0.4

5 Port Solenoid Valve Metal Seal / Rubber Seal [Option] RoHS compliant Power saving Power saving Standard: 0.4 W Standard: 0.4 W (Reduced by 60% compared to existing model) compared to existing model) (Reduced by 60% compared to existing model) High-pressure (1 MPa, Metal seal): 0.95 W High-pressure (1 MPa, Metal seal): 0.95 W CAT.ES11-100A Series VQ1000/2000 5 Port Solenoid Valve Series

Hydraulic Cylinders

Hydraulic fluid Compatibility Standard mineral hydraulic fluid Compatible W/O hydraulic fluid Compatible JIS symbol O/W hydraulic fluid Compatible Not compatible Water/Glycol hydraulic fluid Phosphate hydraulic fluid Contact P/A.

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

Driver Driver Servo amplifier Servo motor Servo amplifier Servo motor U U U U CAUTION V V M V M V W W W W Connecting a servo motor of the wrong axis to U, V, W, or CN2 of the driver may cause a malfunction. 3 3 3.

1.1

75 75 75 110 110 Weight Note 10) kg Note 1) It should have no condensation.

CNG

SOL.C SOL.C SOL.B SOL.A SOL.B SOL.A W Manual Unlocking Warning Unlocking cam Release piston 1. Never operate the unlocking cam until safety has been confirmed.

2 Phase Stepper Motor/Without Motor Brake Series LXS

T-slot A dimension T-slot B dimension 6.5 T-slot B 27.5 4H9 Cross section C-C D 4 4 4 4 6 E 6 6 8 8 8 F 107 112 122 132 112 G 55 65 75 85 65 I 1 1 1 1 2 J 65 75 65 70 75 K 2 2 3 3 3 L 6 6 6 6 8 N 55 65 75 85 65 P 2 2 2 2 3 U 52 47 47 47 47 Model LXSH2BD-50 LXSH2BD-75 LXSH2BD-100 LXSH2BD-125 LXSH2BD-150 Refer to page 301 for mounting.

MRQ

Linear Motion/Standard Motion Size Standard stroke (mm) 32/40 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 Refer to p.1.5-18 for other intermediate strokes.

Rotary Cylinder Series MRQ Size: 32, 40 1

CRQ2 MSQ Linear Motion Parts/Standard Stroke 32, 40 Standard stroke (mm) Size MRQ 5, 10, 15, 20, 25, 30, 40, 50, 75, 100 Refer to page 11-10-18 for other intermediate strokes.

LX Series Compact Electric Actuators

Without brake C section Brake electric circuit YellowC;*1 Y e l l o w O Y !

Profile Design ISO/VDMA Air Cylinder Series CP95

21 51 4.3 56.5 4 14 60 5 6.5 32 12 45 15 9 16 190 80 95 25 65 4.3 72 4 16 75 5 10 36 16 45 18 11 20 210 100 115 25 75 6.3 89 4 16 85 5 10 41 16 55 18 11 20 230 Mounting type ES Piston rod ball joint to DIN 648K Bore d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 40 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 50 15 16 9 50 65 10.5 33 30 45 21 15

Environment

PB H thread depth C Vent hole Note 3) J PC EV Z T M U D K Note 2) L R 4 x O1 thread depth R W A + Stroke B + Stroke S EH M 6 x MO thread depth MR XA H9 depth XA MH Section XX details MA ML + Stroke MC MD Section XX XB XA H9 XA [mm] Incremental encoder Absolute encoder B C D EH EV Without lock With lock Without lock With lock A W Z A W Z A W Z A W Z Size Stroke range [mm] 25 15 to 100 238

Integrated Controller

3000 mm/s2 6 Work load: W [kg] Work load: W [kg] 5 3000 mm/s2 5000 mm/s2 4 3 10 mm/s2 2 1 0 50 100 150 200 250 300 350 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQY16HC Horizontal/Lead 2.5 Vertical/Lead 2.5 45 40 35 30 25 20 15 10 5 0 50 25 75 100 125 150 175 200 11 10 9 8 7 6 5 4 3 2 1 0 Work load: W [kg] Work load: W [kg] 3000 mm/s2 3000 mm/s2 10 mm/s2 5000 mm/s2 0 0 Speed: V [mm/s] 50 100

Slider Type/Ball Bushing Bearing

D 1.6 x P 0.1 x Wcos + Wsin D 5.0 x P 0.1 x W + W D 5.0 x P W W > Wv P > Pv Determination of allowable load mass & pressure Inclined operation (For vertical operation, refer to page 1515.)

ZX

Y DC: 0.45 W (With indicator light: 0.5 W) 24 VDC and 12 VDC are applicable to 0.45 W.

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Standard With power saving circuit 0.4 W 0.1 W 0 W 62 ms 372 Series 10-SYJ3000/5000/7000 Specific Product Precautions 4 Be sure to read this before handling. Refer to page 1382 for Safety Instructions and pages 677 to 683 for 3/4/5 Port Solenoid Valve Precautions.

CM2

, 100, 125, 150 CS1 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 C76 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

Vacuum Module Series ZX

VDC are applicable to 0.45 W.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

Compact Hydraulic Cylinder Series CH
KGB

Hydraulic fluid Compatibility JIS symbol Standard mineral hydraulic fluid Compatible W/O hydraulic fluid Compatible O/W hydraulic fluid Compatible Not compatible Water/Glycol hydraulic fluid Phosphate hydraulic fluid Contact P/A.