Compact Cylinder with Air Cushion Series RQ

21 25 98 35.5 M16 x 2.0 132 6 22 10 77 11 17.5 40 to 100 3/8 88 76 27 30 117 40 M20 x 2.5 156 6.5 27 12 94 11 17.5 40 to 100 3/8 mm RB W Z Q Bore size (mm) 63 80 100 34 10.5 84 19 39 13.5 104 26 43 13.5 123.5 26 Refer to page 784 for details on rod end nut and accessories.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

] 100 L/min type 100 L/min type Error display function When an error or abnormality arises, the location and contents are displayed.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

500 300 200 Allowable driving force Fn (N) 100 20 30 40 50 10 Useable range 5 1 0 1 2 3 4 5 6 7 8 9 10111213 Distance from cylinder shaft center Lo (cm) 4 Series CY3B/CY3R Model Selection Method Precautions on Design w Max.

CXS

Stroke (mm) up to 10 up to 30 up to 75 up to 100 up to 50 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 Max. speed (mm/s) 7 8 9 6 10 15 Selection graph 10 11 12 13 14 15 17 16 20 25 32 The maximum speeds for 10 to 32

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

mm 300 100 200 MGJ 100 100 MGP 80 Load mass m (kg) Load mass m (kg) Load mass m (kg) 80 80 MGQ 10 10 10 63 63 63 MGG 50 50 50 MGC 40 1 1 1 25 20 25 20 40 32 40 32 MGF 32 [Example w] 25 20 0.3 0.3 0.1 70 100 1000 70 100 1000 70 100 1000 MGZ Stroke (mm) Stroke (mm) Stroke (mm) MGT 2.

Series VQ Base Mounted Metal Seal/Rubber Seal

Description Material Note q w e No.

ITV

Return 0.4 0.3 0.5 0.5 AV 0.2 0.1 0 2 6 4 8 1.0 0 25 50 75 1.0 AU 0.0 10 0 25 50 75 100 100 Input signal (%F.S.) Repetition Input signal (%F.S.)

Single Axis Electric Actuator Serriies LJ1S Slider Guide

Mitsubishi Electric Corporation Yaskawa Electric Corporation None F R L T B Nil W Axial Right Left Top Bottom 100/115VAC (50/60Hz) G 1 N.C. (B contact) 2 pcs.

Low Profile Slide Table Series MXF

moment Static moment L2 A3 W MXH Mp Mr My MXU W W W MXS L1 A2 L3 A6 W L2 A4 MXQ Mey Note) No need to consider this load factor in the case of using perpendicularly in a vertical position.

MG

0 w !3 -X !1 !9 @3 !0 !2 @2 r o e y !5 2032 to 63 Over 50 to 100 stroke 80, 100 Over 50 stroke to 200 stroke Data Over 50 stroke @0 t 50 stroke or less 32 to 63 Over 100 stroke 80, 100 Over 200 stroke 50 stroke or less 50 or more Component Parts Description Material Note No. q w Description Material Note No. !2 !3 !

ChemicalThermo-con

Circulating fluid: Clear water, Circulating fluid flow rate: 3.96 gpm (15 L/min), Facility water flow rate: 1.32 (5 L/min) HED003 HED005 60 80 100 120 140 F 40 60 80 100 120 140 F 40 1600 800 Facility water: 95F (35C) Heating capacity (W) Heating capacity (W) 1200 Facility water: 95F (35C) Facility water: 77F (25C) Facility water: 77F (25C) 600 800 400 400 200 Facility water:

PFxx-OMX0007

PLS1_L U8 0 Y 0: 100 (L/pulse) 1: 1000 (L/pulse) 1520 0x05F0 0 R/W 1530 0x05FA 0 R/W PLS1_Ft3 U8 0 Y 0: 1 (L/pulse) 1: 10 (L/pulse) 0: Add (Addition) 1: dEC1 AC (Setting of the accumulated flow output direction) Setting of the accumulated flow output direction 1600 0x0640 0 R/W U8 0 Y (Subtraction OUT1) 2: dEC2 (Subtraction OUT2) 0: 1.0 sec 1: 2.0 sec 2: 5.0 sec 1800 0x0708 0 R/W FiL (Digital

3

2 i t w q r w !0 3-Color Display Digital Flow Monitor for Water PF3W3 w w y e u w Component Parts No.

VQ4000

, 110, 200, 220 VAC (50/60 Hz) (A) 4 (B) 2 (A) 4 (B) 2 Allowable voltage fluctuation 10% of rated voltage Coil insulation type Class B or equivalent 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 24 VDC 1 W DC (42 mA), 0.5 W DC (21 mA) 3 position exhaust center 12 VDC 1 W DC (83 mA), 0.5 W DC (42 mA) 2 position double (Metal) (A) 4 (B) 2 (A) 4 (B) 2 100 VAC Inrush 1.2 VA (12 mA), Holding 1.2 VA

ML2B

If there is vibration, impact, etc. at long stroke, we recommend adoption of side support even if it is within the allowable value shown in the graph. 400 W l Load W ML2B32 W (1200) (1200) 300 ML2B25 l l 200 100 0 1000 2000 (mm) Support spacing l 10-13-16 14 Stroke Reading Rodless Cylinder with Brake Series ML2B Proper Auto Switch Mounting Position (Detection at stroke end) Operating Range

ML2B

ML2B40 ML2B40 ML2B32 ML2B32 ML2B32 ML2B25 ML2B25 ML2B25 0.2 0.2 0.5 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 0.1 0.1 0.1 100 200 300 400 500 1000 1500 100 200 300400500 10001500 100 200 300400500 10001500 RS Q G Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) RS H A RZQ ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) MI W S 40 20 30 20 5

ML2B

If there is vibration, impact, etc. at long stroke, we recommend adoption of side support even if it is within the allowable value shown in the graph. 400 W l Load W ML2B32 W (1200) (1200) 300 ML2B25 l l 200 100 0 1000 2000 (mm) Support spacing l 10-13-16 14 Stroke Reading Rodless Cylinder with Brake Series ML2B Proper Auto Switch Mounting Position (Detection at stroke end) Operating Range

HRX-OM-X010

fluid level gauge Facility water outlet (Rc1/2 w/plug) Facility water circuit Level switch Facility water inlet (Rc1/2 w/plug) Press.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

40 Work load: W [kg] Work load: W [kg] 20 Lead 16: LEKFS32EA 30 Lead 16: LEKFS32EA 20 Lead 24: LEKFS32EH 10 Lead 24: LEKFS32EH 10 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 Speed: V [mm/s] Speed: V [mm/s] Vertical LEKFS40/Ball Screw Drive Horizontal 70 60 30 Lead 10: LEKFS40EB Lead 10: LEKFS40EB Work load: W [kg] Work load: W [kg] 50 40 20 Lead 20: LEKFS40EA 30 Lead 30: LEKFS40EH

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Function Coil voltage Symbol Specifications DC (1.0 W) AC 1 2 3 4 5 6 9 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Other (3) Nil Standard type High pressure type (Metal seal only) (1.0 W) (1) K (0.5 W) Low wattage type Y External pilot type (2) R Note) Note 1) Option Note 2) For details about external pilot specifications, refer to page