Modular Type Filter Regulator Series AW

w w t t t q q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

Suction Guard (Produced upon receipt of order) FHG Series

HOW 10 (1 1/4B) 12 (1 1/2B) 16 (2B) 45 20 (2 1/2B) 24 (3B) Fixed Note) Refer to page 509 for the T dimension. Replacement Element Part No.

Rotary Actuator/Vane Style Series CRB1

Applicable shaft types: J, T CRQ2 MSQ (mm) MSZ Y X Size 4 to 39.5 4 to 19.5 50 Y = X = CRQ2X MSQX 4 to 45 4 to 21 63 4 to 53.5 4 to 23.5 80 MRQ 5 to 65 5 to 30 100 D137 Series CRB1 (Size: 50, 63, 80, 100) Made to Order Specifications: XC1, 4, 5, 6, 7, 26, 27, 30 Shaft type Standard W J K S Refer to page 121 T X Connection port location Y Z RB1B 63 90 S E XC1C30 Without auto switch W C P RB1B

VQ4000

Maximum stations are 18. 16 4 17 5 18 6 19 7 20 8 21 1.

High-Precision Digital Pressure Switch

e r t y u i q Rated pressure range w Output specification u Option 2 * Note that the optional parts that can be used vary depending on the piping direction.

VQC

plate Note 2) (available for T Kit only) T Kit S Kit TD0 1 to 10 (20) Terminal block box kit The maximum number of stations differs depending on the electrical entry.

HEC_W-E

Parity Bit P a r i t y B i t M O D E < W i t h o u t Setting range : Without (no parity), Odd, Even Indicated content : Parity bit (Ex. : Without) Function : Sets parity bit for communication. 4. Data Length Setting range : 7Bits, 8Bits Indicated content : Data length(Ex. : 8Bits) Function : Sets data length for communication. D a t a L e n g t h M O D E < 8 B i t s 5.

Mechanical Valves Series NVM, NVFM, NVZNI

4 1 l b s ( 6 k g ) P T 20" O T 30' T T 50' P T 20" O T 30' T T 50" 'Length from center to center of r o i l e r : 1 5 I n ( 3 8 l m m ) 'Length lrom cenler to end ol vane = 5 56 in (141 2mm) A B c D E F G H 0.57 14,6) 2.64 (621 1.86 ',47.2)1.45 136.8) 1 3 0 (33) 0.59 (1 5) 1.03 (26.2\ 1 0 0 r25.4', Millimeters in Parentheses A B c D E F G H 5.56 141.2 0.57 14.61 0.25 (6.4) 2 . 1 5 '54.7

VEX1

(Without indicator light), 4.3 W (With indicator light) 4.8 W (Without indicator light), 5 W (With indicator light) Non-locking push type Option Part no.

Rotary Table/

3 w @4 @3 !6 !7 !8 !1 @1 !2 q @0 u !

Slider Type/Ball Bushing Bearing

7 90 9 18 52 53 39 20 10.5 14 20 8 33.6 8 16 5 7 9.5 66 26.5 24.5 M10 x 1.5 15 100 9.2 110 12 26.5 64 64 47.5 25 11.5 14 25 8 41.6 10 20 5 10 10.5 78 30.5 28.5 M10 x 1.5 15 136 9.2 130 12 35 76 74 56 30 PA (N) (NA) (NB) ta P PB PW Q tb MM NN QW T TT W Z M RW Model CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 Shock absorber RB0805 45 M5 x 0.8 0.5 M8 x 1.0 M5 x 0.8 70 95 90 1.0 30 12.5 22.5 92 112 8

Compact Cylinder Series CQS

Contents 12 16 20 25 12 16 20 25 CQSB12-S-PS CQSB12-T-PS Set of nos. above CQSB16-S-PS CQSB16-T-PS Set of nos. above CQSB20-S-PS CQSB20-T-PS CQSB25-S-PS CQSB25-T-PS Seal kit includes . Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) Seal kit includes .

MLGP

T-slot side mounting Locked Unlocked Bottom mounting Brake spring Lock ring Piston rod Wide Variations from 20 to 100 Standard stroke (mm) Series Bearing Locking direction Bore size (mm) Load direction LOCK FREE 20 25 30 40 50 75 100 125 150 175 200 250 300 350 20 25 32 40 50 63 80 100 Pivot Fulcrum Slide bearing Extension Locking Clearance Unlocking port: Air supplied 1.

MLGP

T-slot side mounting Locked Unlocked Bottom mounting Brake spring Lock ring Piston rod Wide Variations from 20 to 100 Standard stroke (mm) Series Bearing Locking direction Bore size (mm) Load direction LOCK FREE 20 25 30 40 50 75 100 125 150 175 200 250 300 350 20 25 32 40 50 63 80 100 Pivot Fulcrum Slide bearing Extension Locking Clearance Unlocking port: Air supplied 1.

100

6 @2 r y w t e t @2 u i !0 @0 !5 y !9 ZL6 Without valve or pressure switch, Silencer exhaust ZL6 With valve and pressure switch, Port exhaust @1 !2 !3 !1 !6 !8 !7 q !4 r y w t e t u i @0 !5 y !9 Component Parts No. Description Material Note No.

KQ2

D MS LQ MQR T How to Order KQ2 H 05 S 02 Made to Order Refer to page 82 for details. One-touch fittings Model With thread sealant H Male connecter L Male elbow Nil Without sealant W Extended male elbow S With thread sealant Port size T Male branch tee Applicable tubing O.D.

Electric Actuator / Low profile slider type

30 40 50 Stroke[mm] Origin 50mm Motor side End side 10 20 30 40 50 60 Stroke[mm] Origin 50mm Motor side End side -50 -40 -30 -20 -10 0 Stroke[mm] Origin 50mm Motor side End side -40 -30 -20 -10 0 10 Stroke[mm] Origin 50mm Motor side End side -60 -50 -40 -30 -20 -10 Stroke[mm] -29- 4.

60

w d d it it e e h h c c la la o o u u p p t t e e r r r r e e e e m m b b o o n n v v a a i i c c n n g g t t n n p p e e i i m m p p in in e e l l g. g.

Integrated Controller

W [kg] Work load: W [kg] 3000 mm/s2 20 15 3000 mm/s2 10 5000 mm/s2 5 10 mm/s2 0 50 100 150 200 250 300 350 450 400 0 0 Speed: V [mm/s] Speed: V [mm/s] EQFS32HC/Ball Screw Drive Horizontal/Lead 4 Vertical/Lead 4 100 90 80 70 60 50 40 30 20 10 0 20 40 60 80 100 120 50 45 40 35 30 25 20 15 10 5 0 140 20 40 60 80 100 120 3000 mm/s2 Work load: W [kg] Work load: W [kg] 3000 mm/s2 10 mm/s2 5000

ZP

Calculation ZX ZR : Lifting force (N) : Stable vacuum pressure (kPa) : Pad area (cm2) : Factor of safety: Horizontal pad contact : 4 (dynamic) Vertical pad contact : 8 (dynamic) W P S t Pad ZM W = P x S x 0.1 x 1 t W ZH W ZU Horizontal lifting Vertical lifting Basically ( avoid this use. ) ZL Theoretical Lifting Force ZY The theoretical lifting force (not including the safety factor) is