Process Valve Series VNA

(mm) 1 8 1 4 1 8 1 4 1 8 1 4 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 Equivalent size Note 1) No freezing Note 2) This product cannot be used for water applications.

Compact and Lightweight

Model 6 6 6 ZH05DA ZH07DA 1/4" 1/4" 1/4" ZH05DA ZH07DA One-touch One-touch SUP. EXH. 6 6 8 ZH10DA 1/4" 1/4" 5/16" ZH10DA 8 10 10 ZH13DA ZH15DA 5/16" 3/8" 3/8" ZH13DA ZH15DA 10 12 12 ZH18DA ZH20DA 3/8" 1/2" 1/2" ZH18DA ZH20DA One-touch Oval release button is only available with 6. VAC. One-touch and screw-in connection SUP. VAC. EXH. Model SUP. VAC. EXH.

Compact Vacuum Unit

ZB1 PS 1 A o V-port assembly Pressure sensor specifications ZB1 VPN3 A C2 0 to 14.6 psi (0 to 101 kPa), output: 1 to 5 V, accuracy: 2% F.S. or less 1 3 14.5 to 14.5 psi (100 to 100 kPa), output: 1 to 5 V, accuracy: 2% F.S. or less One-touch fitting C2 C4 N1 N3 L2 L4 LN1 LN3 Straight 2 mm one-touch fitting Straight 4 mm one-touch fitting Straight 1/8" one-touch fitting Straight 5/32" one-touch

PFxx-OMY0005

Bit offset Item Notes 0 Accumulated flow SW1 0: OFF 1: ON 1 Accumulated flow SW2 0: OFF 1: ON 2 Flow rate SW1 0: OFF 1: ON 3 Flow rate SW2 0: OFF 1: ON 4 Temperature SW1 0: OFF 1: ON 5 Temperature SW2 0: OFF 1: ON 6 Pressure SW1 0: OFF 1: ON 7 Pressure SW2 0: OFF 1: ON 8 Flow rate unit 0: L 1: ft3 9 Flow rate criteria 0: STD 1: nor 10 Flow diagnosis 0: Normal 1: HHH 11 Temperature diagnosis

SMC Electronic Switch Series Variations

F.S. = 100[kPa] 0[kPa] = 100[kPa] 3[%F.S.] = 100[kPa] X 0.03 = 3[kPa] Example: Time Failure predict output 1 ON OFF Time The display error induced by the temperature change can be as much as 3[kPa].

RQ

D-X 100 Lateral load F (N) 2080 10 Data 63 50 Operating pressure 0.5 MPa Operating pressure 0.4 MPa 40 32 25 Graph (1) 1000 20 1 10 100 300 Stroke + Eccentric distance (mm) Cushion Needle Adjustment 100 100 Load weight kg Caution 80 63 50 1.

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

VZ100/300/500

1/8 1/8 1/8 1/8 C6 Base mounted For internal pilot VZ54 VV3Z5-41-1 1/4 1/4 C8 Body ported For external pilot VV3Z5-21R-1 VZ52R 2.2 0.34 0.55 2.4 0.32 0.62 1/4 1/8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VV3Z5-41R-2 1/4 1/4 1/8 1/8 C6 C8 2.2 2.0 1.6 2.1 0.35

CE

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5 @6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 CX CY 40 to 63 MQQ M @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3 #3 r !4 e !6 @6 RHC MK(2) #7 #6 !5 RS Q G RS H A !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 RZQ MI W S CEP1 Component Parts CE1 No. No.

Air Slide Table Series MXW

GG Model MXW20-150 48 169 41 66 113 6 216 1 101 412 29 -X MXW20-175 52 194 66 91 140 6 237 1 128.5 462 50.5 MXW20-200 48 219 91 116 164 7 264 1 152 512 56 Individual -X MXW20-225 52 244 116 141 189 7 288 1 177.5 562 73.5 MXW20-250 48 48 269 141 166 215 8 312 2 203 612 59 163 Series MXW MXW25/Stroke: 100, 125, 150 mm Operating port 2 x Rc 1/8 (NPT 1/8, G 1/8) J 20 Width across hexagon

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

Piece n n Pieces M O U N T I N G See NCJ2 Accessories Section A P P L I C A B L E A U T O S W I T C H B Basic L Axial Foot F Rod Side Flange S T D S T R O K E/H U N D R E D T H S O F A N I N C H B O R E S I Z E 6 (1/4) 050, 100, 150, 200 10 (3/8) 050. 100. 150, 200 16 (5/8) 050, 100, 150, 200 6 (1/4) 10 (3/8) 16 (5/8) T E C H N I C A L SPECIFICATIONS Fluid Air Proof Pressure 1MPa / 145 PSI

Nozzle Type Ionizer

for piping IZN10E-11 With Stainless steel 316 One-touch fitting*2 + Anti-static tubing * Discharge time at a distance of 50 mm from the end of tube Tube I.D.: 5 mm Tube I.D.: 4 mm 5 5 4 4 Discharge time [s] Discharge time [s] 3 3 0.05 MPa 2 2 0.05 MPa 0.1 MPa 1 1 0.1 MPa 0.3 MPa 0 0 0 400 500 200 300 100 0 400 500 200 300 100 Maximum operating pressure is 0.1 MPa.1 Tube length [mm] Maximum

Thermo-con

Contents 1 1 200 to 220 VAC 100 to 240 VAC 2 2 200 to 220 VAC 100 to 240 VAC PE 2 1 3 3 PE HRG HRS HRZ HRZD HRW HEC HEB HED Technical Data Related Products 2. Communication connector (RS-232C or RS-485) D-sub 9 pin (socket) Holding screw: M2.6 Signal contents 3 2 Pin No. RS-232C RS-485 5 4 1 1 Unused BUS+ 2 RD BUS 3 SD Unused 4 Unused Unused 5 SG SG 6-9 Unused Unused 9 8 7 6 3.

42

D side Coil voltage 1 100 VAC (50/60 Hz) 2 200 VAC (50/60 Hz) 3 110 VAC (50/60 Hz) 4 220 VAC (50/60 Hz) 5 24 VDC 6 12 VDC 461 VQ4000 Series Kit (Terminal block box kit) T 38 91 1/8" PE. port 18 18 17.2 PE 41.7 R1 R2 3 5 P 1 SMC 1/2" 1(P), 5(R1), 3(R2) port 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port M5 x 0.8 Ground screw 2 x G3/4 Conduit port 10.7 U side 129.5 126.5 3.5 163

Digital Flow Switch (Integrated display type) ( compatible)

Specifications of temperature sensor Items Specifications Rated temperature range 0 to 100 oC 1 Setting/display temperature range -10 to 110 oC Min. setting/display unit 1 oC Display unit oC Display accuracy 2 oC Response 7 s 2 Ambient temperature characteristics 5%F.S. 1: The rated temperature range is only for the temperature sensor.

JXCx-OMY0008

Movement Speed Position Acceleration Deceleration Force Value speed Speed Area 1 Area 2 In pos force force mode mm/s (mm) mm/s2 mm/s2 (mm) (mm) (mm) mm/s 0 1 Absolute 100 50.00 1000 1000 0 0 0 100 0 0 0, 1 2 Relative 50 10.00 1000 1000 0 0 0 100 0 0 0, 1 (E.g.) Flow chart Controller (1) Select/input Step No.1.

Compact Guide Cylinder Series MGQ

125,150 175, 200 59 M10 x 1.5 M10 x 1.5 MGC 72 M10 x 1.5 M10 x 1.5 M12 x 1.75 M14 x 2 M12 x 1.75 M14 x 2 92 MGF 112 MGQM (Slide bearing)/ A, DB, E Dimensions MGQL (Ball bushing bearing)/ A, DB, E Dimensions Bore size (mm) 32 40 50 63 80 100 MGZ TA TB V W X YY YL Z T (mm) (mm) 112 122 138 148 185 221 2 2 2 2 2.5 2.5 1 1 1 1 1.5 1.5 80 90 100 110 140 170 5 10 10 10 15 15 100 110 124 132 166

EX120/121/122

TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 TYPE 1 US C R C US US C R R R R R R R US C US C US C US C US C US C TYPE1 SERIAL NO.

0.55

Piping port Port size Series Model 3.2 4 6 8 10 12 16 4(A), 2(B) 1/8 VF3;3;-;;1-01 1(P), 5(EA), 3(EB) 1/8 4(A), 2(B) 1/4 VF3;3;-;;1-02 1(P), 5(EA), 3(EB) P: 1/4, EA, EB: 1/8 4(A), 2(B) 1/4 VF3;4;-;;1-02 VF3000 1(P), 5(EA), 3(EB) 1/4 4(A), 2(B) 3/8 VF3;4;-;;1-03 1(P), 5(EA), 3(EB) 3/8 1(P), 5(R), 3(R) 1/4 Type 30 manifold base 4(A), 2(B) 1/4 Type 40 manifold base 1(P), 5(R), 3(R) 1/4 Applicable

CE

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC 1 t 1 10 x 106 100 kHz Counting speed f = = = 10 Hz 7 10 4-4.5 33.5 104 BCD output connector 2) UP/DOWN input Input wave form conditions: At a maximum of 100 kHz, the UP/DOWN wave form should be as shown below. 1130.2 125 +12 V 10% UP pulse +12 V 10% DOWN pulse 5 sec 64 5 sec 59 5 sec 3) 15 mA when BCD is output.