4/5 Port Air Operated Valve SYJA3000 Series

B M3 x 0.5 (Piping port) 1.5 1.5 33 36 Manual override B P R R (35) 7 7 36 (2) 7 (13.5) 28.5 15 A 1 (Bleed port) 21 R2 P R1 13 4 8.2 15 10 10 10 M5 x 0.8 (Piping port) 11 14 14 15 (Bracket) 2 position double: SYJA3220-M3(-F) 2 position double: SYJA3240-M5 10 9 36 7.1 2 x M3 x 0.5 (Pilot port) 10 1.8 4 A B (For mounting) 2 x 3.2 1.5 1.5 22 7 8.2 2.5 (For manifold mounting) 2 x 1.8 2 x M3 x

IDX-OM-W035

(510m (ANR) (1) 120SCFM 173SCFM 258SCFM 353SCFM 45 F (7.2) 3/h) 3/h) 3/h) 3/h) (205m (294m (438m (600m 130SCFM 181SCFM 297SCFM 406SCFM 50 F (10) 3/h) 3/h) 3/h) 3/h) (221m (308m (504m (690m 100psi (0.7MPa) 100 F (37.8) 100 F (37.8) 41122 F (550) 22 150psi (0.15 ~ 1.0MPa) 36-104F (2~40) 85% (4) AC115V10% AC230V10% (60Hz) AC460V10% (60Hz) (60Hz) (2) 9A 4.5A 5.6A 3.8A (2) 1000W

CLQ

Bore size (mm) T1 M F E D B T2 Part no. 42 50 62 76 6 8 10 12 16 20 25 30 6.8 9 11 14 18 20 26 31 6.5 6.5 8.5 10.5 10 12 16 18 YA-03 YA-05 YA-08 YA-10 32, 40 50, 63 80 100 YA 03 Applicable cylinder bore size 32, 40 50, 63 80 100 03 05 08 10 Mounting bracket Bore size (mm) W V U Weight (g) Part no.

MHL2

+0 052 0 Depth 1.5 M5 X 0.8 (Finger closing port) M5 X 0.8 (Finger opening port) Auto switch mounting groove (4 locations) G 65 28.2 4-M6 X 1 H (Piston rod and rack screw) 6.5 1 11 15 10 24 14 Width across flats 10 20 46 24 (4 locations) A (70) 30 24 24 10 30 12.5 12.5 Closed E 54 Open F 17 17 4-M6 X 1 through (Thread for mounting attachment) A B C D E F G H 54 96 116 J 120 195 235 Model

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Model AS1ll1FSGl-M5 AS2ll1FSGl-01 AS2ll1FSGl-02 AS3ll1FSGl AS4ll1FSGl Metric size 2 3.2 4 6 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Tubing O.D.

Coolant Valve

Applicable cable O.D. 6 to 8 Light/surge voltage suppressor (For DZ) Manual override (Non-locking push type) E Pilot port 12(P1), 10(P2) Port size: refer to table below C K (External pilot solenoid) P1 P2 J J B (Air operated) D 4 x 2 x 18 mouting hole 32 H F A Applicable flange Port 1, 2 Pilot port 12(P1), 10(P2) A Model B C D E F H J K Note) VNC5-32F VNC6-40F VNC7-50F 1 8 1 4 1 4 32 40

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

Note 1) Reference dimensions Note 2) Reference dimensions of 10-32 UNF and NPT threads after installation. 685 Speed Controller with One-touch Fitting Stainless Steel Series In-line Type AS-FG Series AS-F Model TMH ASD Applicable tubing O.D.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Table displacement due to pitch moment load Displacement at "A" when load is applied at "F" Table displacement due to yaw moment load Displacement at "A" when load is applied at "F" Table displacement due to roll moment load Displacement at "A" when load is applied at "F" A A F F A F L L L 6 6 6 L = 80mm L = 80mm L = 80mm MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10 MXP 6-5 MXPJ6-5 MXP 6-10 MXPJ6-10

VCA

Thread type Rc G NPT NPTF Nil F N T Stations 02 : 10 2 stations : 10 stations D side U side 1 2 3 4 5 How to Order Valves (VCA30/40) VC A 5 1 G 3 4 03 For air Thread type Rc G NPT NPTF Nil F N T Series 3 4 Class 3 Class 4 Port size (OUT) 5 N.C. for manifold Valve type Symbol 03 04 06 Class 3 Port size 3/8 (10A) 1/2 (15A) 3/4 (20A) Class 4 Fluid General air Dry air Nil A Orifice size Orifice

E-P HYREG ® Series VY1 1

0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

AK Flow Rate and Sonic Conductance VCHC ASR ASQ Model AS22l1F-U01 AS23l1F-U01 AS22l1F-U02 AS23l1F-U02 AS32l1F AS33l1F AS42l1F AS43l1F Flow Direction Symbols on Body Meter-out Meter-in Metric size 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Symbol Tubing O.D.

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

They can be ordered in multiples of 10 pieces.

Compact Cylinder with Air Cushion

If operated beyond the limiting ranges, excessive impact will occur and this may cause damage to equipment. 100 Lateral load F (N) 80 10 63 50 40 32 25 Operating pressure 0.5MPa Operating pressure 0.4MPa Graph 1 20 1 10 100 300 1000 Stroke + Eccentric distance (mm) Cushion Needle Adjustment 100 Caution 100 Load weight kg 80 1.

RQ

D-X 100 Lateral load F (N) 2080 10 Data 63 50 Operating pressure 0.5 MPa Operating pressure 0.4 MPa 40 32 25 Graph (1) 1000 20 1 10 100 300 Stroke + Eccentric distance (mm) Cushion Needle Adjustment 100 100 Load weight kg Caution 80 63 50 1.

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150 W 35 50 50 50 60 X 19 25 30 40 40 D 16.6 21.6 26.4 33.6 41.6 ZZ 103 132 137 156 182 E 3 2 2 2 3 N 11 18 18.5 20 26 F 10 13 13 16 16 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 G 5.5 7.5 7.5 8 11 NN M10 x 1 M20 x 1.5 M26 x

E-P HYREG

Description 0 1 0 1 VY110 0 1 VY120 0 1 VY130 0 1 0 1 0 1 VY140 VY170 0 1 VY190 0 1 VY1D00 VY150 VY1B0 VY1A0 ITV B F G N AN120-M5 VEXA-18-2A VEX1-18-1A VEX3-32A VEX5-32A VEX7-32A VEX9-32A Bracket (With bolt, washer) IC VEXA-18-3A VEX1-18-2A G27-10-01 AN120-M5 G36-10-01 AN101-01 AN120-M5 G46-10-01 AN210-02 G27-10-R1-X207 Pressure gauge ITVH Pilot EXH port silencer ITVX Sub-plate and Base Gasket