Table of Contents

) Since it is normal, the number count is reset EC = 0.

PC Wiring System Series PCW

PLC Dimentions Can be directly mounted on PLC. 0 0 18.2 0 0 00 000 00 000 00 70.1 (5.2) 23.1 16.5 27.4 Models E-con type 16 point output unit can be used for mixed connection of branch output unit and PCW-EC series. Connecting branch input unit to PCW-EC is not possible. Refer to the page 58 for details.

Large Size Vacuum Module: Series ZR

Example) ZR100-K15MZ-EC (-Q) . 1 pc. 3 L 38 ZS VJ10-20-4A-6 . 3 pcs.

ZX

(VJ314) ZX1051-K15LZ-EC 0.5 ZX1051-K35MZ-EC General vacuum switch (ZSE) ZX1071-K15LZ-EC With silencer 24 VDC Plug connector type With light/surge voltage supressor Connector type 0.7 ZX1071-K35MZ-EC ZX1101-K15LZ-EC 1.0 ZX1101-K35MZ-EC ZX1-K15LZ-E ZX1-K35MZ-E 13-2-5 5 Series ZX Ejector System/Combination of Supply Valve and Release Valve Combination Symbol: K1 Combination Symbol: K8 An N.C

ZQ-OM01301

-40 10 Suction flow rate -20 -20 5 0 0 0 0.2 0.3 0.4 0.5 0 1 2 3 4 5 6 Supply pressure[MPa] Suction flow rate [L/min (AMR) ] ZQ07A Exhaust Characteristics Flow Rate Characteristics Supply pressure0.43MPa -100 40 -100 35 Air consumption [L/min (AMR) ] -80 Vacuum pressure [kPa] -80 Suction flow rate [L/min (AMR) ] Vacuum pressure [kPa] Vacuum pressure 30 -60 25 -60 Air consumption 20 -40 -

Compact Cylinder/Guide Rod Type Series CQM

-20 -25 -30 CDQMB205 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB255 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB325 10 15 20 25 30 35 40 45 50 75 -100 CDQMB405 10 15 20 25 30 35 40 45 50 75 -100 CDQMB5010 15 20 25 30 35 40 45 50 75 -100 CDQMB6310 15 20 25 30 35 40 45 50 75 -100 CDQMB8010 15 20 25 30 35 40 45 50 75 -100 CDQMB10010 15 20 25 30 35 40 45 50 75 -100 M8 x 60L x 65L x 70L x 75L x 80L

energy saving effect

Nil Rc F G (with Rc-G conversion fitting) N NPT (with Rc-NPT conversion fitting) Power supply 40 3-phase 380 to 415 VAC (50/60 Hz) Specifications Model HRSH100-Al-40-l HRSH150-Al-40-l HRSH200-Al-40-l HRSH250-Al-40-l HRSH300-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.27 2.1 2.1 2.8 2.8 Control method PID control Ambient temperature/Altitude

17

Load Mass Allowable Moment MY1B/M1 MY1B/M3 MY1B/M2 MY1B/m1 200 200 200 300 400 500 20 30 40 50 100 100 50 20 30 40 100 50 10 40 30 20 30 40 50 5 4 3 2 10 Load mass kg Moment Nm Moment Nm Moment Nm 20 5 4 3 2 10 1 10 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B32 MY1B25 MY1B40 0.2 0.3 0.4 0.5 MY1B32 5 4 3 1 MY1B32 MY1B32 MY1B25 0.5 0.4 1 MY1B25 MY1B25 D0.1 0.3 0.2 2 0.5 0.4 0.3 0.05 0.04 0.03 0.2 -X

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

bolt MY1H LZ Stroke Bore size (Shock absorber stroke) T S E EA EB W h TT Stroke adjustment unit Shock absorber FC FA EY EC (mm) E EA EB EC EY h S T TT FA FC Shock absorber model Applicable cylinder W F MY1H25 18 9 40 7.5 53.5 16 21 3.5 46.7 7 53 RB1007 5 (Max.16.5) MY1H32 25 14 45.6 9.5 67.5 23 20 4.5 67.3 12 64 RB1412 8 (Max.20) MY1H40 31 19 55 11 82 24.5 26 4.5 67.3 12 9 (Max.25) 75

JXCx-OMX0009

Refer to the construction drawing of the actuator motor. 40 40 40 40 40 40 40 40 Air cylinder installation with an auto switch is forbidden in the shaded area. (2) When installing electric actuator LEY(G) or LEF series with an auto switch by side, leave a gap of 40 mm or more with respect to the position where the magnet passes.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Refer to the construction drawing of the actuator motor. 40 40 40 40 40 40 40 40 Air cylinder installation with an auto switch is forbidden in the shaded area. (2) When installing electric actuator LEY(G) or LEF series with an auto switch by side, leave a gap of 40 mm or more with respect to the position where the magnet passes.

HRX-OM-O021

40 1000 1000 0 0 0 10 20 30 40 50 0 10 20 30 40 50 Circulating fluid temperature [] Circulating fluid temperature [] 50Hz 60Hz Fig. 9-4 Cooling capacity(HRS050--20-(BJM)) 9.5 Heating capacity 9.5.1 HRS050-A-20-(BJM) 2000 2000 Ambient Ambient temperature temperature 1500 1500 5 Heating capacity [W] Heating capacity [W] 5 20 20 25 25 1000 32 1000 32 40 40 500 500 0 0 5 10 15 20 25 30 35 40

HRX-OM-R005

Ambient Ambient temperatur temperatur Heating capacityW Heating capacityW 1500 e e 1500 40 32 25 20 5 40 32 25 20 5 1000 1000 500 500 0 0 5 10 15 20 25 30 35 40 5 10 15 20 25 30 35 40 Circulating fluid temperature Circulating fluid temperature 50Hz 60Hz Fig. 9-6 Heating capacity(HRS060-W-20-(BJM)) HRS Series 9.4 Cooling capacity 9-7 HRX-OM-R005 Chapter 9 Documents 9.6 Pump capacity 9.6.1

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

40 0.4MPa 0.4MPa F 0.3MPa 0.3MPa 20 20 0.2MPa 0.2MPa 0 0 10 10 20 20 30 30 40 40 Gripping point L mm Gripping point L mm MHS2-25D MHS2-25D 100 100 F Internal gripping Pressure 0.6MPa Pressure 0.6MPa 80 80 Gripping force N Gripping force N 0.5MPa 0.5MPa 60 60 Note: 1N = 0.2248lbf 1in = 25.4mm 1MPa = 145psi 0.4MPa 0.4MPa 40 40 0.3MPa 0.3MPa 0.2MPa 0.2MPa 20 20 0 0 10 10 20 20 30 30 40 40 Gripping

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

A 8 COMPLIANCE WITH EC DIRECTIVES 1. WHAT ARE EC DIRECTIVES? The EC directives were issued to standardize the regulations of the EU countries and ensure smooth distribution of safety-guaranteed products.

PC Wiring System

PLC I/O card (KZ-C32X, KZ-C32T) Dimensions Series PCW-02 With power lines Without power lines PLC connection side PCW unit connection side PLC connection side PCW unit connection side Reduced-wiring Fieldbus System FCN manufactured by FUJITSU LIMITED 40 pin connector FCN manufactured by FUJITSU LIMITED 40 pin connector MIL-C-83503 40 pin connector MIL-C-83503 40 pin connector Static Electricity

Ejector Valve Unit Series ZYY/ZYX

-40 Air consumption -40 40 -40 40 Suction flow rate Suction flow rate -20 20 -20 -20 20 -20 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 10 20 30 40 50 5 10 15 20 25 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0 0 Supply pressure (MPa) Suction flow rate (l/min(ANR)) Supply pressure (MPa) Suction flow rate (l/min(ANR)) How to Read Flow Characteristics Graph The flow rate characteristics indicate the relationship

ZSM1-115/121

Time Failure predict number (EC) Since it is normal, the number count is reset EC = 0. Abnormal EC = 1 Abnormal EC = 2 Abnormal EC = 3 884 Technical Information Auto shift function 12 The auto switch function is the function to regard the pressure value at the point of this signal being input as the benchmark and to display and conduct switching.

HRX-OM-S004

capacity . 8-12 HRS Series HRX-OM-S004 Contents 8.4.1 HRS100-A-20/40/46. 8-12 8.4.2 HRS150-A-20/40/46. 8-12 8.4.3 HRS100-W-20/40/46. 8-13 8.4.4 HRS150-W-20/40/46. 8-13 8.5 Pump capacity . 8-14 8.5.1 HRS100/150-A/W-20/40/46. 8-14 8.6 Types of Hazard Labels (HRS--40/46-) . 8-15 8.6.1 Positions of danger warning label . 8-16 8.7 Standards . 8-17 8.8 Sample DoC. . 8-18 8.9 Daily Check Sheet

CNG

81 169 (178) 14 49 22 18 10 6.6 40 4.5 58.4 56 30 30 71.4 4 12 M6 x 1 Without rod boot With rod boot Bore size (mm) 20 25 32 40 l ZZ H Z e f h Z ZZ 35 190 211 30 16 55 210 231 0.25 x Stroke 229 40 207 228 30 17 62 250 40 214 238 35 17 62 236 260 50 241 (250) 269 (278) 35 17 70 261 (270) 289 (298) Note) ( ): Denotes the dimensions for long stroke.