90

= 12.5 x + 10.5] : Length symbols 1 to 40 01 1 L = 23 to 40 L = 510.5 For 1 station manifold to 10 For 10 stations manifold L rPort plug assembly VVQZ2000 CP tPort plug assembly 1.25 P=12.5 5.25 7.5 ZK2 MP1C6 A 35 25 5.5 yOne-touch fitting assembly VVQ1000 51A C8 L Dimension L = 12.5 x n + 10.5 No.

45

AXT100-DS25015 030 050 L Terminal no.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

J Cylinder tube outer circumference: Hard chrome plated + special treatment L 0 -0.1 H B 2-P (Piping port) G E G NN ( I ) D X NA R Mounting nut N W K N F S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5

Plug-in Unit

1 2 3 4 5 6 7 Stations D-side 8 U-side Formulas L1 = 25n + 106 (Maximum 16 single wiring stations) L2 = 25n + 192 n: Stations n L L1 L2 1 131 217 2 156 242 3 181 267 4 206 292 5 231 317 6 256 342 7 281 367 8 306 392 9 331 417 10 356 442 11 381 467 12 406 492 13 431 517 14 456 542 15 481 567 16 506 592 2-2-53 Base Mounted Series VQC L VQC1000/2000/4000 Kit (Lead wire kit) IP67 compliant Direct

One-touch Fittings

tubing P Effective area [mm2] Min. port size Release button dimensions L A2 M P Q O N Applicable tubing O.D.

45

AXT100-DS25015 030 050 L Terminal no.

Process Pump

Symbol Nil N F Option Option Symbol Applicable actuation Built-in solenoid valve Air Operated PB1013A Air operated Port size Port size 1/8 Nil B N None With foot With silencer Symbol 01 When option is more than one, suffix in alphabetical order.

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

L-Bracket DIN Rail Mounting Bracket Adapter Brackets on both sides Brackets on both sides Direct mounting For use when the mounting surface interferes with the bonnet. L8 L8 x n pcs. + L16 x 2 + L26 x (n1) pcs. L8 x n pcs. + L17 x 2 + L26 x (n1) pcs. L8 L8 x n pcs. + L25 x 2 + L26 x (n1) pcs. L27 + L8/2 Bonnet Mounting surface Refer to page 6 for L8.

Prevents Micro-Bubbles

steel Body material: PPS N G A G A D L Non-locking type Locking type 60 K 4-M Non-locking type Locking type C (H1) (H2) 60 A B E C (H1) (H2) 2-P B Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SMC A B E L J B 2-P 2-F K Body material: PFA N G A D L K 4-M Non-locking

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Optional Parts Clean Room Compliant (10-) 10-ARP20(K) 10-ARP30(K) 10-ARP40(K) Model Bracket assembly Note 1) ARP20P-270AS ARP30P-270AS ARP40P-270AS Set nut ARP20P-260S ARP30P-260S ARP40P-260S G49-4-01 G49-4-02 0.4 MPa G49-2-01 G49-2-02 0.2 MPa Round type Note 2) G49-7-01 G49-7-02 0.7 MPa Pressure gauge NPN output / Wiring bottom entry ISE35-N-25-MLA [ISE35-N-25-M (Switch body only)] NPN output

3 Port Solenoid Valve

Note 1.5 m Cable length L Assembly part no. Note 1.5 m V100-DS15-015(N) V100-DS15-030(N) V100-DS15-050(N) V100-DS26-015(N) V100-DS26-030(N) V100-DS26-050(N) Cable 15 cores X23AWG Cable 26 cores X23AWG 3 m 3 m 5 m 5 m Note) For N, the unified thread is used. Note) For N, the unified thread is used.

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

"n" pcs. Nil S n 12mm 16mm 20mm 25mm 2 pcs. 1 pc. "n" pcs.

Modular Type Air Filters Series AF

AF40 4 Series AF20~40 Filter Standard (Manual Drain) S F 4 T BRACKET MOUNTING THREAD W M R C G J Q P K N 2 A Bowl Detail U (AF20) H L E IN OUT D Bracket (Optional) Note: Sight glass not applicable to AF20.

High Purity Chemical Valve

E F G H1 H2 J K L M N Model LVH20m LVH30m LVH40m 30 30 52 44 11 79 10 72.5 74 4 20 37 3.5 27 36 47 81.5 56 16.5 106 19 111 113 7.5 34 46 5.5 37.5 46 60 100 68 22.5 131 20.5 139 143 8 42 57 5.5 50 483 Series LVH Dimensions/Threaded Type N Body material: PPS Body material: Stainless steel N G A G A D L Non-locking type Locking type 60 K 4 x M Non-locking type Locking type (H1) (H2) C 60 A B

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 Cuts air consumption by operating the return stroke at a reduced pressure.

Series IDG

50M IDG30HM, 50HM IDG30LM, 50LM (B) K (D) C L H F 37 J IN OUT M (E) (G) M5 female threads Drain discharge With drain guide With float type auto drain (P) (N) N.C.: Gray N.O.: Black Thread size: 1/4 (without valve mechanism) Applicable tube O.D.: 10 (NPT threads: 3/8 inch) Width across flats 19 With float type auto drain With drain guide Port size A B C D E F G H J K L M N Model P 150 146

Ionizer Gun

Ionizer IZG10 08 01 01 Ionizer Gun One-touch fitting Nozzle type Symbol Applicable tube O.D.

IDX-OM-W023

FM2 FM2 MOV MOV M For Option M M For Option M M For Option M M For Option M IDU11E-10-T IDU8E/11E-23-T GFCI R For Option R GFCI GFCI GFCI R For Option R R For Option R GFCI R For Option R R For Option R For Option R R For Option R TB N L 3 2 1 PE 3 1 2 PE N L Operation Failure 3 1 2 PE N L 3 1 2 PE N L TB L N PE 2 3 1 TB TB ILS TB TDR MC TDR MC ILS TDR MC ILS ILS ILS MC MC MC MC

VSA4

VSA4320, VSA4420 Applicable valve Manifold weight general equation M = 0.66n + 0.75 (kg) n: Station VVSA430N Dimensions (mm) n L L2 256 L1 214 2 stations 326 284 3 stations Pilot hole 396 354 4 stations 466 424 5 stations 70n + 116 70n + 74 n stations VSA4130, VSA4230 VSA4330, VSA4430 Applicable valve 4-10.5 mounting hole Manifold weight general equation M = 0.87n + 0.95 (kg) n: Station