Modular Type Regulators Series AR

Note 6) Note 6) Note 6) Note 6) Note 5) Note 5) Note 5) Note 5) Note 5) Note 5) Z Note 5) Z Note 4) Note 1) Option B, G, H are not assembled and supplied loose at the time of shipment.

VDW

Model Port size P B B1 E F C D J K M Grommet Q R 20 VDW1 VDW2 M5 42.5 15 4 11 15.5 30 20 10 6 11 M2.5 M5, 1/8 52 5 15 17 36.5 22 11 8 13.5 M3 Body material Stainless Steel Grommet D 300 Q F Full wave rectifier (AC type) R E C A 2 x P Port size B B1 M 2 x J thread depth K (mm) Mounting method Electrical entry Model Port size P A B D E F B1 C J K M Grommet Q R 52 VDW1 VDW2 12 20 15 6 11 M2.5

Fieldbus system EtherCAT compatible SI Unit

020 mA 7 420 mA 3 010 V 4 05 V 080E 5 15 V 6 020 mA 7 420 mA 0 C(Celsius) 080F 1 F(Fahrenheit) 4 2 wires 0810 5 3 wires 6 4 wires 0 Direct(No Swap) 1 Swap 16bit 0811 2 Swap 32bit 3 Swap all 0 Deactivated 1 IOL_Manual 0812 2 IOL_Autostart 3 DI_C/Q 4 DO_C/Q 0 No Device check 1 Type compatible Device V1.0 0813 2 Type compatible Device V1.1 3 Type compatible Device V1.1 , Backup + Restore 4 Type

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

6 @6 @3r !8 @4 !9 w !3 !0 @2 ut !5 !4 @0 !1 !2 e @1 q @7 @5 @8 CXSL10 CXSL15 @0 !5 @9 @4 r w !8 !9 !3 i !0 @2 u t !6 @0!5 @9@3@4 r!8w!9 !3 i!0 @2ut!6 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !4 y e !1 !2 @3 @1 q !4y e !1 !2q @1 CXSL20 to 32 @0 !5!6@3@4r!

Smooth Cylinder/Low Speed Cylinder

4 6 21.5 4 6 6 4 8 1.5 [1] 6 3.5 6 3.5 22.5 10 7.5 10 25 7.5 2.5 10 7.5 4.5 3.5 [1] 7 5.5 7 5.5 24.5 11 9.5 11 27 9.5 1.5 0 32 0.5 11 9.5 2.5 Note 1) [ ]: Denotes the values of D-A93.

Free Mount Cylinder

6 Seal kit includes !4, !5, !6.

CRBU

Refer to pages 11-13-3 to 4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 11-1-4 to 6 for Precautions on every series. Component Parts Note No. q w e r t y u i o !0 !

SZ3000

Refer to page 6 for the weight of DIN rails. 18 Cassette Type Manifold Series SZ3000 Manifold Exploded View Type 60 (non-plug-in) manifold U side q e DIN rail holding screw r t w D side DIN rail holding screw y Description No. Part No.

Air Slide Table Series MXP

6 !5 i q w !0 !3 o r !4 u Component Parts Component Parts Note No. Description Note No.

Series AP500

Pressure gauge unit 2) w q w q w q Unit psig/bar MPa Code No code MPA Sample Order Number Port AP1001S e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 2PW 3PW 2PW 3PW 3PW 4PW 2) Pressure gauge unit MPa or psig/bar selectable.

HRL

Select the proper size of cable according to an actual condition. 5 Thermo-chiller Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series Operation Display Panel Items displayed on the home screen and setting items are shown in List of check items in inspection monitor menu. w q e r o !0 !1 !2 !3 !4 t y u i !5 !6 !7 !8 !

REA/REB

9 @1 q !5 !4 y i !0 !6 @0 #3 r #0 t o w !7 @2 @3 !8 #4 #5 !2 #6 #2 u e !1 !3 #1 @6 @8 @5 @7 @9 @4 Parts list Parts list Material Material No. Description Note Note No.

High Purity Chemical Valve

Metric 3, 4, 6 6, 8, 10 10, 12 Inch Valve type 1/8, 3/16, 1/4 1/4, 3/8 3/8, 1/2 Symbol Type Basic type N.C.

EXxx-OMW0014CN

IO-Link DI DO StandardIO StandardIO 2 0x00 . 9-4 X0 X1 X2 X3 IO-Link 1 2 3 4 IO-Link 2 (I/Q) Bit 1 Bit 3 Bit 5 Bit 7 EX245-LA1 (EX245-LB1 0) 4 (C/Q) Bit 0 Bit 2 Bit 4 Bit 6 DO 2 4 (C/Q) Bit 0 Bit 2 Bit 4 Bit 6 DI() 9.5.

VCL

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size

Air Cylinder

5/64 3 3/4 1.57 3/8-24 1.18 1 4 11/16 2.76 1/2 5/8 2 1-14 1 5/8 1 1/4 6 1/4 4 1/4 4.7 1 5/8 2.59 2.72 400 (4") 1 3/8 7/16 5/8 0 1 1/2 6 5/64 4 1/2 1.57 3/8-24 1.18 1 5 7/16 3.32 1/2 5/8 33 Series NCA1 Medium Duty Air Cylinder Oversized Rod Rear Flange Mounting Type NC A1G (XB5) Y P + Stroke AA FA 4-FB (Hole) C 2-EE (NPTF) D Across Flats KK Q Width Across Flats KK Bore 200 250 325 400 Q 3

Modular Type Air Filter Series AF

1 Drain q r e w t i u y o !0 !

CY1

8 q !5 !4 !7 w #3 !6 e #1 @9 #0 i !0 !3 !1 !

Environment

How to Order w e r t q y u i o !0 !1 !2 !

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

6 Q: 8 Model A B C D F H I J K P Q: 6 Q: 8 Y K P K P ZPT20F10-0-A14 ZPT40F10-0-A14 18.5 39 51.5 118 136.5 13 140 5 12.5 20 22 40 43 13 15.5 36 48.5 50 115 13 133.5 13 137 12.5 52.5 50 ZPT25F10-0-A14 ZPT50F10-0-A14 40 119 137.5 141 6 19.5 13.5 25 28 50 53 ZPT32F10-0-A14 16 36.5 49 115.5 134 135.5 13 32 35 Additional Dimensions by Stroke (mm) Additional Dimensions by Stroke (mm) K P Q: 6 Q