Rotary Clamp Cylinders

149 185 245 300 400 525 625 825 980 1400 1560 0.7 56 77 105 140 139 208 258 341 418 557 731 870 1149 1365 1950 2172 1.0 80 110 150 200 200 298 370 490 600 800 1050 1250 1648 1961 2801 3121 R H R H R H R H R H R H R H R H 12 6 16 8 Clamp part 20 12 Non-rotating accuracy 0.7 to 1.4 During clamping (Retraction end) 25 12 32 16 Made to Order (For details, refer to page 40.) 40 16 50 20 XB6 Head

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

Manifold Specifications

sides of R port.

High Vacuum Angle Valve

1.3 x 108 1.3 x 109 B w, e 1.3 x 108 1.3 x 109 C r 1.3 x 1010 (FKM) 1.3 x 109 D w 1.3 x 108 1.3 x 1011 (FKM) E w, r 1.3 x 108 1.3 x 109 Seal material Symbol Seal material Compound no.

VQC

Individual EXH spacer VVQ1000-R-1-C6 EXH shutoff position: Specify 2 positions.

IZx-OMP0064

(ANR) L/min(ANR) L/min(ANR) 1600 1600 600 120 1600 1300 300 500 100 1300 1300 1120 1120 400 80 1120 200 820 820 300 60 820 640 580 460 400 340 640 580 460 400 340 640 580 460 400 340 200 40 100 100 20 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0 0.1 0.2 0.3 0.4 0.5 0 0.1 0.2 0.3 0.4 0.5 MPa MPa MPa Pressure [MPa]] Pressure [MPa]] Pressure [MPa]] (a) Air supply from one side (b) Air supply from both sides

5 Port Solenoid Valve, Series VQC

Note 4) For external pilot option, "-R", indicate the external pilot specification "R" for the applicable valves as well. Note 5) The built-in silencer type does not satisfy the IP67 standard.

Table of Contents

When separately ordering an individual SUP spacer, separately order a R block valve. R block valve Note) Individual EXH spacer VVQ1000-R-3-C6 Shut off label Individual EXH spacer (To be ordered using the no. of the standard valve.)

INFORMATION For material handling and clamping of small workpieces 34 mm Power Clamp Cylinder Compact Type New New ø25, ø32 Lightweight Compact 53 mm High clamping force Lock function Lightweight Weight : 580 g (ø25) 192.4 mm Width : 34 mm Compact Heigh

CKZ25 53B781EL R 1) Mount the top cover to the clamp cylinder, then tighten to the specified tightening torque below. The top cover kit includes a top cover and mounting brackets.

Speed Controller with Indicator

NPT thread AS-FS AS-FSG Uni-AS-FS r !

LEYx-OMZ0015

Rod type / LEY Series 2.1 Specification LEY63 (Top/Parallel) LEY32 LEY32D Model LEY25 (Top/Parallel) / LEY25D(in-line) (Top/Parallel) (in-line) LEY63D (in-line) 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 100, 200, 300, 400, 500, 600, 250, 250, 250, Stroke[mm] 700, 800 300, 350, 400, 500 300, 350, 400, 500 300, 350, 400 Horizontal Note 1) 18 50 50 30 60 60 30 60 60

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

R R 1 R 1 R 1 R 2 Inlet pressure for silencer AMC 4.

LEC-OM02904

PB26) kpps pulse r/min (6) (No.PB28) (7) 7 14 7 7.6.4 (1) (CDP) (a) No.

Smooth Cylinder/Low Speed Cylinder

Through-hole: CQ2YB/CDQ2YB Both ends tapped style: CQ2YA/CDQ2YA CDQ2YA Both Ends Tapped (mm) O1 thread Bore size (mm) R R O1 R 32 M6 x 1.0 10 40 M6 x 1.0 10 50 M8 x 1.25 14 2 x P (Rc,NPT,G) (Port size) H thread effective depth C Auto switch Lead wire min. bending radius 10 4 x N through 8 x O counterbore F Q D Z M E J W E M K L B + Stroke A + Stroke Rod end male thread Width across flats

HRX-OM-Q026

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRSH Series 3.3 Installation 3-27 HRX-OM-Q026 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Air Cylinder

7 @0 @1 q o u r t e w y Long stroke 80, 100 r y u u e i Long stroke 1001 to 1500 With air cushion o w !5 !1 !3 !6 !2 !4 !0 !9 @0 !8 !7 @1 @1 @2 q r t e Long stroke Component Parts No. Description Material Note 1 Rod cover Aluminum alloy Hard anodized 2 Tube cover Aluminum alloy Hard anodized 3 Piston Aluminum alloy No.

AC Servo Motor Driver (SSCNET /H Type)

Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Load to motor inertia moment ratio PB06 7 7 Function selection E-3 PE41 0 0 LEFS25(L,R)T6 LEFS32(L,R)T7 LEFS40(L,R)T8 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.

25

Nil P NPN PNP Bar length (mm) 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 With 2 pcs. 340 400 460 580 640 820 1120 1300 1600 1900 2320 2500 Since input/output function cannot be used, specify Nil when the AC adapter is being used.

High Vacuum L Type Valve

XL1A16-2-101-XN1 Suffix for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

High Vacuum L Type Valve

Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Suffix for seal materials Seal material EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro is a registered trademark of MATSUMURA OIL Co.,Ltd. R Kalrez is a registered trademark of E.