LVQ

H J K L M N P Q R Model LVQ20-S LVQ30-S LVQ40-S LVQ50-S LVQ60-S 25.5 46 31.5 58 33.6 56.5 12 77 21.8 37 5 7 15 31.3 21 25.3 23.5 47 29.5 59 45.4 77 16.5 95 32 50 6 7 20 37.2 25 31.2 23.5 47 29.5 59 45.4 82.5 22 109 37.5 55.5 6 7 20 37.2 25 31.2 35 70 41 82 75 127 25 141 50.2 78.2 10 7 20 50.8 38.5 45 35 70 41 82 75 137 32 150 60 88 10 7 20 50.8 38.5 45 17-5-68 7 Series LVQ Integral Fitting

C95Series

. __ I -='.1' .J.. ~ ~ _.

Lightweight and Compact

Contents Applicable model HRS-EP020 NPT thread conversion fitting set HRS090-A-20/40-J HRS-EP021 G thread conversion fitting set Part no.

Slider Type/Ball Bushing Bearing

CY1L15/20/25/32/40 Z + Stroke Hollow shaft for piping Auto switch mountable 2 x P 4 x MM Depth M 4 x J Depth JK 4 x Counterbore dia. B CY3B CY3R 4 x Counterbore depth.

REC

C J G5-S CV MVGQ CC RB J D-X 20Data 10-2-91 5 Sine Cylinder Series REC 20, 25, 32, 40 How to Order RE C L 25 150 H7BW Number of auto switches Rod type Bore size Nil 2 pcs. S 1 pc. Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 20 mm n n pcs.

10

K (46) 12.4 15 15 Closed E 7 7 20 Open F 10 10 34 G 4 x M4 x 0.7 through (Thread for mounting attachment) Model A B C D E F G H J MHL2-10DZ 38 36 51 26 56 76 100 24 80 MHL2-10D1Z 54 52 67 42 78 118 142 39 108 MHL2-10D2Z 72 70 85 60 96 156 180 57 146 J dimension is at fully closed.

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8 4.5

Vacuum

B M5 x 0.8 M4 xO.7 5-30 '11 20 32 2 6 7 8 1 7 2A 1 6 . 5 1 9 M5 x 0-8 N45 x 0.8 5-50 1 4 26 40 3 8 I 8 20 1 9 21.5 M5 x 0.8 N.45 x 0.8 5-50 t l ) . 5 1 8 32 50 4 1 0 1 0 1 0 20 22 43.5 22 1/8 (PT) 1i8 (PT) 5-50 1 9 5 22 40 5 1 l 1 2 24 29 5 1 . 5 22 23 i il : lModel I l ] H : H A L J KI L Mt\4 NA NB oP Q ] . , R i l : : S I sl L', . l Y r l lrye f Kqgq'l 26 5 1 4 M4 xO.7 5 M5 x 0.8 6 1 8

Modular Type Filter Regulator Series AW

Note 3) The AW30 and AW40 bowl assembly comes with a bowl guard (steel band material). 59 Filter Regulator AW10 to 40 Dimensions AW10, 20 H M T D N Panel fitting dimension J Bracket (option) Y S U W IN OUT B C Z Q P IN OUT V Plate thickness AW10, AW20: Max. 3.5 K Pressure gauge port size Pressure gauge (option) OUT Square embedded type pressure gauge (option) O S Port size Drain E Min. clearance

MXW

33 20(Y) (Y) 6H9 +0.030 depth 5.5 0 L Data 10 20 20 K A 43 31 23 A 3 Z N-M6 x 1 thread depth 12 (N 1) x H G NN-M6 x 1 thread depth 12 Bottom through-hole 5.1 HH Bottom through-hole 5.1 GG H 7 depth 5.5 6H9 +0.030 0 F E 6H9 +0.030 depth 5.5 0 (mm) Model G F E Z NN N L K J HH H GG MXW16-125 99 157 110 345 1 5 64 43 141 45 31.5 MXW16-150 124 176 136 395 1 5 89 68 166 50 24 MXW16-175 151.5

MXW Series Long Stroke Slide Table

MXW 16 Stoke: 125, 150, 175, 200 (mm) Operating port 2-M5 x 0.8 Width across hexagon socket hole 3 J 14 Scale: 30% 8 Width across flats 10 6-M5 x 0.8 thread depth 9 (Helisert) 6H9 +0.03 depth 5.5 0 7 74 36 59 34 33 125 33 Y Y 6H9 +0.03depth 5.5 0 L 10 20 20 K A 43 31 23 A Z N-M6 x 1 thread depth 12 (N-1) x H G NN-M6 x 1 thread depth 12 Bottom through hole 5.1 HH Bottom through hole 5.1 GG

Table of Contents

Exploded view: VQ1000-Plug-in Unit (F, P, J, L, Skit) . Exploded View: VQ2000-Plug-in Unit (F, P, J, L, G, S kit) . Exploded View: VQ0-Plug Lead Unit (F, P, C, S kit) .

LEC-OM07605CN

0.01 0.02 0.02 1 [J] 5.6 22 64 [J] 56 220 640 (5) [] 2.5 1.2 0.9 (3) [] 20 1 [J] 5.6 22 64 145V TND20V-680KB (135[V]) (78) 370V TND10V-221KB (360[V]) 1.

CNS

Graph (1) 30 20 10 2.

A

172.5 20 70 14 50 54 25 8.5 10.5 70 2.3 73 198 Float type Courtesy of Steven Engineering, Inc. !

modular-press-e

C2SF-C C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C2SF-C Drain AD27-C AD27-C C2SF-J C3SF-J C4SF-J Polycarbonate C2SF-J C3SF-J AF50, AF60 C3SF-W C4SF-W C3SF-W C2SF-CJ C2SF-CJ C3SF-6 C4SF-6 C2SF-6 C1SF-6 AD17-6 C1SF-2 AD17-2 C3SF-6 C2SF-6 C1SF-6 OUT IN C2SF-6C C2SF-6C AD37-6 AD47-6 AD27-6 AD37-6 AD17-6 AD27-6 AD38-6

Modular F.R.L. Pressure Control Equipment

C2SF-C C4SF-J C4SF-W C4SF-6 AD47-6 AD48-6 C4SF-6J C4SF-6W C4SF-2 AD47-2 AD48-2 C4SF-2J C4LF-8 AD47-8 AD48-8 C4LF-8J C2SF-C Drain AD27-C AD27-C C2SF-J C3SF-J C4SF-J Polycarbonate C2SF-J C3SF-J AF50, AF60 C3SF-W C4SF-W C3SF-W C2SF-CJ C2SF-CJ C3SF-6 C4SF-6 C2SF-6 C1SF-6 AD17-6 C1SF-2 AD17-2 C3SF-6 C2SF-6 C1SF-6 OUT IN C2SF-6C C2SF-6C AD37-6 AD47-6 AD27-6 AD37-6 AD17-6 AD27-6 AD38-6

Cylinder with Lock Series CNS

180 290 1/2 3/8 144 144 40 90 63 43 14 19 20 236 118 275 18.5 215 to 1200 (mm) Bore size (mm) GB GL GR K KA M N P Q R S T V VA H ZZ J MA MM 125 140 160 23 25 30 15 31 19 35 1/2 85.5 25 303 87.5 20 23 110 427 M14 x 1.5 M12 x 1.75 M30 x 1.5 28 30 30 15 31 19 35 1/2 93.5 25 343 95 20 28 110 473 M14 x 1.5 M12 x 1.75 M30 x 1.5 35 35 35 17 36 22 39 3/4 104 25 396 109 25 35 120 536 M16 x 1.5 M12

Series VQ Base Mounted Metal Seal/Rubber Seal

64 Single Rubber seal VQ1 5.4 (0.3) 15 or less 20 or less Metal seal VQ1210 3.6 (0.2) 10 or less 13 or less Double Rubber seal VQ1211 5.4 (0.3) 15 or less 20 or less Metal seal VQ1310 3.6 (0.2) 20 or less 26 or less Closed center VQ1000 Rubber seal VQ1311 5.4 (0.3) 25 or less 33 or less 78 Metal seal VQ1410 3.6 (0.2) 20 or less 26 or less Exhaust center Rubber seal VQ1411 5.4 (0.3) 25 or

Fluoropolymer Piping Equipment

LQ1P41-R3 12 6 29 20 26 17 7 20.5 43.5 82.1 39 23 3.6 8 39 24 LQ1P51-R2 19 10 29 20 26 17 7 20.5 43.5 82.1 39 23 7.4 8 39 24 Inch Size Model A side B side E1 E2 H1 H2 J K L1 L2 M1 M2 Min. port size t W1 W2 Applicable tubing O.D.