Cooling Capacity: 30 kW, Type: Fluorinated Fluid, Pump Inverter Control: Pump Inverter Type, Option: C+D+N+W+Z

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: Pump Inverter Type, Option: DI Control Kit

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: DI Control Kit

Cooling Capacity: 30 kW, Type: Ethylene Glycol, Pump Inverter Control: Pump Inverter Type, Option: Analog Communication

Cooling Capacity: 30 kW, Type: Ethylene Glycol, Pump Inverter Control: Pump Inverter Type, Option: C+D+W+Y+Z

Cooling Capacity: 30 kW, Type: Ethylene Glycol, Pump Inverter Control: Pump Inverter Type, Option: C+N+Y

Cooling Capacity: 30 kW, Type: Ethylene Glycol, Pump Inverter Control: None, Option: SI Unit Only

Cooling Capacity: 30 kW, Type: Ethylene Glycol, Pump Inverter Control: Pump Inverter Type, Option: Y+Z

Cooling Capacity: 30 kW, Type: Ethylene Glycol, Pump Inverter Control: None, Option: C+D

Cooling Capacity: 30 kW, Type: Clean/DI Water, Pump Inverter Control: None, Option: C+D+N+W

Cooling Capacity: 030 (30 kW), Type: 2 (Clean/DI Water), Pump Inverter Control: None, Option: NW (N+W)

Thermo-chiller/Rack Mount Type

to kW : (= r x qv x 60) [kgf/h] : 1 [kgf/L] : 10 [L/min] : 1.0 x 103 [cal/(kgfC)] : 20 [C] : 22 [C] : 2.0 [C] (= T2 T1) : 60 [min/h] : 860 [(cal/h)/W] *1 Refer to page 40 for the typical physical property value of tap water or other circulating fluids.

Thermo-chiller

T2 T1) Conversion factor: hours to minutes : 60 [min/h] Conversion factor: kcal/h to kW : 860 [(cal/h)/W] Refer to page 20 for the typical physical property value of tap water or other circulating uids.

Digital Flow Switch Series PFA For Air Series PFW For Water

ON YES Hysteresis mode OFF P-1 P-2 Real-time flow rate "P" H H ON Window comparator mode H: Hysteresis NO OFF P-1 P-2 Real-time flow rate OUT1 Output mode ON YES Hysteresis mode OFF n-1 n-2 Real-time flow rate "n" H H ON Window comparator mode H: Hysteresis OFF NO n-2 n-1 Real-time flow rate Accumulated pulse output ( ) Accumulated switch output ( ) Refer to "Flow Rate Setting Mode

Possible to transfer a workpiece at low-speed.

End of rotation Rotation starting point 5 5 5 5 5 e R g ot n End of rotation B ra at n io n io ra at n ot 5 g e R A B R o 5 t a 5 ti o n B r Rotation starting point a End of rotation n g e 5 5 5 A A Rotation starting point The figure shows the view from the long shaft end. The figure shows the view from the long shaft end. The figure shows the view from the long shaft end.

SMC Pneumatic Clean Series

"n" pcs.

Vacuum Unit

unit only) C V V D V None (SI unit only) E End plate exhaust C Pressure switch for vacuum 0 to 101 Individual port exhaust V V F V None (SI unit only) H V V J V None (SI unit only) P Pressure sensor 0 to 101 Analog output 1 to 5 V T 100 to 100 F Individual port exhaust For Manifold 100 to 100 High-noise reduction silencer exhaust High-noise reduction silencer exhaust H N Without pressure

MY1

"n" pcs. Slide bearing guide Cam follower guide Nil S n M C Stroke Nil Without auto switch Refer to the standard stroke table on page 2. Refer to the table below for auto switch types.

HEC_W-E

Temp. upper/lower 4 Fig.9-3 limit alarm occurrence 9-1 Alarm 9.2 Alarm indication Blink E R R 1 4 T h e r m o s t a t A l a r m M O D E < S h u t o f f Fig.9-1 Alarm indication in the event ERR14 arises Blink E R R 1 4 P B R a n g e M O D E < 2 . 0 C Fig.9-2 Alarm indication in the event ERR14 arises during PB range setting input Light W R N P V < 2 6 . 6 C # 1 S V 2 5 . 0 C M O D E N

CJ5-S

Without auto switch CG5 L N 25 S R 100 CDG5 L N 25 S 100 G5BAL R With auto switch Built-in magnet Number of auto switches 2 pcs. 1 pc. n pcs.