Environment: -, Operating Pressure Range(MPa): -, Flow Direction: -, Drain Cock: -, Bowl Material: -, Bowl Guard: -, Accessory: None, O-Ring, Gasket Material: None, Custom-made Specifications: None, Nominal of pipe flange: N/A, Element type: -, Element materials: -, Element seal materials: -, Nominal filtration accuracy: -, Pressure gauge accessories: None, Compatible Model: FGF□3A-40/FGF□5A

Compact manifold regulator ARM5 Series

Length 136016-1A 136016-2A 136016-3A 136016-4A 136016-5A 136016-6A 136016-7A 136016-8A 136016-9A 136016-10A 16 14 1 SRH 28 2 42 3 SRP 56 4 70 5 SRF Tie-rod for centralized supply block 84 6 98 7 ITV 112 8 126 9 IC 140 10 For 1 station 14 mm x 1 station = 14 mm Length ITVH For adding a regulator Tie-rod part no.

Brake mechanism added

Applicable bore size Dd9 L1 L2 m d Drill through Included split pin Included flat washer Clevis Knuckle 2 x d Dd9 CDP-2A 40 10 0.040 0.076 46 38 4 3 3 x 18 L Polished round 10 L1 L2 m L1 L2 m CDP-3A 50 40, 50, 63 12 0.050 0.093 55.5 47.5 4 3 3 x 18 L Polished round 12 2 x d Dd9 CDP-4A 63 16 0.050 0.093 71 61 5 4 4 x 25 L Polished round 16 L1 L2 m CDP-5A 80 18 0.050 0.093 76.5 66.5 5 4

Manifold Specifications

Electrical entry SC (T only) Type SU Type SC Type SC Type SU Type SC Type SU AXT622-5A AXT336-4AStations AXT336-5Stations Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod

Ejector Valve Unit Series ZYY/ZYX

Lead wire length Nil 0.6 m 30 3 m Example) ZSE1-00-15CN-X129 ZS-20-5A-50 1 pc. 1 pc. 50 5 m 1086 Ejector Valve Unit Series ZYY/ZYX Internal Circuit and Wiring Example How to Set the Pressure How to Use the Connector 1. Attaching and detaching connectors ZSE1-14, -15 The ON pressure is set with the pressure setting trimmer. High vacuum settings are obtained by turning it clockwise.

Fitting Type: B (Branch Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5A (Tube O.D. 1/2", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male)

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5A (Tube O.D. 1/2", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male)

Fitting Type: R (Run Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5A (Tube O.D. 1/2", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT)

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5A (Tube O.D. 1/2", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

Fitting Type: H (Connector), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5A (Tube O.D. 1/2", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT)

Fitting Type: L (Elbow), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5A (Tube O.D. 1/2", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT)

Fitting Type: R (Run Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5A (Tube O.D. 1/2", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

Fitting Type: B (Branch Tee), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5A (Tube O.D. 1/2", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: F (Female), Thread: N (NPT)

Fitting Type: H (Connector), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5A (Tube O.D. 1/2", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male), Thread: N (NPT)

Fitting Type: H (Connector), Metric Size, Side A: No (Select Inch Size, Side A), Inch Size, Side A: 5A (Tube O.D. 1/2", Tubing Size 3/4"x5/8"), Metric Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Inch Size, Side B: No (For Types H and L, and Types B or R w/Same Tubing Size), Piping: M (Male)

Fitting Type: E (Union Elbow), Size Combination-A Side: 5A (Applicable Tubing Size 3/4" x 5/8", Flange 20A), Different Diameter-B Side: 5B (Applicable Tubing Size 1/2" x 3/8", Flange 20A)

Fitting Type: F (Union Flange), Size Combination-A Side: 5A (Applicable Tubing Size 3/4" x 5/8", Flange 20A)

Fitting Type: T (Union Tee), Size Combination-A Side: 5A (Applicable Tubing Size 3/4" x 5/8", Flange 20A), Different Diameter-B Side: 5B (Applicable Tubing Size 1/2" x 3/8", Flange 20A)

Fitting Type: T (Union Tee), Size Combination-A Side: 5B (Applicable Tubing Size 1/2" x 3/8", Flange 20A), Different Diameter-B Side: 5A (Applicable Tubing Size 3/4" x 5/8", Flange 20A)

Fitting Type: U (Union), Size Combination-A Side: 5B (Applicable Tubing Size 1/2" x 3/8", Flange 20A), Different Diameter-B Side: 5A (Applicable Tubing Size 3/4" x 5/8", Flange 20A)