AC Servo Motor Driver (CC-Link Type)

. output 8 PT7 RY(n 2)9 Reserved RX(n 2)A RY(n 2)A Position/speed specifying system selection to Reserved RX(n 2)F selection RX(n 3)0 RY(n 2)B Absolute value/incremental value to Reserved RY(n 2)C RX(n 3)9 to Reserved RX(n 3)A Problem ALM 15 RY(n 2)F RX(n 3)B Remote station communication ready CRD RY(n 3)0 to Reserved RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F Note.

CNG

m l m m m L L t t t t B1 H1 Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Applicable bore size (mm) Part no.

AC Servo Motor Driver (CC-Link Type)

. output 8 PT7 RY(n 2)9 Reserved RX(n 2)A RY(n 2)A Position/speed specifying system selection to Reserved RX(n 2)F selection RX(n 3)0 RY(n 2)B Absolute value/incremental value to Reserved RY(n 2)C RX(n 3)9 to Reserved RX(n 3)A Problem ALM 15 RY(n 2)F RX(n 3)B Remote station communication ready CRD RY(n 3)0 to Reserved RX(n 3)C RY(n 3)9 to Reserved RY(n 3)A Reset RES RX(n 3)F Note.

VQ7-6/7-8

side 40(53) VFN D side (2n-1/8) 2 82.5 62 59 17 154 (Single) 175.5 (Double) 180.5 175.5 (3 position) 94 139 14 12 P PB PA 80.5 R2 R1 67 (Pilot pressure EXH port) 4-1/8 40(41.5) 38(27) 1 3 5 SMC 6-1/2, 3/4 32(35) 32(35) 35 35 L Dimension Formula L n 10 9 8 7 6 5 4 3 1 2 P , R1, R2 port n: Stations L1 = 56n + 64 L2 = 56n + 80 n: Stations L1 = 56n + 90 L2 = 56n + 106 L1 624 568 512 456 400 344

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Solid state auto switches marked with are produced upon receipt of order.

EXxx-OMY0006CN

L/A LED Table 10-22 L/A LED L/A 1/2 SI 1/2XF1/2PROFINETEthernet SI 1/2XF1/2PROFINETEthernet SI 1/2XF1/2 SI 1/2XF1/2 * *: Link LED Act LED 10.9.1.5. FO1/2 LED Table 10-23 FO 1/2 LED FO 1/2 2dB 0dB 2dB 0dB 10.9.2. LED 2 LED UT1 UT2 UT1 UT2 IN0, IN1, , IN7 M IO (Zone M) / Z1,Z2,Z3 (Zone 1-3) / Fig. 10-4 EX245-FPS1/2/3 LED 2 10.9.2.1.

Cylinder with Lock Series CNG

m l m m m L L t t t t B1 H1 (mm) (mm) (mm) Dd9 Applicable bore size (mm) L L Dd9 d l l d m t Snap ring Snap ring t m Part No.

Speed Controller: Standard Type Series AS In-line Type 1

Applicable model M-5N AS1000 Nipple Note) AS1000 with nipple: AS1000-M5-N How to Order M5 AS 1 000 Option Body size H (1) High temperature (5 to 80C) 1 2 3 4 5 M3, M5 standard L (2) Low temperature (30 to 60C) 1 8 1 4 , standard standard standard standard Note 1) AS5000 is available as special. AS1000 is not applicable.

VQ7-6/7-8

P R2 R1 67 40 (41.5) 38 (27) 6-Rc1/2, 3/4 1 5 3 SMC 32 (35) 32 (35) 35 35 L: Dimensions Fomula L n 10 9 8 7 6 5 4 3 2 1 Port P, R1, R2 n: stations L1 = 56n + 64 L2 = 56n + 80 n: stations L1 = 56n + 90 L2 = 56n +1 06 L1 624 568 512 456 400 344 288 232 176 120 Rc1/2 L2 640 584 528 472 416 360 304 248 192 136 L1 650 594 538 482 426 370 314 258 202 146 Rc3/4 L2 666 610 554 498 442 386 330 274

Clean Air Module

AME Digital flow switch AMF Measured flow range 5 to 100 L/min 50 to 500 L/min Nominal filtration rating: 0.01 m (Filtration efficiency 99.99%) Measured flow range 5 to 100 L/min 50 to 500 L/min Nominal filtration rating: 0.01 m (Filtration efficiency 99.99%) Filter Restrictor Regulator ZFC SF SFD LLB LLB AD GD Nominal filtration rating: 0.01 m Nominal filtration rating: 0.01 m (Filtration

EXxx-OMS0026CN

ST(M) PWR () DC24 V10 10 PWR(V) () DC24 V+10/-5 1EtherNet/IP Web H.T. 2(62 ) -37No.EX-OMS0026CN No. 1 EtherNet/IP (L/A IN L/A IN L/A OUT LINK L/A INL/A OUT 11 OUT L/A OUT RUN L/A IN L/A OUT LINK MS [](64 ) RUN MS: LED 27 MS: SI NS: IP IP [IP ]( 19 ) 12 PLC PLC SI TM NS: EtherNet/IP PLC PLC SI TM NS: EtherNet/IP NS: IP IP [IP ](19 ) -38No.EX-OMS0026CN No.

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

25-MLA [ISE35-N-25-M (Switch body only)] NPN output / Wiring bottom entry ISE35-R-25-MLA [ISE35-R-25-M (Switch body only)] NPN output / Wiring top entry Note 4) Digital type ISE35-N-65-MLA [ISE35-N-65-M (Switch body only)] PNP output / Wiring bottom entry ISE35-R-65-MLA [ISE35-R-65-M (Switch body only)] PNP output / Wiring top entry Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40

PSxx-OMH0002CN

2MPa 67 2 PNP 2 ZS-31-A A M12 (5 m) ZS-31-B S M12 (5 m) ZS-31-C L -8No.PS-OMH0002CN-D LCD () SET UP DOWN 4 24 ()OUT1ON LCD 4 UPON/OFF DOWNON/OFF SET -27-67 (-27-67 OUT2()) -9No.PS-OMH0002CN-D 7 7 "8"7 "-"()7 D Digit () 1 digit=0.01 MPa 0.01 MPa 0.01,0.02,,0.99,1.00 F 01[MPa] F.S.=1-0=1[MPa] (1F.S.=10.01=0.01[MPa]) F.S.

Auto Switch Guide

L D-A73 (Example) RS H A Lead wire length RZQ 5 m None Nil L 0.5 m 3 m Z N MI W S Applicable for the connector type (D-C) only.

PA300/500/700

Station n L L1 L2 Formula L1 = 41 x n + 33 L2 = 41 x n + 17 9 402 386 10 443 427 2 115 99 3 156 140 4 197 181 5 238 222 6 279 263 7 320 304 8 361 345 5-5-24

Auto Switch Guide

L D-A73 (Example) CS1 Lead wire length C76 5 m None Nil L 0.5 m 3 m Z N C85 Applicable for the connector type (D-C) only.

Electromagnetic Digital Flow Switch

Model Flow range 0.5 L/min 2 L/min 5 L/min 10 L/min 20 L/min 50 L/min 100 L/min 200 L/min 0.5 L/min 20 L/min LFE1 0.4 L/min 24 L/min 0.4 L/min 24 L/min 2.5 L/min 100 L/min LFE2 2 L/min 120 L/min 2 L/min 120 L/min 5 L/min 200 L/min LFE3 4 L/min 240 L/min 4 L/min 240 L/min Rated flow range Display flow range Set flow range 21 These safety instructions are intended to prevent hazardous situations

Auto Switch Guide

L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.

Auto Switch Guide

L D-A73 (Example) CLQ Lead wire length MLGP 5 m None Nil L 0.5 m 3 m Z N RLQ Applicable for the connector type (D-C) only.

Auto Switch Guide

L D-A73 (Example) 20Lead wire length Data 5 m None Nil L 0.5 m 3 m Z N Applicable for the connector type (D-C) only.