Vacuum Pad across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8
VFS 1 4 S mount VV5F3-70 Individual Side Side plate Bottom Valve Top Valve 1 8 1 4 1 4 VF370 VS4 1 4 VV5F3-71 Individual Side Side plate Side Valve Side Valve 1 8 VF3170 (Single solenoid only) 1 4 1 4 1 4 VQ7 Note 1) Supply (P port) is common.
Porting Configuration V3 1 2 10 40 -0.1 to 0.2 MPa -0.1 to 0.7 MPa 0 to 1.5 MPa 0 to 7 MPa 0 to 28 MPa t w w q q 1) Other range available.
Example) AF30-03B-2R-X430 X430 X440 Low temperature High temperature Symbol 30 40 50 60 20 Body size Description 30 40 50 60 Body size Description Symbol Nil N Note 1) Rc NPT G F Note 2) Thread type Nil N Note 1) Rc NPT G + F Note 2) Thread type 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Port size Port size + + Without mounting option With bracket Nil B Note
Example) AW30K-03BE-2N-X406 0.4 MPa Setting Long Bowl Symbol Body size Description Body size 10 20 30 40 60 10 20 30 40 60 Nil K Note 1) With backflow function Without backflow function With backflow function + Metric thread (M5) Rc NPT G Nil Thread type N Note 2) F Note 3) + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 5) H Without mounting option With bracket With
(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .
27 27 32 41 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 8 11 11 13 16 96 108 115 129 140 27 32 32 37 37 44 52 64 78 92 15 17 17 21 21 60 70 86 102 116 16 20 20 25 30 26 27 26 30 31 32 40 40 52 52 54 59 67 72 76 10 10 10 14 14 10 13 18 23 25 85 95 102 113 124 10 12 15 17 19 25 to 500 25 to 600 32 to 600 41 to 750 45 to 750 25 to 500 25 to 600 32 to 600 41 to 750 45 to 750 M8 X 1.25 M8 X 1.25
25 X 600 32 X 600 41 X 750 45 X 750 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/4 44 52 64 78 92 16 20 20 25 30 32 40 40 52 52 10 10 10 14 14 85 95 102 113 124 15 17 17 21 21 26 27 26 30 31 54 59 67 72 76 10 13 18 23 25 10 12 15 17 19 14 18 18 22 26 30 35 35 40 40 27 32 32 37 37 60 70 86 102 116 22 27 27 32 41 96 108 115 129 140 8 11 11 13 16 M8 M8 6 7 7 11 11 71 80 99 117 131 M10 X 1.25 M12 M12
(mm) 02_o2 0 4 _ o 4 0 6 0 6 0 8 _ 0 8 10 _ o.10 1 3 @ 1 3 1 6 @ 1 6 20 @2O 25 _ a25 32 _ a32 40 s4O 50 o50 Pad dia. (mm) 02_o2 0 4 o 4 0 6 a 6 0 8 0 8 1 0 _ o 1 0 1 3 _ o 1 3 1 6 _ s 1 6 20 szo 25 o25 32 s32 40 s4O 50 650 Thread Dia. s2-sB o4(}o50 B4 M4 x 0.7 o B5 M5 x 0.8 o a Thread B6 M G x l a o B8 M8 x 1.25 o a 8 1 0M 1 0 x 1 . 2 5 o o .
50 152 M8 x 1.25 depth 16 14 depth 10 M12 x 1.75 depth 21 50 45 150 22 21 25 11 90 170 56 120 152 37 115 194 103 50 55 182 M10 x 1.5 depth 20 M14 x 2 depth 25 17 depth 12 Long Stroke Bracket Mounting Stroke Bore size (mm) Stroke range (mm) Bore size (mm) Bore size (mm) Bracket mounting stroke Z Y X W V P U Y T R S O R Q 20 20 20 250 to 400 157 80 30 40 48 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/
Bolt 14.50.1 14.50.1 Manually unlocking Lock ring 1) Remove the dustproof cover. 2) Screw the commercially available bolt (M3 x 25 L or more) into the lock ring shown on the left and raise the lock ring toward the head side. 3) The lock ring and piston rod form a right angle, and the lock is released. (29) LOCK 27 Head side 70 D d 0 0.05 Q Q K SR C 120 45 15.5 14.5 26 (4) MK 8 to 10 14 14
Grease pack part no.: GR-S-010 (10 g) 564 Series CXS Dual Rod Cylinder Basic Type Construction: Ball Bushing Bearing CXSL6 y!6 @6 @3r !8 @4 !9 w !3 !0 @2 ut !5 !4 @0 !1 !2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0!5 @9@3@4r!8w!9!3 i!0 @2ut!6 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 !4ye!1!2 q @1 !4 y e !1 !2 @3 @1 q CXSL20 to 32 @0 !5!6@3@4r!8w!7o i!0u@2t !4 y e !1 !
One-touch fitting 11 Clip 12 SJ2000-CL-1 (10 pcs.) 5 Series SJ2000/3000 Construction: SJ3000 2 position single JIS symbol 2 position single 2 position single with back pressure check valve o t r e w y q !1 u !
size (mm) 20 25 32 40 50 Bore size (mm) S O P T U V W X Z HN HR Q Y R Y R Q 20 25 32 40 50 20 25 32 40 50 1/8 26 12 82 48 40 39 157 38.5 12(14) 98(106) 12 37 25.3 11 95 M6 x 1 depth 9 1/8 31 13 100 57 46 46 175 39 12(14) 98(106) 12 40 28.3 11 95 M6 x 1 depth 13 1/8 38 16 114 65 52 46 201 40 12(14) 101(109) 12 43 31.3 11 97 M6 x 1 depth 13 1/8 47 20 138 84 62 56 238 41 12(15) 109(118) 13
9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.
Symbol NPN output (+ COM) Nil EX510-S002B Stations N PNP output ( COM) EX510-S102B PWB U side D side COM 7 0 1 1 3 2 6 15 14 10-SS5Z3-60S6BD-05U (-Q)1 set (Type 60S6B 5-station manifold part no.) 10-SZ3160-5LOZ-C6 (-Q)2 sets (Single solenoid part no.) 10-SZ3260-5LOZ-C6 (-Q)3 sets (Double solenoid part no.) The asterisk denotes the symbol for assembly.
1 8 1 4 1 8 5 32 10.4 10 18 16 3 1 4 1 8 1 4 13.2 10 20.5 17 4.6 1 4 3 8 Applicable tubing 1 4 3 8 3 8 17.9 17 25.5 21 7 1 2 Connection thread 3 8 1 2 21.7 17 28 22 9.6 1 2 Note) D1: Max. diameter Double Universal Male Elbow: KQ2VD H (Width across flats) <10-32 UNF> <10-32 UNF> Applicable tubing O.D.
9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !