2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

A 2 to 200 L/min flow range option has been added. A rear ported type has been added. A flow adjustment valve (0.05 to 5 L/min) has been added.

Air Fittings Fitting Series For Special Environment

Male elbow: KRL Inch e l b a c i l p p A . D .

Nozzle Type Ionizer

Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Caution: Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Warning: Danger : Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury.

SJ3A6

Note 3) When removing a straight-type fitting assembly from a valve, after removing the clip, attach tubing or a plug (KJP-02, KQ2P-mm) to the one-touch fitting, and pull it out while holding the tubing or plug. If it is pulled out while holding the release button of the fitting assembly (resin part), the release button may be damaged.

20

No cracks, breaks or other damage occurred in a drop test from a 2-meter height or in a human stomp test.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type 1

AS ASP ASN AQ ASV Dimensions AK Universal type Weight (g) T H1 H2 D1 D2 D3 L1 L2 L3 L4 L5 A M1 Max. Min. Max. Min.

Compact and Lightweight

H2 L3 L2 L1 All Ports: Screw-in Model H1 H2 H3 L1 L2 L3 L4 Connection thread 1 Connection thread 2 Connection thread 3 ZH05DA-01-01-01 12 12 12 67 42.5 27 26 Rc1/8 Rc1/8 Rc1/8 ZH07DA-01-01-01 70.2 ZH10DA-01-01-01 76.4 ZH13DA-01-02-02 17 17 90.8 51 29.5 36.3 Rc1/4 Rc1/4 ZH15DA-02-03-03 17 19 19 108.2 63.3 34.3 37.1 Rc1/4 Rc3/8 Rc3/8 ZH18DA-03-03-03 19 131.1 73.6 41.1 39.1 Rc3/8 ZH20DA-03-04

Vacuum

Connection Rc 1/4 02 a a connection Bc 3/8 03 a Connection Rc 1/2 04 a Brackel B C C C t . : . !

Vacuum

Connection Rc 1/4 02 a a connection Bc 3/8 03 a Connection Rc 1/2 04 a Brackel B C C C t . : . !

Output block / Power block

up to 3.1 A.

HRX-OM-Z002

For a facility having a small installation area (that cannot vent the air naturally): Make a forced air exhaust vent in a wall at a high level and an air inlet in a wall at a low level.

VFRA3000

B: 34.2 (1.9) A, BEA, EB: 45 (2.5) [A, BEA, EB: 27 (1.5)] VFRA3311-03 1 4 VFRA3411-02 3 position exhaust center 0.72 1 8 PA, B: 36 (2.0) A, BEA, EB: 50.4 (2.8) [A, BEA, EB: 28.8 (1.6)] 3 8 VFRA3411-03 1 4 39.6 (2.2) [PA, B: 16.2 (0.9)] VFRA3511-02 3 position pressure center 0.72 1 8 VFRA3511-03 3 8 41.4 (2.3) [PA, B: 16.2 (0.9)] JIS symbol 2 position single 3 position closed center ( ):

ITV

Note 5) When mounting a blanking plate and the regulator with different pressure set, please inform SMC of the order of a manifold station beside a purchase order. Note) Refer to the table below for possible mixed combination.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Note 2) Do not use in a line where a pressurized condition is maintained since the body may be damaged. Note 3) Polyurethane is only applicable for the ZFC050-02. SP ZCUK Made to Order (Refer to page 1115 for details.)

Air Cylinder

of band and screw) BMA2-050AS (A set of band and screw) BMA2-063AS (A set of band and screw) D-G5/K59 D-G5W/K59W D-G5BA/G59F D-G5NT D-B5/B64 D-B59W D-G5NB (A set of band and screw) BA-02 BA-01 (A set of band and screw) BA-32 (A set of band and screw) BA-04 (A set of band and screw) BA-05 (A set of band and screw) BA-06 (A set of band and screw) BA-08 (A set of band and screw) BA-10 (A

3 Port Solenoid Valve

x 0.8 Port 2 M5 x 0.8 Note) 10-V114(A) and 10-V124(A) cannot be mounted on the same manifold.

ZB-OM00301

10 ZB1-VPN3A KJ H 04 04 C2 2 H 02 2 C4 4 L 04 4 N1 1/8" 01 1/8" N3 5/32" 03 5/32" L2 2 4 L4 4 LN1 1/8" LN3 5/32" -N KJL04-C1-N 10 Assy ZB1-FE3-A 30m ZA ** 10 1 0-101kPa15V 2%F.S ZA ZB1-SE1-A 3 -100100kPa15V 2%F.S.

VVXA21/22

VN LVC LVA LVH Variations LVD LVQ Valve Material Base, Body Seal Aluminum NBR, FKM, EPDM LQ Common SUP Individual SUP Common SUP Individual SUP Port A Port A Normally closed (N. C.) LVN Port P TI/ TIL Port P Port P PA Port A PAX Port A Port A PB Normally open (N. O.)

Manifold Specifications

Electrical entry SC (T only) Type SU Type SC Type SC Type SU Type SC Type SU AXT622-5A AXT336-4AStations AXT336-5Stations Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod

HRX-OM-W002

For a facility having a large installation area (that can vent the air naturally): Make an air outlet on a wall at a high level and air inlet on a wall at a low level, to allow for adequate airflow. 2. For a facility having a small installation area (that can not vent the air naturally): Make a forced air exhaust vent on a wall at a high level and an air inlet on a wall at a low level.