Body Size: 30, Protocol: SA [Standalone (When Wireless Adapter is Connected: Wireless Remote)], Unit: SI Units Only

Body Size: 20, Protocol: PN [PROFINET, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: SI Units Only

Body Size: 20, Protocol: SA [Standalone (When Wireless Adapter is Connected: Wireless Remote)], Unit: SI Units Only

Body Size: 30, Protocol: PN [PROFINET, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: SI Units Only

Body Size: 40, Protocol: EC [EtherCAT®, (When Wireless Adapter is Connected, Wireless Base)], Unit: SI Units Only

Body Size: 30, Protocol: EC [EtherCAT®, (When Wireless Adapter is Connected, Wireless Base)], Unit: SI Units Only

Body Size: 20, Protocol: EC [EtherCAT®, (When Wireless Adapter is Connected, Wireless Base)], Unit: SI Units Only

3-Position Rotary Table

MSQ Angle adjustment Range Figure 5 MSZ MSZ CRQ2X MSQX ad a ge ju Cl lt MRQ an st bo oc t r m nd en g k en tm wi in e us 10 10 se t r st on dj a ju an r on ti ot ad iti ta os ge at p ro er y nt io e b C e b n y is e ge n ad w d k an c ju lo t r C st in en g m bo st lt ju b ad M 0 ax 19 im e u ng m ra ro n ta tio Center position adjustment Table 2 R: Clockwise adjustment L: Counterclockwise

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 220 VAC 50/60 Hz [230 VAC 50/60 Hz] With surge voltage suppressor (Non-polar type) T With light/surge voltage suppressor (Non-polar type) With surge voltage suppressor (Non-polar type) Power saving circuit is not available for W type.

EX245-FPS1_2_3_eng

The controller is requesting operator acknowledgment Machinery directive Yes, 2006/42/EC, EN 62061, EN ISO 13849 Green Flash Yes, IEC 61508, EN 62061, EN ISO 13849 TUV Certification Flashing at 0.5Hz The Safe controller requests operator acknowledment PROFINET & PROFIsafe Yes RoHS compliant Yes The following diagnostic event(s) occurred No safe communication.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

124 30 70 17 60 70 90 90 20 22.5 Single clevis with ball joint (CS) EN E B (Max.)

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

220 VAC 50/60 Hz [230 VAC 50/60 Hz] 4 For type W, only DC voltage is available.

C95

6.6 9 10 50 11 12 15 12 50 65 12 33 30 32 45 45 12 9 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 12.5 14 18 16 66 86 18 47 40 50 60 63 15 11 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45 10.5 5.5 40 25 12 16

Cylinder with Lock

C DH7 E EN 0 0.1 ER (Max.)

MXS Series Air Slide Table

-50 MXS12-40 MXS12-30 0.010 0.01 MXS12-20 MXS12-10 0.02 0.005 20 40 60 80 100 120 0 0 0 20 40 60 80 100 120 60 20 40 80 100 120 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf 49 MXS Series Air Slide Table Table Deflection Table deflection by pitch moment Table deflection by yaw moment Table deflection by roll moment Table pitch deflection due to static pitch moment

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MSQA3A (High precision type) 50 130 150 40 MSQA30 (High precision type) 20 0 10 20 30 40 50 60 70 18 16 14 12 10 8 6 4 2 0 Load N Load N MSQ7A MSQ50 MSQB50 (Basic type) MSQB7A (Basic type) 100 200 Displacement m Displacement m MSQA7A (High precision type) 80 150 60 120 40 50 MSQA50 (High precision type) 20 24 22 20 18 16 14 12 10 8 6 4 2 0 20 40 60 80 100 120 0 Load N Load N 11-9-9 10 Courtesy

Rotary Table/

0 6 5 4 3 2 1 0 5 10 15 20 25 30 Load N Load N MSQ20 MSQB2A 300 100 MSQB20 (Basic type) Displacement m Displacement m 250 80 10 20 30 40 190 200 60 MSQA20 (High precision type) 40 0 0 10 20 30 40 50 10 8 6 4 2 Load N Load N MSQ30 MSQB3A MSQB30 (Basic type) 300 100 Displacement m Displacement m 250 90 200 80 50 130 150 MSQA30 (High precision type) 70 60 0 0 10 20 30 40 50 60 70 12 10 8 6

Body Size: 20, Protocol: EN [EtherNet/IPâ„¢, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: K (Units Selection Function)

Body Size: 40, Protocol: EN [EtherNet/IPâ„¢, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: K (Units Selection Function)

Body Size: 30, Protocol: EN [EtherNet/IPâ„¢, OPC UA (When Wireless Adapter is Connected: Wireless Base)], Unit: K (Units Selection Function)