BP1000

Welded Connection Series Back Pressure Regulator for Ultra High Purity Series BP1000 For UHP gas delivery Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e BP10 01 2PW FV4 FV4 S Bonnet option Operating pressure Bonnet Standard Panel Installation 3) Code Pressure

Guide Cylinder/Compact Type ø 20, ø 25, ø 32, ø 40, ø 50 Series MGC

Bearing type M L Slide bearing Ball bushing bearing Number of auto switches Mounting style Nil S n 2 pcs. B F Basic style 1 pc. Front mounting flange style n pcs. Bore size Auto switch Port thread type 20 25 32 40 50 20 mm Without auto switch (Built-in magnet) Nil 25 mm M5 x 0.8 Nil 32 mm For the applicable auto switch model, refer to the table below.

Direct Operated Precision Regulator/Modular Style ARP20 to ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style ARP20K to ARP40K Regulator JIS symbol Regulator with backflow function

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S

Uniaxial Electric Actuator Series LJ1

*Vertical Horizontal Mounting position Ground ball screw (0.02mm) Rolled ball screw (0.05mm) Slide screw (0.1mm) Positioning repeatability 100 to1500mm 100 to 600mm Stroke to 60kg to 20kg Work load to 1000mm/s to 600mm/s Speed Tentative determination of actuator model Review of moment Confirmation of allowable moment NG OK Determination of actuator model When mounted in a vertical position

Suction Filter with Case FH99 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM, EPDM Model/Rated Flow Rate Model Port size Note 2) INLET OUTLET Rated flow rate (L/min) FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1B 1/2B 20 1B 3/4B 50 1 1/2B 1B 100 1 1/2B 1 1/4B 150 2B 1 1/2B 200 2B 2B 300 2 1/2B 2 1/2B 450 3B 3B 600 3 1/2B 3 1/2B 750 4B 4B 900 Note 2) Both flange

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Flow rate (L/min (ANR)) Inlet pressure (MPa) 1096 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K P2 Pressure gauge port size V B Tubing support 6/4 R Bleed port F S U D N Bracket (Option) J M T (11) Panel fitting

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 707 Series ARP20/30/40 Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 765 ARP20/30/40 Series Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

C D F J K ARP20(K) ARP30(K) ARP40(K) 28.5 Note 2) 1/8, 1/4 1/8 40 98 27 28.5 M28 x 1 2 1/4, 3/8 1/8 53 117 29 29.5 M38 x 1.5 29.5 2.5 1/4, 3/8, 1/2 1/4 70 148 41 34 M42 x 1.5 34 1 Optional specifications Square embedded type pressure gauge Digital pressure switch Round type pressure gauge Note 3) Bracket mount dimension Panel mount Model Z ARP20(K) ARP30(K) ARP40(K) H J H J H J M N Q R S

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Flow rate (L/min (ANR)) Inlet pressure (MPa) 1096 Direct Operated Precision Regulator Series ARP20 to ARP40 10211021Direct Operated Precision Regulator with Backflow Function Series ARP20K to ARP40K 10211021Dimensions 2 x P1 Port size A Pressure gauge (Option) Q C OUT IN K P2 Pressure gauge port size V B Tubing support 6/4 R Bleed port F S U D N Bracket (Option) J M T (11) Panel fitting

Special Specifications:

In the case of AFF2B to AFF37B and AM150 to 650, the drain is automatically discharged with the knob tightened to the S side. Manual drain discharge, however, is also possible. A manual knob attached to the auto-drain end is tightened to the S side in normal operation. The drainage can be discharged by loosening it to the O side.

How to Order MB Series ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Air Cylinder: Standard Type Double Acting, Single Rod

S 1 pc. 3 3 pcs. n n pcs.

VY511, VYU5

300 900 285 800 System Silencer: AN200 Tube size (Nylon tube): T1075 (10) Fittings (4 pcs.): DL10-02 P 250 700 200 600 176 Conditions Supply air pressure: 0.5MPa Load ratio: 50% 90 elbow: 4 pcs.

AC Servo Motor Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40

type y Stroke [mm] Symbol LEFS25 LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 50 50 to to 1200 1200 Nil Without option B With lock Nil Without cable S Standard cable R Robotic cable (Flexible cable) o Actuator cable length [m] !

Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

Electric Actuator/Slider Type Motor Parallel Type Series LEFS LEFS16, 25, 32, 40 Step Motor (Servo/24 VDC) Servo Motor (24 VDC) RoHS How to Order LEFS 25 R B 200 S 1 6N 1 Motor mounting position Size Motor type 16 25 32 40 R Right side parallel L Left side parallel Symbol Type Applicable size Compatible controllers/ driver LEFS16 LEFS25 LEFS32 LEFS40 LECP6 LECP1 LECPA Nil Step motor (Servo

Electric Actuator with Integrated Guide Series LTF

Traveling accuracy (mm) Model D side against B side C side against A side LTF8 LTF6 0.02/200 or less 0.02/200 or less 0.02/200 or less 0.02/200 or less Simplified Selection Flow Chart Simplified Selection Flow Chart Simplified Selection Flow Chart Single Axis Electric Actuator Series LTF (AC Servomotor) Single Axis Electric Actuator Series LTF (AC Servomotor) Work load kg Maximum speed mm/s

LEFS16, 25, 32, 40 Series LEFS Electric Actuator/Slider Type Ball Screw Drive Step Motor (Servo/24 VDC) Servo Motor (24 VDC) ®

Applicable stroke table )Standard Stroke Manufacturable stroke range [mm] Model 600 500 400 300 200 100 900 700 800 1000 LEFS16 LEFS25 LEFS32 LEFS40 ) ) ) ) ) ) ) ) ) ) ) ) ) ) ) 100 to 400 100 to 600 100 to 800 200 to 1000 ) ) ) ) ) ) ) ) ) ) ) ) Consult with SMC for non-standard strokes as they are produced as special orders.

Refrigerated Air Dryer

Breaker capacity Sensitivity current Model Voltage Maximum operating pressure: 1.6 MPa (IDFA100F to 150F: 1.0 MPa) IDFA4E-23, IDFA6E-23 IDFA8E-23, IDFA11E-23 5 A The timer-type solenoid valve actuates once (for 0.5 s) every 30 s. Replacement Parts 230 V type IDFA15E1-23, IDFA22E-23 IDFA37E-23, IDFA55E-23 IDFA75E-23 10 A 30 mA Model Part no.

Body sizes: 16, 25, 32; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 900 mm/s (24mm lead, size 32); Maximum acceleration: 10,000 mm/s²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with absolute batteryless encoder

Body sizes: 16, 25, 32; Maximum work load: 100 kg (horizontal); 46 kg (vertical); Maximum speed: 900 mm/s (24mm lead, size 32); Maximum acceleration: 10,000 mm/s²; Stroke range: 30 to 500mm in 50mm increments; Positioning repeatability: ±0.02mm; Motor type: 24 VDC step motor with absolute batteryless encoder