48

Operating Range [mm] Auto switch model Bore size 12 (10 x 2) 16 (12 x 2) 20 (16 x 2) 25 (20 x 2) 32 (25 x 2) 40 (32 x 2) 50 (40 x 2) 63 (45 x 2) 80 (56 x 2) 100 (71 x 2) D-M9/M9V D-M9W/M9WV D-M9A/M9AV 3.5 3 4 4 4 4 4 4 4 4 * Values which include hysteresis are for reference purposes only.

SMC Electronic Switch Series Variations

In case of Fig.4, ripple 10% means V' V" V'/V X 100 = 10% When no pulsation is happened, ripple is 0%. Unit conversion Refer to the Technical Information on p.3.14-13. Detection Switch > _ _ URJ Abbrevation of Union Ring Joint and means VCR fitting. VCR is a registered trademark of Cajon Co.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

Maximum Allowable Load MY3A, MY3B/m1 MY3A, MY3B/m2 MY3A, MY3B/m3 200 50 40 30 100 100 50 40 20 30 50 40 10 20 30 63 63 5 4 20 10 Load weight kg Load weight kg Load weight kg 63 3 40 10 40 5 4 2 3 25 5 4 1 25 40 2 3 25 0.5 0.4 16 2 1 16 0.3 16 1 0.2 0.5 0.1 0.5 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 1500 1000 500 400 300 200 100 MY3B max. MY3A max. MY3B max.

Thermo-chiller/Rack Mount Type

0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35 Circulating fluid temperature [C] Circulating fluid temperature [C] HRR010-W-20 [50 Hz] [60 Hz] 400 400 35C Heating capacity [W] Heating capacity [W] 35C 300 300 25C 25C 200 200 5C 5C 100 100 Facility water temperature Facility water temperature Facility water temperature Facility water temperature 0 0 10 15 25 20 30 40 35 10 15 25 20 30 40 35

CNG

40 32 MLGP 30 40 50 30 40 50 25 40 RLQ Load weight: m (kg) Load weight: m (kg) 20 32 20 20 [Example] 25 MLU 10 10 20 ML1C 5 4 5 4 3 D3 2 2 -X 1 1 200.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Data Maximum speed: V (mm/s) Maximum speed: V (mm/s) Graph (7) Graph (4) 0.5 MPa P 0.5 MPa P 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg

JXCx-OMT0001CN

1100 1200 1000 1100 1200 mm/s 500 500 410 340 250 200 170 [mm/s] () 30 20 10 [mm/s] () 49 33 17 1.3 LES(H) LES(H)8 LES(H)16 LES(H)25 J K J K J K [mm] 8 4 10 5 16 8 mm/s 400 200 400 200 400 200 [mm/s] () 20 10 20 10 20 10 [mm/s] () 25 13 27 14 30 15 1.4 LEP LEP*8 LEP*16 J K J K [mm] 8 4 10 5 [mm] 25 25 mm/s 300 250 150 350 250 200 [mm/s] () 20 10 20 10 [mm/s] () 25 13 27 14 -109No.JXC-OMT0001CN-C

Compact Type

(mm) Overhang L (mm) Graph V = up to 800 mm/s (up to 700 mm/s for 15, 20) 4 CXSJM CXSJL Graph V = up to 600 mm/s 3 CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 4 Series CXSJ Horizontal Mounting V = up to 400 mm/s V= = up to 800 mm/s V = up to 400 mm/s V= = up

Compact Guide Cylinder

2) 32 (25 x 2) Load mass [kg] 25 (20 x 2) 20 (16 x 2) 10 16 (12 x 2) 12 (10 x 2) 1 0 50 100 150 200 250 300 350 Maximum speed [mm/sec] 5 Compact Guide Cylinder JMGP Series Bore Size 12 (10 x 2), 16 (12 x 2) Standard: JMGPM WA + Stroke/2 Z X 4 x YY depth YL Bottom view WA + Stroke/2 Z 4 x OA through 4 x OB counterbore depth OL 4 x MM depth ML L 2 x P (Plug) (OL) 4 x NN through PW X U H VA

IDU/IDF

(50/60Hz) Single phase, 100/100 to 110VAC (50/60Hz) Single phase, 200/200 to 220VAC (50/60Hz) Single phase, 220, 240/220 to 240VAC (50Hz) 184 213 Power source 283 330 280 328 292 10 (for 100VAC), 5 (for 200VAC) Air cooled R134a Rc 3/8 Drain tube 10 attached Rc 1/2 Rc 3/4 Rc 1/4 INA-20-41-04 Note 5) AD53 15 187 210 207 250 202 245 247 257 210 260 195 240 172 179 283 330 280 328 259

Stroke Reading Cylinder and Counter

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC 1 t 1 10 x 106 100 kHz Counting speed f = = = 10 Hz 7 10 4 x 4.5 33.5 104 BCD output connector 2) UP/DOWN input Input wave form conditions: At a maximum of 100 kHz, the UP/DOWN wave form should be as shown below. 125 +12 V 10% UP pulse +12 V 10% DOWN pulse 64 59 3) 15 mA when BCD is output (Refer to page 676.) 668

Fluoropolymer Piping Equipment

1/2" x 3/8" LQHB 4 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 12 x 10 TL TIL 10 x 8 TLM TILM 6 x 4 4 10 x 8 6 x 4 12 x 10 6 x 4 3 x 2 TD TID TH TIH 3/4" x 5/8" 19 x 16 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" 1/8" x 0.086" 5 12 x 10 10 x 8 12 x 10 10 x 8 10 x 8 8 x 6 6 x 4 10 x 8 12 x 10 3/4" x 5/

SL5200

0.03 10 0.07 5 0.00 0 0.00 0 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

HRL

c u i t Contact output 4: OFF 8 3 Contact output 5: OFF 4 15 Users power supply usage example (Example 2) Contact output 1-5 common 5 1 Contact output 6: OFF 2 Power supply 24 VDC 24 COM 18 14 Contact output 6 common 3 4 24 COM +15 V 100 11 + Analog output 1: CH2 circulating fluid temperature 15 V 23 Analog output 1 common ANALOG COM 100 +15 V 10 + Analog output 2: CH2 electric conductivity

Compact and Lightweight

Model 6 Rc1/8 6 ZH05DA ZH07DA 1/4" NPT1/8 1/4" ZH05DA ZH07DA One-touch One-touch EXH. SUP. 8 Rc1/8 8 ZH10DA 1/4" NPT1/8 5/16" ZH10DA 8 Rc1/4 10 ZH13DA 5/16" NPT1/4 3/8" ZH13DA 8 Rc3/8 10 ZH15DA 5/16" NPT3/8 3/8" ZH15DA 10 Rc3/8 12 ZH18DA 3/8" NPT3/8 1/2" ZH18DA 10 Rc1/2 12 ZH20DA 3/8" NPT1/2 1/2" ZH20DA Screw-in Oval release button is only available with 6. VAC. Screw-in connection SUP.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Area: (800) 258-9200-www.stevenengineering.com 0.03 0.04 0.03 0.02 0.03 0.02 0.02 0.01 0.01 0.01 0 10 20 30 40 Load (N) 0 10 20 30 40 Load (N) 0 10 20 30 50 Load (N) 40 10 10 10 L = 100 mm L = 100 mm L = 100 mm Table displacement amount (mm) Table displacement amount (mm) Table displacement amount (mm) MXP10-10 MXP10-20 MXP10-10 MXP10-20 0.04 0.03 0.08 MXP10-10 MXP10-20 MXP10-10 MXP10-20

0.4

7 (14) 11 (20) D side 2 6 6 (12) 10 (16) 3 5 5 (10) 9 (12) 4 4 (8) 8 (8) 5 3 (4) 4 (4) Note) The max. number of mounted valves applies to double wiring.

Table of Contents - Tubing

I.D. 427 TU0425-100-X3 TU0604-100-X3 TU0805-100-X3 TU1065-100-X3 TU1208-100-X3 4 6 8 10 12 2.5 4 5 6.5 8 285 Max. operating pressure 142 0 4 32 70 105 140 10Clean Series Operating temperature F Only available in 20m rolls.

Compact Type Dual-Rod Cylinder Series CXSJ

(mm) Overhang L (mm) Graph V = up to 800 mm/s (up to 700 mm/s for 15, 20) 4 CXSJM CXSJL Graph V = up to 600 mm/s 3 CXSJM CXSJL 20 32 0.5 25 1 15 20 0.5 15 Weight m (kg) 10 0.1 10 0.1 6 6 10 20 30 40 50 100 5 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Note) V = 700 mm/s for 15, 20. 4 Series CXSJ Horizontal Mounting V = up to 400 mm/s V= = up to 800 mm/s V = up to 400 mm/s V= =

Table of Contents

-6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 Model Mounting bolt CUJB4-4 -6 -8 -10 CUJB6-4 -6 -8 -10 -15 CUJB8-4 -6 -8 -10 -15 -20 CUJB10-4 -6 -8 -10 -15 -20 C D A M2.5 x 21l M2.5 x 23l M2.5 x 25l M2.5 x 27l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l M3 x 38l M3 x 22l M3 x 24l M3 x 26l M3 x 28l M3 x 33l

2/3 Port Valve

(mm) mm Flow rate coefficient Max. system pressure (MPa) (1) Port size Weight (g) Cv Water Air Model AC DC AC DC AC DC Effective area (mm2) 34 10 1.9 600 10 VXZ2232-02 0.7 0.6 0.7 0.6 0.7 0.6 1 4 1 4 10 43 2.4 600 10 VXZ2232-03 0.7 0.6 0.7 0.6 0.7 0.6 3 8 3 8 . 0.7 VXZ2242-04 0 1.5 15 95 5.3 850 15 0.7 0.6 0.7 0.6 0.6 1 2 1 2 165 20 9.2 1,370 20 VXZ2352-06 0.7 0.6 0.7 0.6 0.7 0.6 3 4 3 4