High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

MGZ Floating Joint MGT Center of sphere M M U U D H G B F P C E R A (mm) DMax. operating tension and compression N Center of sphere R Model Max. screw-in depth P Allowable eccentricity U M A Applicable bore size Mass (kg) B C D E F G H Nominal size Pitch Compression Tension -X JB40-8-125 JB63-10-150 JB80-16-200 JB100-20-250 JB140-22-250 20, 25 32 40 50, 63 80 8 10 16 20 22 1.25 1.5 2 2.5

ZP

Construction Series ZPT Series ZPR Series ZPY r Buffer r Buffer y Adaptor e Adaptor e Adaptor r Buffer t Adaptor w Lock ring w Lock ring w Lock ring q Pad q Pad q Pad q Pad With buffer With buffer With buffer Component Parts Material Note No.

Series CE1

2 r e y @4 @8 @0 !0 i @3 o @4 @8@7 u @2 r y MK/MK2 RSQ/RSG !9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w #1 #0 @2 @9 #1 @1 RSH CE1 40 to 63 CE2 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 ML2B ML1C #7 #6 !5 REA REC RHC !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 MTS CC Component Parts Component Parts Description Material Note Description Material No.

mb1

3 r !5 u q y e t !2 w i A CJ1 CJP CJ2 A Cylinder tube sectional view A-A !0 o CM2 CG1 Component Parts MB No. q w e r t y u i o !0 !1 No.

70astamb1

50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239 501 to

MXS

6 CL MLGC r CNA !2 !3 t !

100

6 @2 r y w t e t @2 u i !0 @0 !5 y !9 ZL6 Without valve or pressure switch, Silencer exhaust ZL6 With valve and pressure switch, Port exhaust @1 !2 !3 !1 !6 !8 !7 q !4 r y w t e t u i @0 !5 y !9 Component Parts No. Description Material Note No.

ZP

P Q R 6 6 8 24.3 26.2 16.8 18.7 S 12.8 15.2 8 Applicable tubing O.D.

MK

RS Q G Theoretical Output Rotary Angle (N) RS H A Operating pressure (MPa) Piston area (cm2) Bore size (mm) Rod size (mm) Operating direction 1.0 0.7 0.5 0.3 RZQ Release (Extended stroke end) 80 to 100 (90 10) Counterclockwise (L) Release (Extended stroke end) 80 to 100 (90 10) Clockwise (R) 80 56 40 24 0.8 R 12 6 110 77 55 33 1.1 H MI W S 150 105 75 45 1.5 R 16 8 200 140 100 60 2 H CEP1

Table of Contents

When separately ordering an individual SUP spacer, separately order a R block valve. R block valve Note) Individual EXH spacer VVQ1000-R-3-C6 Shut off label Individual EXH spacer (To be ordered using the no. of the standard valve.)

Compact Cylinder

140 160 45 50 55 60 65 70 75 80 85 90 55 60 65 70 75 80 85 90 95 100 110 130 150 C(D)55B20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B80-10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 C(D)55B40-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -60 -80 -100 -125 -150 C(D)55B50-5 -10 -15 -20 -25 -30 -35 -40

Series IDG

Size 60 75 100 50/27 100/54 150/85 Note) In case of two or more options, indicate them in alphabetical order.

Magnetically Coupled Rodless Cylinder

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

ISA2

Leakage voltage Take special precautions if a resistor is used in parallel with the switching element or a C-R element (for surge voltage protection) is used for protection of the switching element. The valve may fail to turn off due to leakage current flowing through the resistor or C-R element. PF2 IF Data Switching element OFF Caution R C Leakage voltage Power supply 1.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Air Cylinder Series CS1

surfaces Same surface 35 100 110 150 2 110 + 30(n2) (n = 2, 4, 6, 8 ) 150 + 100(n2) (n = 2, 4, 6, 8 ) D-A3 D-G39 D-K39 35 + 30(n2) Different surfaces n 110 + 100(n2) (n = 2, 4, 6, 8 ) 150 + 30(n2) (n = 2, 4, 6, 8 ) Same surface 100 + 100(n2) 1 110 150 15 35 55 Different surfaces Same surface 150 110 2 150 + 30(n2) (n = 2, 4, 6, 8 ) 110 + 30(n2) (n = 2, 4, 6, 8 ) 35 + 30(n2) Different surfaces

K35-OMW0030

C96A2G-0294Y-R 160 200 C95A6G-471AQ-R CS1-J16-300 300 200 200 C95B0G-472AQ-R C95B0G-0304Y-R 300 250 350 C95B5G-533AQ-R C95B5G-574EQ-R 450 200 C1SC2G-1468V-R CS1-J25-200 350 C1SC2G-1470V-R CS1-J25-530 530 320 Ambient temperature specifications With rod boot of silicone rubber material and without rod boot: -20 oC to 60 oC With rod boot of nylon tarpaulin: -10 oC to 60 oC (No freezing) (7)

CNA

MLGC CNA Taper ring Steel ball CB P q f CV/MVG R R CXW CXS CXT MX MXU MXS MXQ Standard manual override lock release MXF MXW Even if air is cut or exhausted, lock release is possible using a wrench. When override is released, lock is engaged again as a fail safe.

Ionizer

mm x 150 mm, capacitance: 20 pF) as defined in the U.S.