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absorbers Intemal shock absorbers ' M S O P / B 1 , 2 . 3 & 7 o n y .

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Note 7) Note 7) Note 7) Note 7) Note 7) Note 8) Note 8) Note 8) Note 1) Options B, G, H are shipped together, (but not assembled).

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Note 7) Note 7) Note 7) Note 7) Note 7) Note 8) Note 8) Note 8) Note 1) Options B, G, H are shipped together, (but not assembled).

VEX-OMY0001

02 01 02 14 20 VEX312VEX322VEX332VEX342VEX350VEX370VEX390( ) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A ( ) VEX1-18-2A VEX3-32-2A P2 AN120-M5 AN103-01 AN210-02 1) VEX1-9-1P VEX4-2A-P VEX1-11-2 VEX4-4 DXT152-14-1A NXT013-3 VO307K-1 2) 3) VEX322 VEX342 Rc A 1/8 1/4 F G VVEX2 VVEX4 B 1/4 3/8 N NPT ( ) VEX1-17 VEX4-5 C 1/2 T NPTF 11 No.VEX-OMY0001 (2) () 3 2(A) 23(P2) 12(P1) a,b 12(P1

PSxx-OMU0008CN

R NPN2+1 B T PNP2+1 E S NPN2+1 D + V PNP2+1 1: F + 4 2 M SI3 1 P psi2 2 3 kPaMpa (2m ) W 2 R1/4 C01 Rc1/8 N02 NPT1/4 A2 URJ1/4 L F02 G1/4 B2 TSJ1/4 2 2 () L() A A1 ZS-46-A1 C A3 ZS-46-E B ZS-46-B E ZS-35-B D ZS-46-D + F ZS-35-E -9No.PS-OMU0008CN-D / A ZS-46-A1 38L(2 ) C ZS-46-E 310L(2 ) ZS-46-B ZS-35-B ZS-46-D + ZS-35-E ZS-46-5F 5 2 m ZS-27-01 ZS-35-01 -

PF-OMN0011_C

-26-B) (ZS-26-01) ZS-26-01 1 (ZS-26-B) 190 2,1/41/2 72 2, , -15No.PF-OMN0011CN-C , 1 DC() 2 N.C.

VKF300

) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2 L1 4 1 7 8 26 47.5 Approx. 300 (lead wire length) n-Rc(PT) 1/8, M5 x 0.8 (port A) 7 20 34 2-4.5 (bracket mounting holes) 4-M3 x 0.5, depth 6 (bracket mounting screws) 7 8 47.5 15.5 20 25 49 4 L3 7 7 L: Dimension table n: Stations n L 1 35 27 13 2 54 46 32 3 73 65 51 4 92 84 70

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SMC believes their locnl presence is critical to c u s t on rc r -foa t; ed p n d u c t de re l opm c t t I prorcs.r. SMC's Global Engineering Netwirrk UTC (US Technical U. S. A.

VZA2000

Function Port size Rc Valve model VHS VZA4121-01 VZA4221-01 VZA4321-01 VZA4421-01 VZA4141-1-01 VZA4141-1-02 VZA4141-2-01 VZA4141-2-02 VZA4241-1-01 VZA4241-1-02 VZA4241-2-01 VZA4241-2-02 VZA4341-1-01 VZA4341-1-02 VZA4341-2-01 VZA4341-2-01 VZA4441-1-01 VZA4441-1-02 VZA4441-2-01 VZA4441-2-02 Single Double Closed center Exhaust center 0.44 0.44 0.44 0.44 0.25 0.25 0.25 0.25 1.7 1.7 1.7 1.7 0.49

ML1C

4 $7 $6 y %0 %1 CLS CLQ #3 #2 !8 @0 @2 @1 @7 RLQ @3 r MLU o #5 !6 $3 $4 MLGP Component Parts Component Parts Material No.

BP1000

mm FV4 MV4 FV6 MV6 1.85 01 47.0 2.35 01 59.7 Hastelloy is a registered trademark of Haynes International.

(full span), GAUGE, AIRLINE EQUIPMENT, AR REGULATOR, 22, AR NO SIZE RATKIT/ACCESSORY, .22784 lb, ModelPressure range (1)Indication unitConnection threadNote MPaG46-7-01/020 to 0.7MPaR 1 8, 1 4?

Lubrication Equipment

ALF600 ALF800 ALF900 / / 1 4 3 8 3 4 1 2 ITV / 1 3 4 1 VBA 2 1 1 2 /1 1 4 VE Dimensions: Auto Feed Tank VY G AL L K 428 428 J 414 414 472 472 I 382 382 422 422 H 24 24 40 40 G 197 197 258 258 F 106 106 137 137 E 91 91 121 121 D 7 7 7 7 C 16 16 30 30 B 70 70 108 108 Model A 174 174 234 234 ALT-5 ALT-5-IS ALT-9 ALT-9-IS 449 482 1.17-14 Oil Distributor VA, VB/Nylon Tubing Related Products Oil

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Refer to "How to Order" on page 7 for auto switch model numbers.

44

KQ2 KFG2H0425-01 KFG2H0425-02 KFG2H0403-01 KFG2H0403-02 KFG2H0604-01 KFG2H0604-02 KFG2H0806-01 KFG2H0806-02 KFG2H0806-03 KFG2H1075-02 KFG2H1075-03 KFG2H1075-04 KFG2H1008-02 KFG2H1008-03 KFG2H1008-04 KFG2H1209-02 KFG2H1209-03 KFG2H1209-04 KFG2H1210-02 KFG2H1210-03 KFG2H1210-04 KFG2H1613-03 KFG2H1613-04 1/8 1/4 1/8 1/4 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 1/4 3/8 1/2 3/8

SMC offers a variety of pressure gauges including general purpose, oil-free/external parts copper-free with limit indicator, clean series and a pressure gauge with a pressure switch.  Pressure ranges vary from 0 to 1.5MPa, depending on the selected gauge.  Panel mounting is possible.General purpose gauge w/limit indicator , Back or vertical side thread , Indication precision: ±3% F.S. (full

Ozone Resistant

220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves 0 1000

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

4 Nickel plated Set of nos. above @4, @6, @7, @8 Aluminum alloy Attachment ring !5 Hard anodized CY1R10-PS 10: Stainless steel 6, 50, 63: Hard steel wire Rolled steel plate Set of nos. above @4, @5, @6, @7, @8, @9, #0 Type C snap ring for axis !6 CY1R50-PS CY1R63-PS Magnetic shielding plate !7 Chromated Seal kit includes @4, @5, @6, @7, @8 for 6. @4 to #0 are for 50 and 63.

ISA2

Leakage voltage Take special precautions if a resistor is used in parallel with the switching element or a C-R element (for surge voltage protection) is used for protection of the switching element. The valve may fail to turn off due to leakage current flowing through the resistor or C-R element. PF2 IF Data Switching element OFF Caution R C Leakage voltage Power supply 1.

ZSE30/ISE30

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/low pressure Option 2 Piping specifications Nil None Bracket R 1/8 (With M5 female thread) 01 NPT 1/8 (With M5 female thread) A T1 Straight type 4 One-touch fitting 5/32" One-touch fiting