Unit Manifold Valve

Positioning hole Positioning hole Caution e One-touch fitting Tightening torque: 0.12 Nm q Unit Assembly Part No. r Bracket Assembly Part No. 00 VV061 08 5 H Description Part no.

IP8101 Series

Power supply Load voltage + + + + Power supply Load voltage Power supply voltage Load Fig. 11 Table 7 A F H Terminal no.

Digital Flow Switches

Nil N F Rc NPT G Lead wire (Refer to page 35.)

Process Valve

Note 2) Vacuum pilot type pilot solenoid valves will become VO301V-00.

Plug-in Unit

VQC4000 Thread type Note) VVQC4000-3A-1 Series Nil F T Rc G NPT/NPTF Kit type 1 2 4 Thread type VQC1000 VQC2000 VQC4000 Nil F T 1 2 3 Rc G NPT/NPTF S (EX240) kit F, P, T, S (EX250) kit L, M, S (EX500) kit Note) VQC 4000 thread port only Note) Tie-rods (2 pcs.) for additional stations included. U-side end plate assembly !8 U-side end plate assembly part no.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

Stroke Reading Cylinder and Counter

24 V F Black 0 V -X G Shield 649 CEP1 Series Construction 12, 20 !

CE

Settings can be made from 00 to 99. Store the setting with the SET key.

CXT

Cylinder bore size 12 16 20 25 32 40 Distance between guide rods GP 50 65 80 90 110 130 MGQ GP b>0.5 Calculation of load ratio b to MGG the theoretical output of cylinder b=f / F Horizontal mounting: f= X W Inclined mounting: f= X Wcosq+Wsinq (Refer to the diagram on the right.)

CE

Settings can be made from 00 to 99.

Title not found

Contact your sales representative tor further details. .f f'' r'r *x , r:r,r..t :':,:':,t Simple maintenance and overhauling It is easy to disassemble and simple to release lock-up unit by manual override.

MGP

Note) Set ua so that the cushion approach speed u does not exceed 0.5m/s (or 0.4m/s in the case of the 80 or 100) 3.17-18 Compact Guide Cylinder Series MGP Operating Conditions F(N) Bore size (mm) Stroke (mm) Allowable lateral load (Air cushion) Model 200 175 150 125 100 75 50 25 MGPM 32 37 46 29 16 F MGPL 28 35 47 69 49 54 59 66 MGPM 75 87 103 46 20 43 48 54 62 MGPL 73 70 90 123 CL 65 71

-- NCM seies

Use at high temperalure up to 300"F. . Double acting only 250 PSt (17.5 I PSI -4 -300"F (-202 -20 inch/sec No cushion available Double end. Front nose, Rear Pivot HolII TO ORDER Sbd( Sirofe Lbt n"u@ Ex.) NCUB 075-040GXBG ---EHiqh temperature Aulo-sryitch capable not available. . Low temperature down to -22"F. .

Air Cylinder CLA Series Fine Lock Model

Contact your sales representative tor further details. .f f'' r'r *x , r:r,r..t :':,:':,t Simple maintenance and overhauling It is easy to disassemble and simple to release lock-up unit by manual override.

COQ2BP

D R J (mm) so M8x1 .2S 14 ~ 63 M1Ox1.5 18 80 M12x1.7S 22 NoIe, DIller dlmellSlOIls are same as llYcugh hole type. acnSlu (mm) A 8 C D E F H ..

CE

Settings can be made from 00 to 99.

CE

Settings can be made from 00 to 99.

,,: ,.

Prevent contaminant's f rom entering fittinge and cartridges.

2-Color Display Digital Flow Switch Series PFM

Analog Voltage Output (1 to 5 V) Analog Current Output (4 to 20 mA) 5 20 Analog output [mA] Analog output [V] Model Max. rated flow value [l/min] Model Max. rated flow value [l/min] PFM710--C/E PFM725--C/E PFM750--C/E PFM711--C/E PFM710--D/F PFM725--D/F PFM750--D/F PFM711--D/F 10 10 (5) 1 4 25 25 (12.5) 50 50 (25) 00 0 0 100 100 (50) Max. rated flow value Max. rated flow value ( ): Fluid

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.