Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160 20 11 16 23 40 60 60 AC-A1bore size +0.027 0 80 M12 x 28 31 100 65 28 16 R 22 13 18 26 45 67 75 U D drill through C 0.3 +0.033 0 100 M12 x 32 35 118 80 28 17 R 24 13 20 30 50 74 90 F E +0.033 0 125 M14 x 36 41 140 90 31 20 R 26 15 22 30 55 81 112 0 0.3 G A +0.033 0 160 M16 x 40 54 174 100 34 22 R 30 17 25 40 65 95 140 H B Knuckle pin Material: Carbon steel C (f8) Order no.
Unit psig/bar MPa Code r e No code MPA Sample Order Number Port qIN wOUT eGauge port (Inlet) rGauge port (Outlet) w q AZ1402TS e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 3) Pressure gauge unit MPa or psig/bar selectable.
P. 2-3-44 P. 2-3-46 P. 2-3-47 P. 2-3-48 C6 L6 P R D side SMC AN200 U side Individual EXH spacer SSQ1000-R-3Special wiring specifications (-K) Back pressure check valve (-B) SSQ1000-BP Built-in silencer (-S) P. 2-3-49 P. 2-3-45 P. 2-3-46 P. 2-3-47 C6 L6 D-sub connector Terminal no.
Rc1 8 VVZS2000-R-01-1 VVZS2000-R-01-2 Body type Plug-in type VVZS2000-20A-1 Non plug-in type VVZS2000-20A-2 Part no. Interface regulator (P port regulation) Spacer Interface regulators can be placed on top of the manifold block to reduce the pressure of each of the valves.
Rotation speed (r/min) 262144(pulse) 60 Model loop gain setting Droop pulse value (pulse) 6 12 7. SPECIAL ADJUSTMENT FUNCTIONS 7.
2 @1 @2 w r Description Replaceable kits list Component parts No.
(In case of R) 8 20.9 21.6 45 25.9 27.4 15 1/4 14 24.9 L1 Applicable tubing 56 27.9 29.1 3/8 M 69 27.7 30.7 1/4 10 23 35.2 18 17 27.8 D 73 29.7 32.4 3/8 A 94 30.7 35.1 3/8 L2 12 24.8 50.2 20.8 31.3 H 121 34.7 37.2 22 1/2 Connection thread (with sealant) Reference dimensions after installation of R thread Note 1) D is maximum diameter.
Taper ring Steel balls P f R R Enhanced locking efficiency Greater locking efficiency as well as stable locking and unlocking operation has been achieved by arranging a large number of steel ball bearings in circular rows. The floating taper ring provides alignment and stable locking force with respect to piston rod eccentricity.
Taper ring Steel balls P f R R Enhanced locking efficiency Greater locking efficiency as well as stable locking and unlocking operation has been achieved by arranging a large number of steel ball bearings in circular rows. The floating taper ring provides alignment and stable locking force with respect to piston rod eccentricity.
q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
Color indication Longer lengths available upon request Color Black White Red Blue Yellow Green Symbol B W R BU Y G The inner tubing are all black.
LEMB25 / LEMB32 LEMC25 / LEMC32 LEMH25 / LEMHT32 LEMH25 / LEMHT32 Speed [mm/s] Acceleration Speed Acceleration [mm/s2] [mm/s] [mm/s2] 0 48 250 48 250 1 75 500 75 500 2 100 1000 100 1000 3 150 1500 150 1500 4 200 2000 200 2000 5 250 2500 300 2500 6 300 3000 400 3000 7 350 4000 500 4000 8 400 5000 600 5000 9 450 6000 800 6000 10 500 7500 1000 7500 11 600 10 1200 10 12 700 12500 1400 12500 13
Series 0.5 316 SS Knob with a raised section on top (indication window) 250 (1.7) AK3652 0.29 P.3 Compression Rc, R, NPT Female thread type Compression AK4652 Note) Cv calculation based on SEMI Standard Series AZ For details, refer to the product catalog available on SMC website.
r r r q w e OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR10l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole
A 40 150 C73 21 C D M 2 R A 40 150 C73 Number of auto switches Mounting style 2 pcs. 1 pc.
Rod type / LEY Series 2.1 Specification LEY63 (Top/Parallel) LEY32 LEY32D Model LEY25 (Top/Parallel) / LEY25D(in-line) (Top/Parallel) (in-line) LEY63D (in-line) 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 100, 200, 300, 400, 500, 600, 250, 250, 250, Stroke[mm] 700, 800 300, 350, 400, 500 300, 350, 400, 500 300, 350, 400 Horizontal Note 1) 18 50 50 30 60 60 30 60 60
Bar + High-voltage power supply module + Controller IZT 40 X14 34 D 1 6H R F IZT X14 42 34 D 1 6H R F Bar IZTB X14 40 34 D 1 6H R F Standard model no. e pages 17 and 18 Bar length Type 40 411 Standard Symbol 16 22 34 40 46 58 64 82 112 130 160 190 232 250 Length [mm] 160 220 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 42 Non-standard The bar of non-standard length is available.
Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and
Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and