5) 1 VACz OUT port (4, 5/32) VAC port (4, 5/32) 13.7 OUTx 13.7 3 5 ATMc 2 5 ATM port (4, 5/32) 3 6 7 3.5 L-bracket (Option) Flat bracket (Option) 19 Port Location No.

Compact Type Dual-Rod Cylinder Series CXSJ

Series CXSJ/6, 10, 15, 20, 25, 32 Series CXSJ/6, 10, 15, 20, 25, 32 Auto switches can be installed from 3 directions.

V

ZPT04U 4 4.8 1.6 3 6 5 8 0.8 D E E P T Y P E ZPT06U 6 7 2.5 3 6 5 8 0.8 Model A B C D E F G Y ZPT08U 8 9 2.5 3 6 5 8 1 ZPT10D 10 12 15 24 35.5 58.5 71.5 6 ZPT16D 16 18 16 25 36.5 59.5 72.5 7 Courtesy of Steven Engineering, Inc. !

Electric Actuators

Shield Brown Black Red Black Orange Black 12 13 7 6 9 8 3 Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 Options [Power supply cable] LEC CK1 1 (15.8) Terminal name Covered color Function 0V M24V C24V BK RLS Common supply () Blue White Brown Black (7.9) (6) (13.3) (35) (60) (1500) (10.5) Motor power supply (+) Control power supply (+) Lock release (+) Conductor size: AWG20 [I/O cable] Controller

0.

for 6) C8 (for 8) C10 (for 10) Rc 1/4 Side VV3QZ35-lll VQZ3l5 VQZ300 2 to 20 stations Note) Weight for threaded connection.

Vacuum Module Series ZX

For ZSE2 For ZSP1 5A 10 ZS (For DC) ZL 4A 20 VJ10 6 5A 20 ZS For ZSE3 (For 100 VAC) ZY 6 Lead wire length 1A 36 VJ10 (Ordering example) ZX100-K15LOZ-EC(-Q) 1 pc. VJ10-20-4A-6 2 pcs. Nil 0.6 m ZF (For 110 VAC) 30 50 3 m 5 m 6 3A 36 VJ10 ZP The asterisk () denotes the symbol for assembly.

LEC-OM005xx

Normal mode Monitor . 86 (6-1) Monitor selecting screen . 86 (6-2) Monitor items . 86 (6-3) Monitor details . 86 (6-3-1) Drive monitor. 86 (6-3-2) Output monitor . 88 (6-3-3) Input monitor . 89 (6-3-4) Output pin monitor . 91 (6-3-5) Input pin monitor . 91 (7) Normal mode Alarm . 92 (7-1) Alarm selecting screen . 92 (7-2) Alarm selecting items . 92 (7-3) Alarm function details . 93 (7-3-

XL

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

ZR

Arrangement (Right valve station which is looked from valve side is first station.) 06 B Both sides 6 Viewed from the front side of valve unit, confirm the port location on the right and/or left side. 1 1 1 station only 1 station only 6 6 6 stations only 6 stations only All stations A All stations A If more than one spacer is required, specify all spacers.

Compact

I ':"1 6 65 274 1 7 7 1 7 7 6 52 55 -r5 loo . 6 . 202 202 6 8 65 320 227 227 6 47 75 litzs . 70 345 252 252 6 47 150 6 8 370 277 2 7 7 r 1 65 T-slot A dimensions T-slot B dimensions $unies tX$ tilo To 0[dEl' tlect|'ic Acl||at0 AC Servo Motor 100vAc TS45O1N -rslsotl I Nole 1) l Applicable Applicable TarnaFwa Sek I 2OOVAC TS45O1N AppLicable L Applicable 3 -.'

EX510

6 !7 !8 !

Digital Gap Checker ( compatible)

ISA-16-6 With connector lead wire ZS-31-B With connector lead wire ZS-31-C : Spacers are included for 4 and 6 stations.

LEC-OM036xx

Branch Branch N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 Shield Controller CN4 Controller CN4 Description Pin No. Description Pin No. EMG+ 1 EMG+ 1 EMG2 EMG2 SD+ 3 SD+ 3 SD4 SD4 EN_SW+ 5 EN_SW+ 5 ON 6 ON 6 DC24V 7 DC24V 7 GND 8 GND 8 Shield Shield 30 - 9.

VZ5000

Conditions Body ported Tube bore x Length Speed controller Silencer Series CJ2 Series CM2 6 x 1 m AS3301F-06 12 x 1 m AS4001F-12 AN200-02 Series MB 6 x 1 m AS2301F-06 AN110-01 VZ5120-01 3-3-55 Series VZ5000 Construction 2 position single 2 position double De-energized De-energized 3 position closed center/exhaust center/pressure center 3 position closed center De-energized De-energized 3

High Vacuum Angle Valve, XL Series

Orifice mm Differential pressure MPa Port A Pa Internal Fitting External XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA3-32 XSA3-43 2 3 0.8 VCR 0.3 3 6 Direct solenoid operation (N.C.) 10-11 1.0 1/4 10 -6 10 -9 10 -11 P.32 to P.34 2 0.3 SWJ 4.5 11 10 -10 0.8 0.3 6 3/8 19 Differential Pressure: Indicates the maximum operable pressure difference between port P and port A.

Series 10-SQ1000 5 Port Solenoid Valve Plug-in Unit

Rated voltage 5 6 24 VDC 12 VDC Note 1) Light/surge voltage suppressor is built-in.