Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Metric sizes Type 4 6 8 10 12 04 06 08 10 12 2 Elbow Control type 0 1 Meter-out Meter-in Port size M5 x 0.8 1/8 1/4 3/8 1/2 M5 01 02 03 04 With One-touch fitting Clean specification Metal part material Q G Brass (electoless nickel plated) Stainless steel (SUS304) Needle Valve/Flow Characteristics AS121FP-M5 AS221FP-01 AS221FP-02 08,10 06,08 06 04 04 AS321FP-03 AS421FP-04 12 10 10,12 08 06

E-P HYREG ® Series VY1

03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5 M5 2 1 4 R 2 1 0.11 0.16 Weight (kg) (1) 0.19 0.25 0.35 0.55 0.75 1.5

45

D D side Applicable makers Valve stations MB1 For Mitsubishi Electric Corporation TA1 For OMRON Corporation FU1 For Fuji Electric Co., Ltd.

PF2A/PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Valve Single Unit

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

Compact Manifold Regulator Series ARM5

A 1.18 (30) 1.61 (41) B 1.34 (34) 1.57 (40) C D E F G 136314 2.76 (70) 2.97 (75.5) .21 (5.4) .26 (6.5) .61 (15.4) .31 (8) 2.17 (55) 2.09 (53) .09 (2.3) .09 (2.3) NARM2500 43.5 136414 NARM3000 30 15 Precautions 0 35.3 70.6 106 Be sure to read before handling.

VS7-6

ISO Interface Solenoid Valve/SIZEq Metal Seal SeriesVS7-6 Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position SV SY VS7-6-FPG-D Closed centre (FHG-D) Exhaust centre (FJG-D) Double pilot check (FPG-D) Pressure centre (FLG-D) SYJ SX VS7-6-FHG-D Option VK Standard Specifications 5 to 60 oC 0.1 to 1.0MPa Air/lnert gas Fluid Operating

Table of Contents - Tubing

chart Air: 4 to 176F (20 to 80C), Water: 32 to 176F (0 to 80C) Polyolefin resin Shore D 54 Note 1) Contact SMC regarding other fluids.

Digital Flow Switches, Series PF2A, Series PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Applicable Auto Switch Model

(RedGreenRed) CXS 6, 10, 15, 20, 25, 32 MGQ, MVGQ 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 MGP 12, 16, 20, 25, 32, 40, 50, 63, 80, 100 MY1B 25, 32, 40, 50, 63, 80, 100 MY1C 25, 32, 40, 50, 63 MY1H 25, 32, 40 MY1M 25, 32, 40, 50, 63 RSH 20, 32, 50, 63, 80 Specifications D-Y7lW/D-Y7lWV (With indicator light) PLC: Programmable Logic Controller D-Y7NW D-Y7NWV D-Y7PW D-Y7PWV D-Y7BW D-Y7BWV Auto

Compact Vacuum Unit

/ZB041 Exhaust Characteristics Flow-rate Characteristics (Supply pressure: 51 psi (0.35 MPa)) 0.53 14.5 14.5 (15) (100) (100) Vacuum pressure psi (kPa) Vacuum pressure psi (kPa) 0.42 11.6 11.6 (12) (80) (80) Air consumption Vacuum pressure 0.32 8.7 8.7 (9) (60) (60) 0.21 5.8 5.8 (6) (40) (40) 0.11 2.9 2.9 (3) (20) (20) Suction flow 0 0 0 14.5 (0.1) 29 (0.2)43.5 (0.3) 58 (0.4)72.5 (0.5) 87

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Auto switch model Bore size [mm] 40 50 63 80 100 D-M9l/M9lV D-M9lW/M9lWV D-M9lA/M9lAV D-A9l/A9lV BA7-040 BA7-040 BA7-063 BA7-080 BA7-080 D-A5l/A6l/A59W D-F5l/J59/F5lW/J59W D-F5NT/F5BA/F59F BT-04 BT-04 BT-06 BT-08 BT-08 D-A3lC/A44C/G39C/K39C BA3-040 BA3-050 BA3-063 BA3-080 BA3-100 D-Z7l/Z80 D-Y59l/Y69l D-Y7P/Y7PV D-Y7lW/Y7lWV D-Y7BA BA4-040 BA4-040 BA4-063 BA4-080 BA4-080

Free Mount Cylinder

(g) Stroke (mm) Model 60 40 30 25 20 15 10 5 50 70 80 90 100 27 (32) 30 (40) 34 (44) 37 (47) 40 (50) 44 (54) 51 (61) 58 (68) 65 (75) C(D)UW6-D 44 (49) 49 (59) 53 (63) 58 (68) 62 (72) 67 (77) 76 (86) 85 (95) 94 (104) C(D)UW10-D 74 (99) 81 (111) 88 (118) 95 (125) 102 (132) 109 (139) 123 (153) 137 (167) 151 (181) C(D)UW16-D 132 (165) 145 (182) 158 (195) 171 (208) 184 (221) 197 (234) 223 (260

Auto Switch Guide

10-20-34 D-J79C Connector 10-20-35 D-F59/F5P/J59/J51 Grommet Tie-rod Terminal conduit 10-20-36 D-G39C/K39C D-M9N/M9P/M9B 10-20-37 D-M9NV/M9PV/M9BV D-F8N/F8P/F8B D-F9G/F9H 10-20-40 Direct Grommet D-Y59A/Y59B/Y7P 10-20-38 D-Y69A/Y69B /Y7PV 10-20-41 D-Y7G/7H 10-20-39 D-M5N/M5P/M5B D-H7NW/H7PW/H7BW 10-20-42 Band Grommet D-G59W/G5PW/K59W 10-20-43 2-color indication D-F79W/F7PW/J79W 10-20-44

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Auto switch type D-A3, A4 D-G3, K3 D-B5, B6 D-G5, K5 D-A5, A6 D-F5, J5 Cylinder bore size (mm) Bore size (mm) Standard stroke (mm) Long stroke (mm) Model 1800 (1401 or more with tie-rod reinforcing ring) Note 2) 32 25 to 800 32 40 50 63 80 100 32 40 50 63 80 100 32 40 50 63 80 100 BA-32 BA-04 BA-05 BA-06 BA-08 BA-10 BAF-32 BAF-04 BAF-05 BAF-06 BAF-08 BAF-10 BGS1-032 BH2-040 BH2-050 BA-06

KB

Bulkhead Female Connector: KBE H1 (width across flats) H2 (width across flats) T Connection thread Applicable Weight (g) D L A2 M A1 tubing Model O.D. 4 KBE1-04 KBE1-06 KBE2-06 KBE2-08 KBE2-10 KBE3-08 KBE3-10 KBE3-12 KBE4-12 34.5 35.5 37.5 39.0 41.5 43.5 45.0 46.0 44.0 31.5 32.0 33.5 35.5 38.0 39.5 41.0 42.0 41.5 17.9 27.0 26.0 29.5 57.5 51.6 63.0 83.4 66.6 16.0 15.0 15.5 17.0 15.5 15.5 19.5

Auto Switch Guide

conduit D-G39C/K39C 6-16-37 D-M9N/M9P/M9B MB1 D-M9NV/M9PV/M9BV D-F8N/F8P/F8B CA2 D-F9G/F9H Direct Grommet D-Y59A/Y59B/Y7P CS1 6-16-38 D-Y69A/Y69B /Y7PV D-Y7G/7H 6-16-39 C76 D-M5N/M5P/M5B C85 D-H7NW/H7PW/H7BW 6-16-40 Band Grommet D-G59W/G5PW/K59W 6-16-41 2-color indication C95 D-F79W/F7PW/J79W 6-16-42 Solid State Switch Rail Grommet D-F7NWV/F7BWV 6-16-43 CP95 D-F59W/F5PW/J59W Tie-rod

Auto Switch Guide

(Including bracket, screw) Applicable bore size (mm) 40 BMU2-040 50 BMU2-040 63 BMU2-040 Cylinder series MDU 8-30-60 61 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Tie-rod Mounting Style Reed switchD-A53, D-A54, D-A56, D-A64 D-A67, D-A59W Solid state switchD-F59, D-F5P D-J59, D-J51, D-F5BAL D-F59W, D-F5PW, D-J59W D-F59F, D-F5NTL

Auto Switch Guide

(Including bracket, screw) Applicable bore size (mm) 40 BMU2-040 50 BMU2-040 63 BMU2-040 Cylinder series MDU 8-30-60 61 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Tie-rod Mounting Style Reed switchD-A53, D-A54, D-A56, D-A64 D-A67, D-A59W Solid state switchD-F59, D-F5P D-J59, D-J51, D-F5BAL D-F59W, D-F5PW, D-J59W D-F59F, D-F5NTL

Auto Switch Guide

(Including bracket, screw) Applicable bore size (mm) 40 BMU2-040 50 BMU2-040 63 BMU2-040 Cylinder series MDU 8-30-60 61 Technical Data 2: How to Mount and Move the Auto Switch Mounting Bracket Tie-rod Mounting Style Reed switchD-A53, D-A54, D-A56, D-A64 D-A67, D-A59W Solid state switchD-F59, D-F5P D-J59, D-J51, D-F5BAL D-F59W, D-F5PW, D-J59W D-F59F, D-F5NTL