ZQ-OM01401

min (AMR) ] -80 [L/min (AMR) ] [kPa] [kPa] 20 -60 -60 15 -40 -40 10 -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 [MPa] [L/min (AMR) ] ZQ07A 0.43MPa -100 40 -100 35 -80 [L/min (AMR) ] -80 [L/min (AMR) ] 30 [kPa] [kPa] -60 25 -60 20 -40 -40 15 10 -20 -20 5 0 0 0 0 2 4 6 8 10 12 0.2 0.3 0.4 0.5 [MPa] [L/min (AMR) ] ZQ10A 0.43MPa -100 70 -100 60 -80 [L/min (AMR) ] -80 [L/min (AMR)

VZS2000

M plug connector 2 position double: VZS2250-M(Z)-01 3 position closed center: VZS2350-M(Z)-01 3 position exhaust center: VZS2450-M(Z)-01 3 position pressure center: VZS2550-M(Z)-01 DIN terminal 2 position double: VZS2250-D(Z)-01 3 position closed center: VZS2350-D(Z)-01 3 position exhaust center: VZS2450-D(Z)-01 3 position pressure center: VZS2550-D(Z)-01 Applicable cable O.D.: 3.5 to 7 MAX

AMD

400 550 560 745 300 300 1320 1380 1480 1610 1585 1740 24 24 4B, 6B 870 M20 x l 500 AMD1000 Please refer to Made to Order Specifications of Series AMD on pages 14-20-55 to 14-20-57. 14-20-28

Air Pilot Operated Series NVSA

E 6 \ ao ih'/ \ &d-bbr* jli.rion bor Mr !l!9@ !ryrq! l r"d lrtu (drd.d rrr rd 6l l u?qq''3. T!4qr'3.I rro9 b llia' rub. Bb ud rid @orral 'e d jsdM br prol .8, 'l xc (., d.r.it 6 Dd i.) ror bd no iincloi hr tror cMedoi. conrr.l. or ddr r3, (.) d.dr q (3) fi' r?rF nurh prus., T Pslro T xroc.3 T pb10. T xnG3 | ri.!l(._r,vrbodylo!'lo'|n. T I g.Prhr eql-tsPd ,utdroi bor c9{r Fibt M .'

Air Pilot Operated

E 6 \ ao ih'/ \ &d-bbr* jli.rion bor Mr !l!9@ !ryrq! l r"d lrtu (drd.d rrr rd 6l l u?qq''3. T!4qr'3.I rro9 b llia' rub. Bb ud rid @orral 'e d jsdM br prol .8, 'l xc (., d.r.it 6 Dd i.) ror bd no iincloi hr tror cMedoi. conrr.l. or ddr r3, (.) d.dr q (3) fi' r?rF nurh prus., T Pslro T xroc.3 T pb10. T xnG3 | ri.!l(._r,vrbodylo!'lo'|n. T I g.Prhr eql-tsPd ,utdroi bor c9{r Fibt M .'

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

M plug connector 2 position double: VZS3250-M(Z)-01 02 3 position closed center: VZS3350-M(Z)-01 02 3 position exhaust center: VZS3450-M(Z)-01 02 3 position pressure center: VZS3550-M(Z)-01 02 DIN terminal 2 position double: VZS3250-D(Z)-01 02 3 position closed center: VZS3350-D(Z)-01 02 3 position exhaust center: VZS3450-D(Z)-01 02 3 position pressure center: VZS3550-D(Z)-01 02 164 (3 position

VCL

(mm) A B C D E F G H J L Port size Bracket part no.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Port size AS-D U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 AS-T ASP Needle Valve/Flow Rate Characteristics ASN AS2201FSl-U02, AS2211FSl-U02 AS2201FSl-U01, AS2211FSl-U01 300 600 AQ Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 500 ASV 06, 07, 08, 09, 10 08, 09, 10, 11 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 03, 04 06, 07 200 400 AK 01, 23 300 VCHC 03, 04 100 200 ASR ASQ 01, 23

OML0002-C

Tooth for locking 20 -

IZx-OMV0005

IZN10E CP 01 X13 Symbol Type 01 1m 20 20m Bracket IZN10 B1 Symbol Type B1 L-bracket B2 Pivoting bracket B3 DIN rail mounting bracket Fixed Pivot Pivoting bracket L-bracket IZN10-B1 mounting mounting IZN10-B2 Manifold Single unit DIN rail mounting bracket IZN10-B3 10 Doc. no.IZ-OMV0005 1-3.Repair parts Emitter assembly IZN10E NT Body assembly A002 01 06 IZN10E Nozzle type One-touch fitting

VXZ

Fluid Table (1) Rated Voltage-Electrical Entry-Electrical Option Standard specifications Option (1) Made to Order (2) Water (standard) Turbine oil High temperature water (D, E) Air X500B Vacuum (up to 1.3 x 10 2 Pa) X500B For pure water X500 G C Class B D, T Class H G, C T S Note) S L, Z L, Z S Note) Surge voltage suppressor is attached in the middle of lead wire.

Lubrication Equipment

Lube Unit ALDU600-l06 to 10, ALDU900-l12 to 20 A B C D E F G H J K L M N P Q R S Model Port size 3/4 283 296 424 424 476 67 77 85 90 100 43 10 57 51 16 ALDU600-l06 ALDU600-l10 ALDU900-l12 ALDU900-l14 ALDU900-l20 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1/4 1/2 615 615 682 419.2 209 1 1 1 250 125 33.2 33.2 710 670 20 700 230 120 222 1.17-19 Booster Lube Series ALB900 Standard

PSxx-OMM0006CN

ZS-35-C X X X X X E ZS-35-D X X ZS-35-F X X X X X + F ZS-35-G X X 1/ 1 ZS-24-A A M35 L,M45 L 2 ZS-24-B B M45 L, 2 ZS-24-D D M35 L,M45 L 2 ZS-35-C (01,N01) ZS-35-D (W1,WF1,M5,C4,C6) ZS-35-F +(01,N01) ZS-35-G +(W1,WF1,M5,C4,C6) -10No.PS-OMM0006CN-E M8(3 ) 01 N M L ISE40A 1/ 2 ISE40A -0.11.000 MPa Y ZSE40A 0.0-101.3 kPa K + T + 1 01 R1/8(M5) N01 NPT1/8(M5) A A D D N NPN1

HRX-OM-K003

C Facility water temp. +15C Circulating fluid rated flow rate L/min 4 30 40 40 (1.1 [gal]/min) (7.9 [gal]/min) (10.6 [gal]/min) (10.6 [gal]/min) Facility water minimum necessary flow rate L/min 10 20 25 40 (2.6 [gal]/min) (5.3 [gal]/min) (6.6 [gal]/min) (10.6 [gal]/min) Operating temperature range C 20 to 90 Temperature stability *1 C 0.3 Circulating fluid *2 Galden HT200 or FluorinertTM

Ionizer Gun

Dimensions Ionizer (Standard nozzle) / IZG10--01 Power supply connector One-touch fitting Applicable tube O.D.: Table 1 Table 1 Models Applicable tube O.D. 8 (mm) IZG10-08-01 IZG10-09-01 5/16 (inch) 20 Doc. no.IZ*-OMX0012-B Ionizer(Bypass nozzle)/ IZG10--02 AC adapter / IZG10-CG The AC adapter and power supply cable (AC adapter) are a set.

4-channel Flow Monitor (Remote type monitor unit)

with applicable sensor. -38No.PF-OMH0003-F PF2D20 Model PF2D20 Applicable sensor PF2D504 PF2D520 PF2D540 Rated flow range 0.4 to 4.0 1.8 to 20.0 4 to 20 L/min L/min L/min Instantaneous Setting/display flow range 1 0.25 to 4.50 1.3 to 21.0 2.5 to 45.0 L/min L/min L/min flow Flow Min. setting/display unit 0.05 0.1 0.5 L/min L/min L/min Accumulated Setting/display flow range 0 to 9 L Flow Min

Vacuum Regulator

connections IRV 20 C08 Accessory w Body size 10 20 Max. flow 140 l/min (ANR) Max. flow 240 l/min (ANR) None Note 1) Nil With pressure gauge Note 2) Note 3) (IRV10: With GZ33-K-01, IRV20: With GZ43-K-01) G ZN ZP ZA ZB Note 3) With ZSE30A-01-N-ML With ZSE30A-01-P-ML With ZSE30A-01-A-ML With ZSE30A-01-B-ML NPN open collector 1 output PNP open collector 1 output NPN open collector 2 outputs

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported/Base Mounted

How to Calculate the Flow Rate For obtaining the flow rate, refer to page 4-1-6. 4-16-1 Series VS3115/3110 How to Order VS311 D L 5 01 5 Thread type Accessory (Option) Nil Rc Mounting With indicator light L P With manual override N NPT T NPTF E Nil Without bracket Port size Piping Electrical entry B With bracket G 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Without sub-plate Rc 01 02 02 03 00 Body ported Bracket

AR Series Modular Type Regulator

G46-10-l01-L 0.02 to 0.2 MPa setting G36-4-l01-L G46-4-l01-L AR -A -B Note 1) Assembly of a bracket and set nuts Note 2) l in round pressure gauge part numbers indicates a pipe thread type.

90

NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.