Large Size Vacuum Module: Series ZR Filter block Nil 30 50 0.6 m 3 cores, 1 output, 2 m (Output specifications: N, P) 4 cores, 2 outputs, 2 m (Output specifications: A, B, C, D, E, F) Gasket groove 3 m 5 m 3 4 953 D Series ZR Pressure Switch for Vacuum + Suction Filter Unit: ZR1-F Dimensions: ZR1-F Circuit diagram 2 x Slitted hole (Mounting hole)1 2 2 2 Indicator light (Red) ZR1-FE 10 10 23 2 x 4.5 43 Vacuum pressure setting
P Signals and terminal status can be monitored. P Parameters can be set.
D-X Individual -X 123 Series MXQ External Dimensions of Adjuster With Shock Absorber (BS/BT) Extension End Body mounting section Table mounting section Q P A D J M H K B F G G E E1 L C MXQ-BS20 (L) MXQ-BS25 (L) MXQ-BS 8 (L) MXQ-BS12 (L) MXQ-BS16 (L) Body mounting section Table mounting section A Stroke adjustment range (mm) Applicable size Model D H J K Q 1) B C F G M E L E1 P *1) M3 x 12
Directional Control Valves Air Grippers Modular F.
L J : In case of manifold. ifications Air and inert gases 20-1OoPS| (1.5-7kgflcm') Operating pressure range P100PSl (P-7kg7cm2) P : supply pressure Pilot pressure range Max.120"F (50'C) Ambied and fluid temDerature Not required Lubrication Mounting position 15G/3G (8.3-20o0Hz) lmoact,/vibration .esistance How To Order : Wihout kacket 6 o F: Wlil bracket vJ3000-13-3 (Factory inslalld Operating
L J : In case of manifold. ifications Air and inert gases 20-1OoPS| (1.5-7kgflcm') Operating pressure range P100PSl (P-7kg7cm2) P : supply pressure Pilot pressure range Max.120"F (50'C) Ambied and fluid temDerature Not required Lubrication Mounting position 15G/3G (8.3-20o0Hz) lmoact,/vibration .esistance How To Order : Wihout kacket 6 o F: Wlil bracket vJ3000-13-3 (Factory inslalld Operating
L J : In case of manifold. ifications Air and inert gases 20-1OoPS| (1.5-7kgflcm') Operating pressure range P100PSl (P-7kg7cm2) P : supply pressure Pilot pressure range Max.120"F (50'C) Ambied and fluid temDerature Not required Lubrication Mounting position 15G/3G (8.3-20o0Hz) lmoact,/vibration .esistance How To Order : Wihout kacket 6 o F: Wlil bracket vJ3000-13-3 (Factory inslalld Operating
FIFI -r-r I I I L-Opllonal Valvo Slr 1 = C l a $ I I P = External Electrical Plug In I p5= "DlN" Connector (with 6'Cord Assy.) I E = 48'Solsnoid Leads (24'STD) I e = Mounting Bs (AXT 33&11) II I F..tur"" D = Recessed non-locking manual operator F = Becessed non-locking manual operator and etectricat indicator light.'
P o w er su p p ly co n n ecto r key Communication connector key 6 Sw i t ch set t i ng Saf et y I nst ruct i ons f or Set t i ng Turn of f t he pow er suppl y w hi l e set t i ng t he sw i t ch. I f t here i s f orei gn m at t er or w at er dropl et s around t he sw i t ch cover, cl ean i t of f bef ore openi ng t he cover.
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
to "AMS20/30/40/60A-R/N/F#D" for dimensions other than "A" and "F".
+ + + + + + + 20 20 stations S P P A, B port size P Nil Rc A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A B B B A, B port M5 x 0.8, C4 A M5 M5 x 0.8 F G C4 One-touch fitting for 4 N NPT N3 One-touch fitting for 5/32" T NPTF 13 Series SYJ3000 Flat Ribbon Cable Manifold Common SUP/Common EXH Note) For more than 10 stations, supply air to both sides of P port and exhaust air from
R* P FR* FP Functional option Adjuster option Without option With buffer With end lock Axial piping With buffer, end lock With buffer, axial piping F R P FR FP Note 1 Note 1 Note 1 AS AT X X X X Note 1 A X X X X End lock option is not available for MXS6.
override 34.7 [41.7] M5 x 0.8 (A, B port) 2-1.8 (For manifold mounting) (Light/Surge voltage suppressor) 28 [35] + 22.1 54.4 [56.6] 2 13.5 12.6 15 R P R (Bracket) 15 11 10 1.2 (PE port) 22.1 7 7 15 M5 x 0.8 (P, R port) M8 connector (WO): SYJ3120-WO-M3 (-F) L plug connector (L) : SYJ3120-L-M3 (-F) M plug connector (M): SYJ3120-M-M3 (-F) (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5
[F 0] Display units, switch output specifications and diagnostic information selection function Page 32 Units specification Pressure range Default setting ISE20C(H) MPa "Nil" or M ZSE20C(F) kPa ISE20C(H) P psi ZSE20C(F) Item Default setting Switch output specifications PNP Diagnostic information ALL -30No.PS-OMX0002-A [F 1] Setting of OUT1 Page 34 Item Explanation Default setting Output mode
Body type Rc 1 8 Plug-in type VVZS3000-P-01-1 Non plug-in type VVZS3000-P-01-2 Rc 1 4 VVZS3000-P-02-1 VVZS3000-P-02-2 Body type Plug-in type AXT625-12A Non plug-in type Part no. Part no. Body type Plug-in type VVZS3000-22A-1 Non plug-in type VVZS3000-22A-2 Part no.
F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.
brnE al 0frli&/.bs,irfor Port size :Non-locking push type (Flush) rf> I l F l B-Lock type (Screw type) > | | ' l xA-l\tonlockng Push type (Extended) . C-b"kt/p. (Lever) Body type.-[-c"*'f ] sf;1 i qo3j, {Botlom pofted 1/8 NPTF oniy.
OUT 4-L J 2-K M M 4-K Port size Port size N Min. clearance for maintenance Drain Min. clearance for maintenance Drain D Lubricator Regulator Air filter D Lubricator Regulator Air filter ACG20 Optional (-Y) Upward facing handle ACG30/40 Optional (-Y) Upward facing handle A P G F E A F E P G 2-L B C 2-L B C H1 H2 H1 H2 OUT IN OUT IN SMC SMC 4-L 2-L J OUT OUT M 2-K M 4-K Port size Port size