FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Filtration material: HEPO II (PP) w q e r w q er 0.1 0.1 0.05 0.05 Pressure drop MPa Pressure drop MPa Filtration accuracy (m) 2 4 6 13 Filtration accuracy (m) 0.5 1 5 10 20 50 75 100 No.

Cylinder with Turntable Series MGT

25st 50, 75, 100st Larger than 100st WA WB Bore size (mm) 63 80 100 X XA XB XC XL YY YL Z 52 52 72 50 54 47 38 42 35 128 128 148 28 28 48 24 28 11 88 92 85 8 10 10 6 7 7 5 6 6 80 100 124 4 5 5 20 24 28 M10 x 1.5 M12 x 1.75 M14 x 2.0 D-X (mm) MGTM (Slide bearing) MGTL (Ball bushing bearing) (mm) AA A E BD Bore size (mm) 63 80 100 AA A E DB Bore size (mm) 63 80 100 Individual -X 25, 50st Larger

51

Head Flange: CG3GN Bore size Stroke With rubber bumper Width across flats KA GA GB 4 x FD 8 x J 2 x P F R0.5 H1 0 E 0.05 MM D FX 0.15 0 E 0.05 I B C Corner of the cover (20 to 63) H A AL Width across flats B1 Width across flats NA F FT C FX 0.15 S + Stroke ZZ + Stroke B End boss is machined on the flange for E.

Slider Type/Ball Bushing Bearing

Determination of kinetic energy of load (E) E > Es E Es Bore size determination Tentative determination of L type W V 2 E = () 2 1000 Note 2) E > Es Determination of pressure (P) when making intermediate stop P > Ps P Ps Consider made-to-order products, depending on an operating condition. Tentative determination of L type (For intermediate stops, refer to page 1515.)

CXT

(NA) (NA) Q + Stroke Data d Bore size (mm) Standard stroke (mm) A PA (N) (NA) PB PW Q E F G GP H HG HN HP HT L Slide Ball bushing 32 25, 50, 75, 100 10.5 28 20 45 27 9.5 110 66 26.5 67.6 64 33.5 100 14 53 70 120 160 121 40 25, 50, 75, 100 11.5 36 25 52 31 10.5 130 78 30.5 77.6 74 40.5 136 12 51 90 140 190 159 PA dimension is the center sorted factor of the L dimension.

Stability of suction position,

2 i i o o u u y y w w t t r r q q e e With buffer (Vacuum inlet: Vertical) With buffer (Vacuum inlet: Lateral) Component Parts No.

Electric Actuator Miniature Rod Type Miniature Slide table Type

Confirm the position where the pushing operation starts. a b c d e f g h i j k No.

LEC-OM07605CN

PB32 (e)([Pr. PB33][Pr. PB36][Pr. PB56][Pr. PB59])[Pr.

Modular Type Regulators Series AR

q t IN OUT e q r IN OUT w r w AR30(K), AR40(K) q t e AR50(K), AR60(K) IN OUT r w q t e IN OUT r w AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A AC Component Parts AF No.

Clamp Cylinder Series CK1

CKP140-50 CKP140-75 CKP140-100 CKP140-125 CKP140-150 Piping port (plugged) Piping port (plugged) CKP40-R050 CKP40-R075 CKP40-R100 CKP40-R125 CKP40-R150 Dedicated to Series CKP140 CKG140-50 CKG150-50/CKP150-50 CKG163-50/CKP163-50 CKG140-75 CKG150-75/CKP150-75 CKG163-75/CKP163-75 CKG40-R050 Series CKG140/50/ 63 CKG40-R075 CKG140-100 CKG150-100/CKP150-100 CKG163-100/CKP163-100 CKG140-125 CKG150

Modular Type Air Filters Series AF

Warning 330 Air Filter Series AF10 to AF60 Working Principle: Float Type Auto Drain N.C. type: AD37, AD47 N.O. type: AD38, AD48 Compact auto drain N.C. type: AD17, AD27 q r e w t i y u o !0 !1 Drain q r e w t i u y o !0 !

Air Cylinder Series MB

75 100 125 102 114 127 152 177 202 51 25 12.5 25 150 227 89 37.5 50 75 100 125 102 114 127 152 177 202 51 25 12.5 25 150 227 37.5 50 75 100 125 101 114 126 139 164 189 214 56 29 12.5 25 150 239 175 200 264 289 37.5 50 75 100 125 101 114 126 139 164 189 214 61 29 12.5 25 150 239 175 200 264 289 125 10 75 27 20 30 40 60 80 100 120 130 140 150 170 190 210 120 230 270 140 160 180 200 250 290

Booster Regulator/Air Tank

Description q O-ring 1 1 (VBA1A) 1 1 (VBA2A) w Hexagon socket head taper screwed plug (For drain port) 1 1 1 e Hexagon socket head cap screw 4 4 (VBA1A) 4 4 (VBA2A) r Anchor bolt/nut 4 Keep the manufacturers certificate of compliance in a safe place. 1030-1 A Air Tank VBAT Series Dimensions VBAT05AN1-E-X105/VBAT05A1-E-X105 VBAT05SN1-E-X105/VBAT05S1-E-X105 Connected to VBA10A, 11A Tank IN

Process Valve Series VNA

G (Grommet terminal: E) H (Conduit terminal: T) I (DIN terminal: D) In the case of EZ or TZ, the length is longer by 10 mm.

Series CE1

7 NBR Valve retainer seal #7 * Since ther is a possibility of improper operation, contact SMC regarding the replacement of seals. 4.4-9 Series CE1 Dimensions 12, 20 Both ends tapped CE1B Bore size Stroke (mm) A B C D E G H I K L M Bore (mm) 12 20 Standard stroke 25, 50, 75, 100, 125, 150 94 M5 X 0.8 16 5.2 25 15.5 69 15 6 25 42.5 25, 50, 75, 100, 125, 150, 175, 200 106 78 15.5 10 36 53.5

KJ

r t y No. q w e r t y u i o !

VQ7-6/7-8

However, one station is used for the E type. There is a maximum of 10 stations, including the control unit mounting stations. Notes Applicable valves and options Part No. Quantity Part No. Quantity Order no. Clerk (code no.) Branch code Please copy this page for use as needed. 34 Manifold Specification Sheet Series VQ7-8 1.

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

, 125, 150, 175, 200 (mm) Bore size (mm) OB OL P PA PB PW Q RA RB RC S SA SB T U VA VB WA WB 50, 75, 100st Larger than 100st 25st 50, 75, 100st Larger than 100st 25st 117 128 168 55 74 89 54 56 71 100 125 150 24 24 35 188 225 272 70 80 100 14 14.5 17.5 Rc1/4 Rc3/8 Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72 63 80 100 50 54 47 38 42 35 128 128 148 28 28 48 110 140 166

VZ100/300/500

port R port P , E port R port Electrical entry Note) VZ52R is for manifold only.