100

30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 200 180 160 140 120 100 80 60 40 20 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 200 180 160 140 120 100 80 60 40 20 0 Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Suction flow rate [L/min (ANR)] Air consumption [L/min (ANR)] Vacuum pressure Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] Suction flow rate Suction flow rate Air

Mist Separator Series AFM20/30/40

Note 2) Bowl assembly for AFM30 to AFM40-06 includes a bowl guard (steel band material). 14-2-41 Series AFM20/30/40 Dimensions AFM20 Bracket (Option) L G K D F M J E B H OUT IN C Port size OUT o s Drain Min. clearance for maintenance 45 A L AFM30/40/40-06 Bracket (Option) A D G F K M J C B E H OUT IN OUT Port size Drain Min. clearance for maintenance AFM30: 50 AFM40: 75 P AFM20 AFM30, AFM40

Soft Start-up Valve AV2000/3000/4000/5000 1

D AMR + + MADE IN JAPAN ITV MADE IN JAPAN SMC SMC IC VBA Model Port size A B C D E G H I VE K L M N P Q R AV2000-02-G AV2000-02-GS AV2000-02-D AV2000-02-DZ AV2000-02-Y AV2000-02-YZ AV3000-03-G AV3000-03-GS AV3000-03-D AV3000-03-DZ AV3000-03-Y AV3000-03-YZ AV4000-04-G AV4000-04-GS AV4000-04-D AV4000-04-DZ AV4000-04-Y AV4000-04-YZ AV5000-G AV5000-GS AV5000-D AV5000-DZ AV5000-Y AV5000-YZ M4

Micro Mist Separator Series AFD20/30/40

Applicable model AFD20 to 40 Nylon bowl Symbol Nil B Body size Body size Port size Metal bowl with level gauge Symbol 20 30 40 AV 20 30 40 (3) Thread type With bowl guard 01 02 03 04 06 1/8 1/4 3/8 1/2 3/4 (5) (4) C AFD20 to 40 Nil N (1) Drain guide 1/4 Rc AU Flow direction: Right Left NPT (4) D AFD30/40 Drain cock with barb fitting: 6 x 4 nylon tubing Name plate and caution plate for bowl

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) ( ): VVQ1000-NC-n Dimensions Blanking plug (For One-touch fittings) A L D Model Applicable fitting size A L D Model Applicable fitting size KQ2Pd d It is inserted into an unused cylinder port and SUP/EXH ports. Purchase orders are available in units of 10 pieces.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Note) ( ): VVQ1000-NC-n Dimensions Blanking plug (For One-touch fittings) A L D Model Applicable fitting size A L D Model Applicable fitting size KQ2Pd d It is inserted into an unused cylinder port and SUP/EXH ports. Purchase orders are available in units of 10 pieces.

Series VS

PORT LOCATION D DOWN STREAM U UP STREAM B BOTH P, EXH.

PFxx-OMX0007

A to B C to D 1,000 L 10 to 1000 10 to 1050 40 to 4000 40 to 4200 L/min 2,000 L 20 to 2000 20 to 2100 40 to 4000 40 to 4200 PF3A7#H 1,000 L 0.4 to 35.3 0.4 to 37.1 40 to 4000 40 to 4200 cfm 2,000 L 0.8 to 70.6 0.8 to 74.2 40 to 4000 40 to 4200 : The flow ranges and relationship between the fluid and PD are shown in the figures below.

Clean Room Rodless Cylinder Series CYP ø15, ø32

MY CY Proper Auto Switch Mounting Position MG A B Auto switch model CX D-Y5 D-Y6 D-Y7P D-Y7PV D-Y5 D-Y6 D-Y7P D-Y7PV D-Z7 D-Z80 D-Y7W D-Y7WV D-Y7W D-Y7WV D-Z7 D-Z80 DCylinder model CYP15 24.5 93.5 -X CYP32 33 122 20Data Mounting of Auto Switch When mounting auto switches, they should be inserted into the cylinder's switch groove from the direction shown in the drawing on the right.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard products Nil L R S a b h g d c f e Operating direction Left Right Load weight Light Low Heavy Bore size (mm) Series Guide type Note) Plugs are installed in ports other than those indicated for the model. 6 10 15 20 25 32 40 50 63 L R S Nil Model Clean room rodless CYP High precision guide type Piping port position a b c d e f g h Right Left Right Left Right Left Right Left Operating

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

Reuse AS-FE Nominal thread size Chamfered dimension D Min.

MGC

(Including band and screw) Operating Range Bore size (mm) Bore size (mm) Auto switch model Auto switch model 20 25 32 40 50 20 25 32 40 50 D-C7/C8 D-H7 D-B5/B6 D-G5/K5 D-B7/B8 D-G7/K7 D-B7/B80 BMA2 -025 BMA2 -032 BMA2 -040 BMA2 -050 BMA2 -020 10 8 10 9 10 D-B73C/B80C D-C7/C80 BA -32 BA -04 BA -05 BA -01 BA -02 10 8 10 9 10 D-C73C/C80C D-B5/B64 BM1 -01 BM1 -02 BM1 -32 BM1 -04 BM1 -05 10 8

Refrigerated Air Dryer

G A HAA HAW E B AT IDF IDU IDF FS C IDFA IDFA F IDFB M IDH N ID L P IDG K 4 x 13 IDK Dimensions AMG (mm) A B C D E F G K L M N P Q Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E

Refrigerated Air Dryer

D PF thread A B C Model 154 IDF4E IDF6E, IDU3E IDF8E, IDU11E IDU4E, IDU6E 348 166 129 463 378 238 L IDF4E to 11E, IDU3E to 6E Option symbol D NPT thread With heavy duty auto drain A B C Model 154 The float type auto drain used in the standard air dryer is replaced with a heavy duty auto drain (ADH4000-04) which enables the drainage to discharge more efficiently.

Digital Flow Switch (Integrated display type) ( compatible)

A to B C to D 4 L 0.50 to 4.00 0.35 to 5.50 125 to 1000 0 to 1375 16 L 2.0 to 16.0 1.7 to 22.0 125 to 1000 0 to 1375 L/min 40 L 5.0 to 40.0 3.5 to 55.0 125 to 1000 0 to 1375 100 L 10 to 100 7 to 140 100 to 1000 0 to 1400 250 L 50 to 250 20 to 350 200 to 1000 0 to 1400 PF3W7 4 L 0.13 to 1.06 0.09 to 1.54 125 to 1000 0 to 1372 16 L 0.53 to 4.23 0.45 to 5.81 125 to 1000 0 to 1374 G/min 40 L

VP4

or less 30 or less 30 or less 30 or less 30 or less 50 or less 65 or less 30 or less 30 or less 30 or less 30 or less 40 or less 55 or less 40 or less 45 or less 40 or less 40 or less 40 or less ON OFF ON OFF AC Response time (ms) (at the pressure of 0.5 MPa) DC 55 or less 40 or less 45 or less 30 or less 30 or less Note) Based on dynamic performance test, JIS B 8375-1981.

CEx-OML0058

50 40 40 100 100 300 300 200 400 500 200 400 500 D o e s t h e m o u n t e d l o a d / P i s t o n s p e e d ( /) e x c e e d t h e l o a d g i v e n i n P i s t o n s p e e d ( /) t h e d i a g r a m ? H o r i z o n t a l m o u n t i n g V e r t i c a l m o u n t i n g S e l e c t i o n ..

Series H, DL, L, LL Self-align Fittings

L-04 L-06 N-04 N-06 LL-04 LL-06 S-04 S-06 4 6 L-08 8 L-10 10 L-12 12 4 6 N-08 8 N-10 10 N-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 4 6 S-08 8 S-10 10 S-12 12 0.7 1.1 1.4 1.7 2.0 Precautions Be sure to read before handling. Refer to Air Fittings & Tubing Precautions for other details. Installation Caution Cut the tube to the required length.

HRX-OM-X010

mgCaCO3/L) Max.200 Max.70 Standards Calcium hardness (mgCaCO3/L) Max.150 Max.50 Ionic silica (mgSiO2/L) Max.50 Max.30 Iron (mgFe/L) Max.1.0 Max.0.3 Copper (mgCu/L) Max.0.3 Max.0.1 Sulfide ion (mgS2-/L) Not be detected Ammonium ion (mgNH4+/L) Max.1.0 Max.0.1 Residual chlorine (mgCl/L) Max.0.3 Max.0.3 Free carbon dioxide (mgCO2/L) Max.4.0 Max.4.0 Filtering (m) Max.5 * According to the Water

Filter Regulator

AW-OMX0057-A PRODUCT NAME Filter Regulator MODEL / Series / Product Number AW20(K)-(F,N)01(F,N)02(B,C,E,E1,E2,E3,E4,G,H,M)(-1,2,6,C,J,N,R,Z,ZA)-D AW30(K)-(F,N)02(F,N)03(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)02(F,N)04(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW40(K)-(F,N)06(B,C,D,E,E1,E2,E3,E4,G,H,M)(-1,2,6,8,J,N,R,W,Z,ZA)-D AW60(K)-(F,N)06(F,N)10(B,C,