AC Servo Motor Driver (CC-Link Type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 : J Z j z 1 0 1 1 11 ; K [ k { 1 1 0 0 12 , L l | 1 1 0 1 13 M ] m } 1 1 1 0 14 . N ^ n 1 1 1 1 15 / ?

Pneumatic Transfer System Series MF

508 E R350 R440 G 93 129 H 302 327 A 791 916 A 823 906 A 835 934 15 32 15 32 15 32 I 10 15 J 6 7 X 244 to 254 262 to 279 Y Note 2) I 10 15 J 6 7 X 233 to 244 224 to 241 Y Note 2) J 6 7 X 240 to 251 236 to 253 Y Note 2) H 298 339 H 323 352 I 10 15 15 32 15 32 15 32 589 to 614 633 to 673 564 to 589 542 to 581 579 to 605 571 to 610 MF -90 15 32 A G D Note 1) F D Note 1) D Note 1) F F Y C C

CG5-S

(Same side) Number of switches A HS 0.5 10 16 0 17 0 Port surface Port surface Port surface Mounting surface 20.5 0.5 Switch type Minimum stroke (mm) 10 15 60 D-G5BA Approx.

IDU/IDF

Dust proof filter set (A) (25) (25) (B) (10) Part No.

Compact Cylinder

B + Stroke L W E M K J 2 x P (Rc, NPT, G) (Port size) 100 Auto switch Minimum lead wire bending radius 10 H thread effective depth C 4 x N through F Q I E M Z A + Stroke B + Stroke L W G M K J Standard [mm] Bore size Stroke range Without magnet for auto switch With magnet for auto switch C D E F G H I J K L M N P Q W Z A B A B 50 10 to 50 37 29 42.5 34.5 15 18 57 9 M10 x 1.5 74 6.5 16 8

13

93.3 58.5 41 10 15.3 4.2 19 ZH15DL-10-03-12 22.45 (Mounting hole) Model I J K L M N O P Misc.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

8.2 16 18 20.5 16 16 18 20.5 17 32 35 39 31.5 32 35 39 3 6 8 10 5 6 8.5 10 When a block disk is concurrently ordered by specifying on the manifold specification sheet, etc., a label will be stuck on the position where block disk is mounted.

Mist Separator

AMX-OMZ0093 PRODUCT NAME Mist Separator MODEL / Series / Product Number AM50-(F,N)06 ~ (F,N)10(B,C,D)(-J,L,R,W,Z)-D AM60-(F,N)10(B,C,D)(-J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2 to 6 2. Application 7 3. Standard specifications 7 4. How to Order 8 5. Construction / Options / Replacement parts 9 6. Bowl assembly specifications 10 to 11 6-1. Bowl assembly for AM50 10 6-2.

Micro Mist Separator

AMX-OMZ0094 PRODUCT NAME Micro Mist Separator MODEL / Series / Product Number AMD50-(F,N)06 ~ (F,N)10(B,C,D)(-J,L,R,W,Z)-D AMD60-(F,N)10(B,C,D)(-J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2 to 6 2. Application 7 3. Standard specifications 7 4. How to Order 8 5. Construction / Options / Replacement parts 9 6. Bowl assembly specifications 10 to 11 6-1.

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Line Filter

AMX-OMZ0092 PRODUCT NAME Line Filter MODEL / Series / Product Number AFF50-(F,N)06 ~ (F,N)10(B,C,D)(-J,L,R,W,Z)-D AFF60-(F,N)10(B,C,D)(-J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2 to 6 2. Application 7 3. Standard specifications 7 4. How to Order 8 5. Construction / Options / Replacement parts 9 6. Bowl assembly specifications 10 to 11 6-1. Bowl assembly for AFF50 10 6-2.

High Purity Chemical Valve

E (H1) (H2) 2 x P B C SMC A B E L J B 2 x P 2 x F K Body material: PFA N G A D L K 4 x M Non-locking type Locking type 60 (H1) (H2) C A B SMC E J B 2 x P (mm) Dimensions A B C D E F H1 G H2 J K L M N P Model Body material LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m LVH20m LVH30m LVH40m M5 x 0.8 30 33 54.5 10 10 75 76.5 22 22 27 Rc 1/8, 1/4, NPT 1/8, 1/4 (SUS) Stainless steel 36 47 81 13

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

U seal 8 PBT Bushing 9 O-ring 10 NBR O-ring 11 NBR O-ring 12 NBR O-ring 13 NBR Gasket NBR/Stainless steel 14 Note 1) The material of the lock nut option-J (round type) is brass.

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

10-/21-AR20-B30-B: Max. 3.5 10-/21-AW40-B: Max. 5 AR50-B/60-B 10212 x P1 (Port size) A BB Pressure gauge (Option) C H K IN OUT B Q AA Applicable tubing 6/4 P2 (Pressure gauge port size) R F J M D J U Bracket (Option) T N S Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount P1 P2 A B Note 1) C D Q R S T U V W Y Z F J K AA BB H

Guide Cylinder/Compact Type Series MGC

GK GQ LOCK FREE W U S M K B E L A' BP (Rc, NPT, G) Lock port for pressure lock (Plug with breathing hole for spring locking) R AA GC GD I AP AB J X A V BZ Y + Stroke Z + Stroke AC AD 8 x AF 10 WH (Max.)

/

External pilot solenoid 1 Y A G 1 T Z B1 10 1 70 2 SGH SGHA Air operated 1 A G B1 10 1 2 70 q w e r t y u i o !0 !1 !2 q Series w Valve type e Seal material 70 r Pressure range t Thread type y Port size 1 2 3 4 1 2 A B 10 15 20 25 Nil G N T SGH100 SGH200 SGH300 SGH400 SGH100 SGH200 SGH300 SGH400 N.C. N.O.

15

[mm] Double Clevis Size Stroke range [mm] A CL CD CT CU CW CX CZ L RR 25 15 to 100 158.5 148.5 10 5 14 20 18 36 12.5 10 105 to 200 183.5 173.5 32 20 to 100 178.5 168.5 10 6 14 22 18 36 16.5 10 105 to 200 208.5 198.5 63 50 to 200 232.6 218.6 14 8 22 30 22 44 33.4 14 205 to 300 267.6 253.6 Material: Cast iron (Coating) * The A, CL and L measurements are when the unit is at the retracted stroke

Common Supply Regulator

AR-OMY0028-A PRODUCT NAME Common Supply Regulator MODEL / Series / Product Number AR20M(K)-(F,N)(0101,0201,0202)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR30M(K)-(F,N)(0202,0302)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D AR40M(K)-(F,N)(0302,0303,0402,0403)(B,E,E1,E2,E3,E4,G,H,J,M)(-1,N,Y,Z,ZA)-D Contents Page 1. Safety Instructions 26 2. Application 7 3. Standard Specifications 7 4.

JXCx-OMT0023

Note 3) ETFE SVP 70/0.08 (AWG#22 or equivalent)-3P Ban-gi-shi-16824 LE-CSE-B LE-CSE-A 2 to 10 AWG22 6 (3 pairs) 70/0.08 56 or less 1.2 7.1 0.3 LE-CSM-SA 2 to 10 or less 1.71 6.2 0.3 HRZFEV-A(CL3)AWG18 4 cores LE-CSM-SB 2 to 10 AWG18 4 34/0.18 21.8 Motor cable LE-CSM-RA 2 to 10 (Note 4) RMFES-A(CL3X)AWG19 4 cores LE-CSM-RB 2 to 10 (Note 5) AWG19 4 150/0.08 29.1 or less 1.63 5.7 0.5 (0.75mm2

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

: Black color 14.2 Applicable tubing diameter N 14.2 Applicable tubing diameter E 17.2 17.2 20 20 ZX 93.3 47 29.5 10 15.3 4.2 15.8 ZH15DS-10-12-12 22.45 93.3 47 29.5 10 15.3 4.2 15.8 ZH15DL-10-12-12 22.45 ZR (Mounting hole) I J K L M N O P Model ZM ZH05DS-06-06-06 ZH05DL-06-06-06 ZH07DS-06-06-06 ZH07DL-06-06-06 ZH10DS-06-06-08 ZH10DL-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 ZH15DS-10-12-12