End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

CBM2-20-PS CBM2-25-PS CBM2-32-PS CBM2-40-PS i Carbon steel Lock piston o Hard chrome plated, Heat treated Carbon steel With Double End Lock MXF Lock bushing !0 Zinc bronze die cast Lock spring CBM2-20-PS-W Order No. CBM2-25-PS-W CBM2-32-PS-W CBM2-40-PS-W !1 Zinc chromated Steel wire MXW Bumper The seal kit is a set of @6 and @7.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS120M AS220M-01 AS220M-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 5 10 20 10 0 5 0 5 20 10 10 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Construction Meter-out type AS1200M AS2200M u w u w t e r !0 !1 i q !4 r e !0 !1 q i !

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CBM2-20-PS CBM2-25-PS CBM2-32-PS CBM2-40-PS Carbon steel i Lock piston Hard chrome plated, Heat treated Carbon steel o With Double End Lock MGP Lock bushing Zinc bronze die cast !0 Lock spring CBM2-20-PS-W Order No. CBM2-25-PS-W CBM2-32-PS-W CBM2-40-PS-W Zinc chromated Steel wire !1 MGQ Bumper Urethane Alloy steel The seal kit is a set of @6 and @7.

Refrigerated Thermo-chiller

-L 3 5 HRZ002-H 4 HRZ004-L HRZ001-H 2 3 HRZ002-L 2 1 HRZ001-L 1 0 0 20 30 40 50 60 70 80 90 20 10 0 10 20 30 40 Circulating fluid temperature (C) Circulating fluid temperature (C) HRZ002-W/008-W 4 HRZ008-W Heating capacity (kW) 3 HRZ002-W 2 1 0 20 10 0 10 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) 81 Series HRZ Pump Capacity (Thermo-chiller Outlet) HRZ001-L/002-L/004-L HRZ008

13

If the leakage volume is 30 /min (ANR), the vacuum pressure of the S type is 20 kPa q w e, and for the L type it is 33 kPa q' w' e'. If the leakage volume is 5 /min (ANR), the vacuum pressure of the S type is 80 kPa r t y, and for the L type it is 47 kPa r' t' y'.

Digital Flow Switch (Remote type sensor unit)

dimensions Piping port S T U V W Y Z 25 A 59 36 48 58 70 7 2 -46No.PF-OMN0010-J Dimensions of lead wire with M8 connector (ZS-40-A) -47No.PF-OMN0010-J Made to Order Change the seal material of the wetted parts to EPDM.

Membrane Air Dryer

D $ $ $ 100 auto-drain $ $ $ $ 3 Drain guide J $ $ (Port size 1/4 without valve) $ $ $ $ 5 With separator and regulator $ $ $ $ 10 For model selection of an auto-drain, refer to the Selection Precautions on V $ $ $ $ 20 page 45. $ $ $ 60 Port size $ $ $ 75 Size Symbol Port $ $ $ 100 Thread type size 3 5 10 20 60 75 100 01 02 03 04 $ $ 1/8 Symbol Type $ $ $ $ 1/4 Nil Rc

Vacuum gripper

152.9 ZP 13 C 152.9 ZP 16 C 153.4 ZP 20 C 154.9 ZP 25 C 154.9 ZP 32 C 155.4 ZP 10 B 156.9 ZP 13 B 159.4 ZP 16 B 160.9 ZP 20 B 164.4 ZP 25 B 164.9 ZP 32 B 169.9 ZP 20 UT 150.9 ZP 16 J 164.9 ZP B25 J 183.4 ZP B30 J 189.9 ZP3P 20 JT2 SF 169.1 ZP3P 20 JT2 SF M 169.1 ZP3P 32 JT2 SF 180.5 ZP3P 32 JT2 SF M 180.5 ZP3P 20 JT5 SF 182.6 ZP3P 25 JT5 SF 186.4 ZP3P 32 JT5 SF 200.9 0 0 Note

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

2.5 3 20 0.05 Prepared hole diameter 3.3 +0.030 0 15 W 0.50.05 B D 2-M5 x 0.8 Piping port M5 x 0.8 Vacuum suction port 28 27 10 4.5 depth 1.5 3 J 6 +0.030 0 10 9.5 4 Section AA Mounting base side B D +0.030 0 Q QL depth 1.5 3 11-/22-MXP10-20 Without magnet and switch rail Max. 2.5 2-M2 x 0.4 depth 3 8 2.5 4.7 15 15 L 6-M3 x 0.5 depth 4 2-M3 x 0.5 depth 3.5 (mm) G H J K L M N Q QL S V W

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

M5 x 0.8 Prepared hole diameter 4.2 20 W 0.50.05 D B Vacuum port M5 x 0.8 Piping port 2 x M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA B D Mounting base side +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2 x M2 x 0.4 depth 3 8 5.7 3.5 L 20 20 6 x M4 x 0.7 depth 4.5 2 x M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 11-/22-MXP12-15

VEX1

(Without indicator light), 4.3 W (With indicator light) 4.8 W (Without indicator light), 5 W (With indicator light) Non-locking push type Option Part no.

Compact Cylinder with Air Cushion Series RQ

E W MM H1 Width across flats B1 C1 Rod end nut X L1 Rod End Male Thread mm Bore size (mm) H1 B1 C1 X MM L1 32 40 50 22 8 20.5 23.5 M14 x 1.5 28.5 22 8 20.5 23.5 M14 x 1.5 28.5 27 11 26 28.5 M18 x 1.5 33.5 Basic Style mm Stroke range (mm) A B C D E F H I J K L M N Bore size (mm) 32 40 50 20 to 100 44 37 13 16 45 18.5 M8 x 1.25 60 4.5 14 7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14

3

H C37 3/4 20 J Stainless steel D 200 VAC E 230 VAC 6 25A N.C.

NAAMS Standards Compliant

300.05 3 12.5 4.4 12.5 P Q R P Q 45 R38 M8 x 1.25 120.8 R38 1 1 12.5 R28 M8 x 1.25 8.5 1 12.5 R7 22 1 R28 8.5 22 20 R7 22 20 22 [mm] [mm] Model NAAMS code A B C D E F G H I J Model NAAMS code A B C D E F G H I J CKZ-63A031 ACA031M 125.0 110.0 95.0 80.0 65.0 CKZ-63A032 ACA032M 155.0 140.0 125.0 110.0 95.0 80.0 65.0 CKZ-63A033 ACA033M 185.0 170.0 155.0 140.0 125.0 110.0 95.0 80.0 65.0 CKZ

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

1 ("," (23 MM *" ML NN $+, -& DA DB U R H V T L CV C ' ()" J K Q E B ' ()" G MVGQ TA TB S A ' ()" 4" 5," + +"/ 00."* (23 6 1 7"/" 8 MVGQM, MVGQL Common Dimensions $%%& B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z -,.09-" -"/,* !0-!" !"

AIR COMBINATION

J 26 77.9 59.3 AC10-A 26 AC20-A 58.5 59.5 37.5 37.5 104.9 87.4 93.9 91.4 AC25-A 58.5 59.5 37.5 37.5 156.8 117.6 122.1 137.6 142.1 123.6 121.9 AC30-A 65 66 37.5 37.5 156.8 117.6 122.1 137.6 142.1 123.6 121.9 AC40-A 72 72 42.5 42.5 186.9 149.6 154.1 169.6 174.1 155.6 153.9 AC40-06-A 72 72 42.5 42.5 188.9 151.6 156.1 171.6 176.1 157.6 155.9 20 Standard specifications C E F G J Bracket

5-Port Solenoid Valve

Refer to the electrical power waveform to the left. 0.1 w 0.1 w 0.35 w 0.35 w With power saving circuit 0 V 0.4 (0.95) W With power saving circuit 0.1 (0.4) W Only products with an indicator light are equipped with the power saving circuit.

AWG

Accessory/ Optional Combinations : Combination available : Varies depending on a model : Combination not available : Available only with NPT thread Combination Accessory Option Applicable filter regulator Symbol Accessory/Optional specifications B H 1 2 6 AWG20K 8 C J N W Z AWG30K/40K C D B C D H -1 -2 -6 -8 -C -J -N -W With bracket Accessory Option Float type auto-drain (N.C.)

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY2 H/HT MY3A MY3B MY3M Load Mass Allowable Moment MY1H/m3 MY1H/M3 MY1H/M1 MY1H/M2 q r w e t 30 40 50 50 40 30 40 50 30 40 50 30 20 20 20 20 MY1H40 MY1H32 10 10 10 MY1H40 MY1H40 MY1H32 Load mass kg MY1H32 Moment Nm Moment Nm Moment Nm 5 4 3 MY1H25 MY1H40 10 5 4 3 5 4 3 MY1H32 MY1H25 MY1H25 2 MY1H25 5 4 2 2 1 3 1 1 0.5 0.4 0.3 2 0.5 0.4 0.3 0.5 0.4 0.3 D0.2 1 0.2 0.2 0.1 -X 100 200 300 400

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option Digital pressure switch (Electrical entry: Wiring top entry) Digital pressure switch (Electrical entry: Wiring bottom entry) Square embedded type pressure gauge Option Round type pressure gauge J J J J H Dimensions Center of piping H H Center of piping H Center of piping Center of piping Standard