CYPSeries

No IC circuit P P Y59A Y69A 3 wire (NPN) IC circuit p P P 5V, 12V P.9 Y7P Y7PV IC circuit 3 wire (PNP) p P P Y59B Y69B 12V 2 wire p P P Relay, PLC Solid state switch 24V Y7NW Y7NWV 3 wire (NPN) Grommet Diagnostic indication (2 color indicator) Yes p P P 5V , 12V IC circuit Y7PW Y7PWV P.10 3 wire (PNP) p P P Y7BW Y7BWV 12V p 2 wire P P Lead wire length symbols: 0.5m .

CYPSeries

No IC circuit P P Y59A Y69A 3 wire (NPN) IC circuit p P P 5V, 12V P.9 Y7P Y7PV IC circuit 3 wire (PNP) p P P Y59B Y69B 12V 2 wire p P P Relay, PLC Solid state switch 24V Y7NW Y7NWV 3 wire (NPN) Grommet Diagnostic indication (2 color indicator) Yes p P P 5V , 12V IC circuit Y7PW Y7PWV P.10 3 wire (PNP) p P P Y7BW Y7BWV 12V p 2 wire P P Lead wire length symbols: 0.5m .

90

P Supply valve: Self-holding type (R type) Release valve: N.C.

Compact Guide Cylinder End Lock Type SeriesMGP

P P P Lock position Z80 P P H R Rear lock Front lock Y59A Y69A P p P Manual release Y7PV Y7P P P p N L Non-locking type Locking type Y59B Y69B P p P Solid state switch Y7NW Y7NWV P P p Y7PW Y7PWV P P p Y7BW Y7BWV P P p Y7BA P p Lead wire symbols 0.5m . Nil (Example) Y69B 3m . L Y69BL 5m . Z Y69BZ Solid state switches marked with a "p" are produced upon receipt of order.

EXxx-OMO0027

:1D SI unit BOOL RO P 60A0:21 Slot 0 BOOL RO P 60A0:22 Slot 1 BOOL RO P 60A0:23 Slot 2 BOOL RO P 60A0:24 Slot 3 BOOL RO P 60A0:25 Slot 4 BOOL RO P 60A0:26 Slot 5 BOOL RO P 60A0:27 Slot 6 BOOL RO P 60A0:28 Slot 7 BOOL RO P 60A0:29 Slot 8 BOOL RO P 60A0:2A Slot 9 BOOL RO P -76No.EX-OMO0027-A Module Output Data SI unit (EX600-SEC) Table.

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

E-P HYREG ® Series VY1

AL P port pressure (MPa) P port pressure (MPa) VY190 0 1 VY170 0 1 A port pressure (MPa) A port pressure (MPa) Set point Set point Set point Set point Set point Set point P port pressure (MPa) P port pressure (MPa) 14-10-5 Series VY1 Characteristics Flow Characteristics VY1A00 1/1B00 1 VY1D00 A port pressure (MPa) P port pressure 0.88 MPa A port pressure (MPa) P port pressure 0.88 MPa Flow

LEC-OM02904

P-D P P C C G3 D (2) G4 5m 5m (1) 1.

Digital Flow Switches

Real-time switch output Unit switching Hysteresis mode ON For Air YES OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l Real-time flow rate "P" Window comparator mode H : Hysteresis CFM x 10-2 x CFM x 10-1 ft3 x 10-1 H H CFM = ft3/min ON High Flow Rate Type (For Air) NO OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 Real-time flow rate OUT1

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Series NVFR40O0:Base Mounted Tlpe Constructio n/ P ar ts L i.st NVFR4 I OO 2 posi$on sirle 2 Doition double A P B E B P E 3 poBition Closed center/Erhsust center/Pressure center Closed center/NVFR43O0 I & C t 0 $ r P E E A A P B E B P E Main Parts No.

ARM10/11

AL SMC SMC SMC SMC SMC SMC 0.1 0.3 0.2 0.4 0.5 0.6 IS1000 MPa SMC SMC SMC K K K P P P C C C U U U O O O SMC SMC SMC SMC S S S L L L H H H MADE IN JAPAN K K K P P P C C C U U U O O O S S S L L L H H H Mixed manifold Mixed manifold Front handle/Bottom ported Front handle/Top ported Common exhaust type and individual exhaust type can be mounted on the same manifold base.

DOC1001322

P.5-13 (14) Startup operation status display Displays the status of operation settings at startup P.5-14 (15) Anti-freezing status display Displays the status of anti-freezing settings. P.5-14 (16) Warming up status display Displays the status of the warm-up settings. P.5-14 Pump operation continuation status display Displays the status of pump operation continuation setting.

LECP6_C

LED() /P.18 5.CN1: PLC /P.24 6.3 / / CN1 CN5 / DC24V /P.16 4. /P.27 6.4 I/O /P.48 12. ONOFF /P.11 3. /P.48 12. / CN1 CN5 / DC24V /P.16 4. /P.27 6.4 I/O /P.14 3.4 63 - /P.28 7. (CN1: /P.11 3. EMG ) SV1.00 INP ON INP OFF (INP PLC ) /P.24 6.3 / /P.11 3.

VZS

Body type Rc 1 8 Plug-in type VVZS3000-P-01-1 Non plug-in type VVZS3000-P-01-2 Rc 1 4 VVZS3000-P-02-1 VVZS3000-P-02-2 Body type Plug-in type AXT625-12A Non plug-in type Part no. Part no. Body type Plug-in type VVZS3000-22A-1 Non plug-in type VVZS3000-22A-2 Part no.

E-P HYREG ® Series VY1 1

pressure (MPa) P port pressure (MPa) VY1 VY140 0 1 VY150 0 1 G PPA A port pressure (MPa) A port pressure (MPa) Set point Set point Set point Set point Set point Set point AL P port pressure (MPa) P port pressure (MPa) VY190 0 1 VY170 0 1 A port pressure (MPa) A port pressure (MPa) Set point Set point Set point Set point Set point Set point P port pressure (MPa) P port pressure (MPa) 14-10

-fl Seies

Series NVFR40O0:Base Mounted Tlpe Constructio n/ P ar ts L i.st NVFR4 I OO 2 posi$on sirle 2 Doition double A P B E B P E 3 poBition Closed center/Erhsust center/Pressure center Closed center/NVFR43O0 I & C t 0 $ r P E E A A P B E B P E Main Parts No.

AC Servo Motor Driver (Network card type ）

(factory-wired) When using a driver built-in regenerative resistor, connect P+ and D. (factory-wired) When using a regenerative option, disconnect P+ and D, and connect the regenerative option to P+ and C. P+/C/D Regenerative option Refer to section 11.2 for details. Symbol Connection target (application) Description Supply the following power to L11 and L21.

High performance type Step Motor Controller (Servo/24 VDC)

Power supply plug P.24for wiring.

LECA6_C

SVRE OFF [BK RLS]DC24V [BK RLS] [BK RLS]DC24V [BK RLS] EMG /LEC 58 - 15. 15.1. / 15.2 ON 59 - 5 () 60 - 15.3 50mm 15.4 ( ) 61 - 15.5 15.6 D 100 15.7 62 - 16. , , (), 16.1 /P.16 4. LED() /P.18 5.CN1: PLC /P.24 6.3 CN1 CN5 DC24V /P.16 4. /P.27 6.4 I/O /P.48 12. ONOFF /P.11 3. /P.48 12. CN1 CN5 DC24V /P.16 4. /P.27 6.4 I/O /P.14 3.4 63 - /P.28 7. (CN1:EMG ) /P.11 3.

LX

Guide rod type P Actuator configuration Refer to the applicable motor list on the next page.