MNB

11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 ML1C 12.5 M14 x 1.5 M14 x 1.5 16.5 M18 x 1.5 M18 x 1.5 D23.5 M22 x 1.5 M22 x 1.5 23.5 M26 x 1.5 M26 x 1.5 -X 20Data 9-6-19 20 Series MNB Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-F5/J5 D-F5W/J59W/F5BAL

MNB

11 14 20 20 16 19 24 34 34 40 50 64 80 80 10 10 14 22 22 14 14 20 30 30 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 ML1C 12.5 M14 x 1.5 M14 x 1.5 16.5 M18 x 1.5 M18 x 1.5 D23.5 M22 x 1.5 M22 x 1.5 23.5 M26 x 1.5 M26 x 1.5 -X 20Data 9-6-19 20 Series MNB Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height D-F5/J5 D-F5W/J59W/F5BAL

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Critical pressure 0.6 0.5 Sonic 0.5 0.4 0.4 0.3 0.3 0.2 0.2 0.1 0.1 JSXD30 Port size 1/4 JSXD30 Port sizes 3/8, 1/2 JSXD40 Port size 3/8 JSXD40 Port size 1/2 JSXD50 Port size 3/4 JSXD60 Port size 1 10 1000 2000 3000 10 1000 2000 3000 4000 15 2000 4000 6000 8000 15 2500 5000 7500 10 20 5000 10 15000 25 5000 10 15000 20 Flow rate Q [L/min (ANR)] For Air (Orifice diameter: 35 mm, 40 mm, 50 mm

air-filter-e

Symbol 0 1 2 Port size Port size Applicable model Symbol FQ1010 FQ1011 FQ1012 04 06 10 Rc1/2 Rc3/4 Rc1 Housing O-ring material Industrial Filters Replacement Procedure Actuators Modular F.R.L.

Air Preparation Equipment

Symbol 0 1 2 Port size Port size Applicable model Symbol FQ1010 FQ1011 FQ1012 04 06 10 Rc1/2 Rc3/4 Rc1 Housing O-ring material Industrial Filters Replacement Procedure Actuators Modular F.R.L.

Air Suction Filter, ZFC Series, In-line Type with One-touch Fittings

Weight g (oz) Model IN side, OUT side ZFC100-04 4 10 (0.35) 11.5 (0.41) ZFC100-06 6 20 (0.70) Metric size ZFC200-06 6 30 (1.05) 21.5 (0.76) ZFC200-08 8 50 (1.75) ZFC101-03 5/32" 10 (0.35) 11.5 (0.41) ZFC101-07 1/4" 20 (0.70) Inch size ZFC201-07 1/4" 30 (1.05) 21.5 (0.76) ZFC201-09 5/16" 50 (1.75) Note 1) Flow rate when initial pressure drop is 0.003MPa (0.44psi) or less.

Large Size Vacuum Module: Series ZR

ZS-10-5A-50 . 1 pc.

0.55

1 1 1 2 Rc G NPT NPTF T N F Nil Thread type Double solenoid Single solenoid 81 80 Type of actuation Port size (IN, OUT port) VP3145 VP3165 VP3185 Port size Symbol 03 04 3 8 1 2 06 3 4 Passage, Type of actuation 10 12 1 1 4 1 14 1 2 1 NC NO B A 20 2 In the case of -X80, only N.C. is available.

SL5200

160C (40 to 71C) (No freezing) 1) 0.07 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 10 in. (0.25 m) Option: 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 0.20 psig (0.0014 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Bottom mount 0.19 in3 (3.1 cm3) 0.99 lbs (0.45 kg) 3) Delivery pressure Gas Source pressure Proof pressure (Inlet)

ZR

, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

VZ5000

Compact size (Width: 18 mm) Low power consumption: 1.8 W DC Fluid Air 0.15 to 0.7 0.1 to 0.7 0.15 to 0.7 10 to 50C (No freezing. Refer to page 3-13-4.) 20 or less 50 or less 10 3 Refer to the table below.

Related Products: Multi-tube Holder TM Series

(mm) Model Model Accessory TM-04 TM-06 TM-08 2 x 6 TM-04 TM-06 TM-08 TM-10 TM-12 4 6 8 10 12 2.6 x 8 4 TM-10 3 x 8 TM-12 Dimensions: Multi-tube Holder N x D (Pitch) N x holding part Cutting groove for separation N (No. of holding parts) Applicable tubing O.D.

•

cF , 06, a8 010 0 10 012 rv,iIljme:tersi~e 06 08 08 01 /4" Tube out&ide . Inch' size I0 1/4" 03/8' 05/16" 05/16" diameter . . 03/S' 051160 1/2" Flbw."rate tlin\~ 330 750 350 C ,oP/rolled flow . (A,MR~~N '(lmjQ' . 180 600 1100 1190 [Ereo flaw) Effettive ~IOnal 11.6 17 2.9 5.2 18.4 5.4 9.3 'ttrea mm 2 .

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

25

One-touch fitting 06 08 10 6 One-touch fitting 8 One-touch fitting 10 One-touch fitting Power supply cable Refer to the table below for selection of One-touch fittings.

VZ3000

-5 Gasket DXT192-10-5 (Use caution to the orientation.)

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

10 stations Size of P, EA, EB port Note) SU and TBU require one station. 02 03 04 06 10 1/4 3/8 1/2 3/4 1 Location and size of A, B port 02 03 04 06 10 02B 03B 04B Side 1/4 Side 3/8 Side 1/2 Side 3/4 SIde 1 Bottom 1/4 Bottom 3/8 Bottom 1/2 Option Nil TBU SU W None With terminal box With SI unit Splash proof 3-11-18

TM

(inch) 4 6 8 10 12 Accessory Model TM-04 TM-06 TM-08 2 x 6 T TM-04 TM-06 TM-08 TM-10 TM-12 2.6 x 8 4 TM-10 VMG 3 x 8 TM-12 Dimensions: Multi-tube Holder (Pitch) N-holding part Cutting groove for separation N (No. of holding parts) Applicable tubing O.D.

Ozone Resistant

40 30 20 10 0 Initial value Measuring point 6 4.

FH34/44/54/64

With relief valve None 0 1 Port size Flange SSA 15 (1/2B) 20 (3/4B) 25 (1B) 32 (1 1/4B) 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 80 (3B) Threaded Rc 3/8 1/2 3/4 1 1 1/4 1 1/2 Symbol 03 04 06 08 10 12 16 20 24 Replacement Element Part No.