Electric Actuator / Low profile slider type

Note 10) A reference value for correcting an error in reciprocal operation. -10- (3) LEMH (Linear guide single axis type) / LEMHT (Linear guide double axis type) Model LEMH25/LEMHT25 LEMH32/LEMHT32 50, 100, 150, 100, 150, 200, 250, 300, Stroke (mm) Note 1) 50, 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600, (700), (800), (900), (1000) 350, 400, 450, 500, 550, 600, (700), (800), (900

Ionizer

mm x 150 mm, capacitance: 20 pF) as defined in the U.S.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16

Load N 0 50 100 150 Load N 0 50 100 150 Load N 200 16 16 16 L = 120mm L = 120mm L = 120mm MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.08 0.12 0.06 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 MXP16-20 MXP16-30 0.10 Table displacement mm Table displacement mm Table displacement mm 0.06 0.04 0.08 0.04 0.06 0.04 0.02 0.02 0.02 0 0 0 50 200 250 Load N 150 100 50 200 250 Load N 150 100 100

3 Port Solenoid Valve Metal Seal Series VZ200 1

-2 to 4-18-6.

2/3 Port Valve

11 18 11 12 7 8 5 5 3 3.8 2.5 1.3 1 0.7 VNB1-6A VNB1-8A VNB1-10A VNB24-10A VNB2-10A VNB24-15A VNB2-15A VNB34-20A VNB3-20A VNB44-25A VNB4-25A VNB54-32A VNB5-32A VNB54-32F VNB5-32F VNB64-40A VNB6-40A VNB64-40F VNB6-40F VNB74-50A VNB7-50A VNB74-50F VNB7-50F 1 8 1 4 770 520 770 520 500 330 500 330 320 210 320 210 220 130 140 90 90 55 70 45 23 18 0.3 0.4 7 3 8 0.6 0.7 1 2 3 4 0.9 1.0 1.4

3 Port Air Operated Valve Series SYJA300

M3 x 0.5 18 0.9 M3 x 0.5 39 (Without subplate 18) Base mounted (with sub-plate) 0.089 M5 x 0.8 0.36 0.31 0.089 0.36 0.31 N.O.

High Power Cylinder Series RHC

flats KA 10 10 JC N NA S + Stroke X Y X Y LX LZ LS + Stroke ZZ + Stroke (mm) A AL D E F FL GA GB H H2 H1 JC JD K KA LD LH Bore size (mm) 20 43 18 10 30.5 15.5 14.5 5 16 8 11.5 7 53.5 25 47.5 44 8 5 25 39 22 12 25.5 19.5 18 5.5 16 10 11.5 7 56.5 28 49.5 48 8 6 32 36 22 12 28.5 19.5 18 5.5 19 10 14.5 7 55 30 51.5 51 9 6 40 32 24 16 23 21 20.5 7.5 21 14 16.5 9 56 35 51.5 54.5 11 8 LT LX LY

HRX-OM-W002

19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22 25 26 27 22 2 2 7 7 6

Air-hydro Unit

S F 35 CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 148.5 103.9 45 1/2 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 148.5 57 1/2 121.8 101 M5 x 0.8 5.4 to 7.5 CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 148.5 57 1/2 103.9 101 CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57 1/2 CCVL02-G-S

HRX-OM-X084

(Up to 150 records will be recorded.) 5.5.8 HRR Series 5.1 List of Functions 5-1 HRX-OM-X084 Chapter 5 Display and Setting of Various Functions 5.2 Function 5.2.1 Key operations The key operation of this product is shown in Fig 5 -1 Key operation list (1/4) to Fig 5-4 Key operation list (4/4).

REC

Up to 700 45 25 150 Up to 700 25 45 MK(2) 1500 32 150 Up to 1000 32 50 RS Q G 40 200 Up to 1000 40 60 Note 1) The cylinder performance may not as expected when stroke is shorter than recommended stroke even they are available.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VZ 285.5 21 273 No.

ZR

, 20 Individual exhaust style for nozzle size 18, 20 For vacuum switch and adapter A For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 For nozzle size 18, 20 e r t For nozzle size 10, 13, 15 [For ZSE4 spec.]

NCM-A

(1 1/2") 0.437 7/16-20 0.75 0.749 0.38 1.56 0.25 1.25 200 (2") 0.625 1/2-20 0.88 1.374 0.50 2.06 0.38 1.75 WC CUSHION NEEDLE (HEX 1.5MM) NE NN W WA WB WC Y YC ZB ZC ZD 0.12 5/18-18 0.50 0.60 0.51 90 0.95 0.28 3.39 0.09 1/8 NPT 0.25 5/18-18 0.62 0.72 0.47 90 1.17 0.28 3.47 0.09 1/8 NPT 0.41 3/4-16 0.88 0.85 0.51 45 1.50 0.31 3.91 0.09 1/8 NPT 0.50 1 1/4-12 1.19 1.20 0.81 45 1.91 0.59 5.11

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

NBR (g) Model Mass Model Mass SP (g) ZPX40HBN-01-B 8 ZPX 80HBN-01-B10 150 275 Pad dia.

C92

B C D E F G H P U Load (kn) Weight (g) M A MB JA30-10-125 JA40-12-125 JA50-16-150 JAH50-20-150 JA125-27-200 JA160-36-200 2.5 4.4 11 18 28 71 M10 X 1.25 M12 X 1.25 M16 X 1.5 M20 X 1.5 M27 X 2 M36 X 2 49.5 60 71.5 101 123 178 19.5 20 22 28 34 51 22 24 25 30 38 55 24 31 41 59,5 66 96 5 6 7.5 11.5 13 16 8 11 14 24 27 36 8 11 13.5 16 20 24 17 22 27 32 41 55 9 13 15 18 24 42 0.5 0.75 1.0 2.0 2.0

MY2

M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.

High Power Cylinder Series RHC

12.5 16 10.5 19.5 14 14.5 9 20.5 29.5 30 27 25 25 15 17.5 12 18 12.5 16 10.5 19.5 14 14.5 9 20.5 33 33.5 30.5 32 32 15 19.5 12 20 12.5 18 10.5 21.5 14 16.5 9 22.5 37.5 38 35 40 40 20 24.5 17 25 17.5 23 15.5 26.5 19 21.5 14 27.5 43 43.5 40.5 50 50 18 28.5 15 25.5 15.5 23.5 13.5 27 17 22 12 28 50.5 50.5 47.5 63 63 18 28.5 15 25.5 15.5 23.5 13.5 27 17 22 12 28 59 80 80 30.5 16.5 29 15

Intrinsically Safe Valve

(For details, refer to page 18.) The solenoid must be connected to a safety barrier located in a non-hazardous area.

K35-OMW0030

Piston rod moving average speed (*1) (1) IN-777-125TF-250F*-HL (2) IN-777-160TF-200F*-HL 150 150 average speed [mm/s] average speed [mm/s] Piston rod moving Piston rod moving 100 100 50 50 0 0 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 8 9 Speed adjustment rotary switch set value Speed adjustment rotary switch set value (3) IN-777-160TF-300F*-HL (4) IN-777-200TF-200F*-HL 150 150 average speed [mm