5 Port Solenoid Valve B and H cannot be selected for the individual SUP/EXH spacer assembly or double check spacer assembly with residual pressure release valve. t Back pressure check valve (Built-in valve type) Only Z and NZ types are available for the product with power saving circuit. Select a valve from R, U, S or Z when the SI unit output polarity is Nil (Positive common).
I M 1 G 0.2 (G) A H P 6.3 5 NN OO (Hexagon head bolt) PP (Hexagon nut) E N X (Hexagon socket head cap screw) F (Through) V (Opposite side: Same) (L) (Z) TT QQ (G) T Q U R UU (Piping port) (Opposite side: Same) (I) (L) (Z) N W C (mm) M N OO A B C D E G H I J K L NN P F Model 2-5.5 through 2-9.5 counterbore with depth 5.3 2-M4 x 0.7 with depth 6 64 25 62 23 11.5 50 28 6 12 12 30 10 M6 x 1.0
t) 1.79 r45.51 1 . 1 4 (29) 0.31 (8) Millimeters in Parentheses NVMl20-N01-05 130-N01-05 M 1 4 X P I EXH $o I I M A X , G z-Nm h Panel Mounting r \-r,tr, 5.07 lbs (2.3 kg ) P T 0 079 in (2mm) O T 0.059 in (1 5mm) T,T. 0 138 in (3.5mm) F . O F 5.07 lbs. (2 3 kg.)
T O R M A L E/M A L E N I P P L E: 1/8-1/8 H E X 1/4-1/4 H E X 3/8-3/8 H E X 1/2-1/2 H E X F L U S H TA P E R P L U G S: 18, 14, 38, 12, 34 P O R T S I Z E 3 M3 5 M5 01 18 3/4-3/4 H E X C O N F I G U R AT I O N See Product Selectors T U B E S I Z E ( W H E R E A P P L I C A B L E) 3 3.8mm OD 2mm ID 4 4mm OD 2.5mm ID 6 6mm OD 4mm ID H O W T O O R D E R M A L E/M A L E N I P P L E H O W T
t) 1.79 r45.51 1 . 1 4 (29) 0.31 (8) Millimeters in Parentheses NVMl20-N01-05 130-N01-05 M 1 4 X P I EXH $o I I M A X , G z-Nm h Panel Mounting r \-r,tr, 5.07 lbs (2.3 kg ) P T 0 079 in (2mm) O T 0.059 in (1 5mm) T,T. 0 138 in (3.5mm) F . O F 5.07 lbs. (2 3 kg.)
1 ("," (23 MM *" ML NN $+, -& DA DB U R H V T L CV C ' ()" J K Q E B ' ()" G MVGQ TA TB S A ' ()" 4" 5," + +"/ 00."* (23 6 1 7"/" 8 MVGQM, MVGQL Common Dimensions $%%& B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z -,.09-" -"/,* !0-!" !"
Q1=M Q1=M (mm) (mm) Q1 = M Q1 = M Size 50 63 80 100 Shaft type 50 63 80 100 Size L1 = L1 = K T K T K T K T L1 = Thread Shaft type L1 = J X Z J X Z J X Z J X Z Thread M5 x 0.8 4.2 4.2 4.2 4.2 M5 x 0.8 4.2 4.2 4.2 4.2 M6 x 1 5 5 5 5 M6 x 1 5 5 5 M8 x 1.25 L1 6.8 6.8 Q1 Q1 M8 x 1.25 Q1 Q1 6.8 L1 L1 L1 M10 x 1.5 8.6 K axis T axis J axis Z axis Symbol: A50 Shorten both long and short
B and H cannot be selected for the individual SUP/EXH spacer assembly or double check spacer assembly with residual pressure release valve. t Back pressure check valve (Built-in valve type) Only Z and NZ types are available for the product with power saving circuit. Select a valve from R, U, S or Z when the SI unit output polarity is Nil (Positive common).
Unit switching Real-time switch output ( ) ZSE ISE For Air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON PSE YES CFM x 102, CFM x 101 ft3 x 101 OFF P-1 P-2 High flow rate Z I SE3 CFM = ft3/min P Window comparator mode H: Hysteresis High Flow Rate Type (For Air) PS H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON Z I SE1 2 NO OFF P-1 P-
Power saving circuit is only available in the "Z" type.
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.
Recommended Parameter Values [LEF] LEFS25 LEFS32 LEFS40 Lead symbol H A B H A B H A B Series Lead 20 12 6 24 16 8 30 20 10 Parameter *1,*2 Para. Initial value Recommended value No.
Power saving circuit is only available in the "Z" type.
threads 2 x M2.5 x 24L Mounting threads ISG ZSM Grommet type: SE1-14/-15/-18/-19 01 T1 01 T1 Connector type: SE1-14C/-15C/-18C/-19C I Z I Z Hysteresis setting trimmer Pressure setting trimmer Hysteresis setting trimmer Pressure setting trimmer SET HYS SET HYS L L H H L L H H 15 15 Indicator light (Red) Indicator light (Red) 23 23 SE1-01-16C/-17C SE1-01-16/-17 I Z I Z Pressure setting trimmer
Z F9NWZ Solid state switches marked "" are produced upon receipt of order.
CI -0.1 -0.2 14 10 H 30 S + Stroke Z + Stroke 9 ZZ + Stroke (mm) Bore size (mm) S Z ZZ CI H 20 168 177 24 97.5 40.5 25 177 186 30 102.5 44.5 15 Lateral Load Resisting Low Friction Cylinder Metal Seal Series MQM Refer to the basic type on page 13 for other dimensions.
ON OFF Time H Unit selection function (F0) Display units can be switched with this function.
G D M E J F C X B + Stroke L Z M A + Stroke E T 2 x P (Port size) Q I Metal connector 15.5 M14 x 1 (mm) A B C D E F G H I J K Standard stroke Bore size (mm) 32 40 50 63 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 50, 75, 100, 125, 150, 175, 200, 250, 300 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5
Keeper plate Rod end nut 30 d JIS class 2 threads 2-d l 0.2 B D C m T H H B Material: Rolled steel Material: Carbon steel Bore size (mm) Cap bolt Bore size (mm) Rod series Part no.