3

1 s/2 s Output protection Output mode Response time Note 6) Voltage output Current output Short circuit protection Flow rate Select from hysteresis mode, window comparator mode, accumulated output mode, or accumulated pulse output mode. 0.5 s/1 s/2 s (linked with the switch output) Voltage output: 1 to 5 V Output impedance: 1 k7 Analog output Output current: 4 to 20 mA Max. load impedance

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Table (1) Rated Voltage Electrical Option Electrical entry Class B Class H Rated voltage G -Grommet GS-With grommet surge voltage suppressor C-Conduit S L Z S L Z With light and surge voltage suppressor With light and surge voltage suppressor Voltage With surge voltage suppressor With surge voltage suppressor With light With light AC/ DC Voltage symbol 1 2 3 4 7 8 J 5 6 100 V 200 V 110 V

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

Built-in magnet for auto-switches CV MVGQ Maximum Driving Speed of Cylinders 1000 1000 900 900 Cylinder speed (mm/s) Cylinder speed (mm/s) 800 800 Load factor: 10% Load factor: 50% 700 700 600 600 500 500 400 400 300 300 200 200 100 100 0 12 16 20 25 32 40 50 63 80 100 0 SYJ3000 VZ3000 VZ5000 VF3000 Bore size (mm) Series Variations Bore size (mm) Standard stroke (mm) Applicable valve series

CG5-S

Stainless Steel Cylinder Se ries CG5-S 20, 25, 32, 40, 50, 63, 80, 100 How to Order X165US TN CG5 L N 25 S R 100 Without Auto Switch X165US TN CDG5 L N 25 S 100 G5BAL R With Auto Switch Inch rod thread (Only available with "TN" port option. Currently only available on the 20 to 63mm bore sizes.)

Hygienic Design Cylinder Series HY

P = 0.5 MPa) 20, 25, 32, 40 100 25 80 100 63 50 20 Allowable load at rod end (N) 40 Load mass (kg) 32 15 25 10 20 10 HYB40 5 HYB32 1 HYB25 HYB20 100 0 Maximum drive speed (V mm/s) 100 0 200 300 Stroke (mm) W 50, 63, 80, 100 160 140 Allowable load at rod end (N) 120 100 80 60 HYB100 40 HYB80 20 HYB50, 63 0 100 0 200 300 Stroke (mm) A case where the center of gravity of the load rests 50

ML2B

0.2 0.2 0.5 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 0.1 0.1 0.1 100 200 300 400 500 1000 1500 100 200 300400500 10001500 100 200 300400500 10001500 RS Q G YES Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) YES This system cannot be used because its learning function will not operate properly and the stopping accuracy will be worsen.

ML2B

ML2B40 ML2B40 ML2B32 ML2B32 ML2B32 ML2B25 ML2B25 ML2B25 0.2 0.2 0.5 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 0.1 0.1 0.1 100 200 300 400 500 1000 1500 100 200 300400500 10001500 100 200 300400500 10001500 RS Q G Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) RS H A RZQ ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) MI W S 40 20 30 20 5

ML2B

0.2 0.2 0.5 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 ML2B25 0.1 0.1 0.1 100 200 300 400 500 1000 1500 100 200 300400500 10001500 100 200 300400500 10001500 RS Q G YES Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) Piston speed (mm/s) YES This system cannot be used because its learning function will not operate properly and the stopping accuracy will be worsen.

REC

300 100 MI W S 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 CEP1 Max. 500 mm/s of high speed transfer is possible.

SFOD-OMT0005CN

Movement Speed Position Acceleration Deceleration Area 1 Area 2 In pos force Force speed force 2 2 mode mm/s mm mm/s mm/s mm mm mm Value mm/s 0 1 Absolute 100 100.00 1000 1000 50 40 10 100 0 0 5 2 Absolute 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () (1)No.

MK

RS Q G Theoretical Output Rotary Angle (N) RS H A Operating pressure (MPa) Piston area (cm2) Bore size (mm) Rod size (mm) Operating direction 1.0 0.7 0.5 0.3 RZQ Release (Extended stroke end) 80 to 100 (90 10) Counterclockwise (L) Release (Extended stroke end) 80 to 100 (90 10) Clockwise (R) 80 56 40 24 0.8 R 12 6 110 77 55 33 1.1 H MI W S 150 105 75 45 1.5 R 16 8 200 140 100 60 2 H CEP1

Ionizer

Air purge: Yes (0.1 MPa) 8 90 Discharge time from 1000 V to 100 V 7 60 6 Catalog specification value: 30 V Discharge time (s) Offset voltage (V) 30 5 0 4 Without sensor 3 30 2 With feedback sensor 60 1 90 0 100 200 300 400 500 0 0 100 200 300 400 500 Installation height of feedback sensor (mm) Installation height of feedback sensor (mm) Ionizer 600 mm Feedback sensor Installation height of

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations J kit (Flat ribbon cable) G kit (Flat ribbon cable with terminal block) P kit (Flat ribbon cable) F kit (D-sub connector) Cylinder port Kit U S A U S P 26P 20P J U S U S F 15P U S P 16P U S B P 20P U S C P A 10P F 25P G Type Negative common specifications Max. points 24 14 24 18 14 8 16 16 Electrical entry Cable length M kit T kit (Terminal block box) S kit 0 1 2 With cable (0.6

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Stations J kit (Flat ribbon cable) G kit (Flat ribbon cable with terminal block) P kit (Flat ribbon cable) F kit (D-sub connector) Cylinder port Kit U S A U S P 26P 20P J U S U S F 15P U S P 16P U S B P 20P U S C P A 10P F 25P G Type Negative common specifications Max. points 24 14 24 18 14 8 16 16 Electrical entry Cable length M kit T kit (Terminal block box) S kit 0 1 2 With cable (0.6

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Compact

; 6mm lead @5 stepping 200 @q 12mm lead I a-.1 Teaching Box See Page 40 Low Pmfils tlEctrh Slide lilE Specif ications Stroke(mm) 25, 50, 75, 100 Motol 5-phase stepping motor Screw(mm) 08, Lead 6 s8, Lead 12 68, Lead 2 s8, Lead 5 Max. pay load (horlzontal orientation) 30N (6.6 rb) 20N (4.4 rb) 30N (6.6 rb) 30N (6.6 rb) Max. speed 100mm/s 200mm/s 30mm/s 80mm/s Positioning repeatability :tO.05mm

Compact Cylinder Series CQS

Contents 12 16 20 25 12 16 20 25 CQSB12-S-PS CQSB12-T-PS Set of nos. above CQSB16-S-PS CQSB16-T-PS Set of nos. above CQSB20-S-PS CQSB20-T-PS CQSB25-S-PS CQSB25-T-PS Seal kit includes . Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) Seal kit includes .

One-touch Fittings

Possible to use in vacuum to 100 kPa.

20

3 3.5 2.5 3 3.5 2.5 3 3.5 2.5 3 3.5 100 100 106 150 150 156 6 12 300 300 306 600 600 606 100 100 106 150 150 156 8 14 300 300 306 600 600 606 Note 1) Reference dimensions after installation Note 2) Copper extension nozzle and self-align fitting are included in the same package, (but unassembled).

MXQ

Stroke (mm)) With end lock With buffer 10 20 30 40 50 75 100 125 150 Extension end Retraction end Extension end Retraction end Extension end Retraction end MXQ6 MXQ8 MXQ12 MXQ16 MXQ20 MXQ25 25 5 5 6 10 100 120 140 180 200 13 + 0.2 S 40 35 10 23 10 10 30 23 140 170 210 250 315 385 26 + 0.2 S 745 100 70 23 30 23 25 47 35 335 340 380 450 490 655 43 + 0.2 S 1250 1400 160 105 40 53 40 45