High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

High Vacuum L Type Valve

H5 Initial power / 100 VAC 200/40 400/70 400/80 600/130 800/180 Power 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

LEC-OM02904

P-D P P C C G3 D (2) G4 5m 5m (1) 1.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod end nut Rod end male thread 7-6-53 54 (In the case of without auto switches, A, B, F and P dimensions will be only changed. Refer to the dimension chart.)

VQC

Model A side B side JIS Symbol 4 (A) 2 (B) VQC1A01 VQC2A01 N.C. valve N.C. valve 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1B01 VQC2B01 N.O. valve N.O. valve Exhaust center : VQC1A01 VQC2A01 Pressure center: VQC1B01 VQC2B01 5 (R1) 3 (R2) 1 (P) 4 (A) 2 (B) VQC1C01 VQC2C01 N.C. valve N.O. valve 5 (R1) 3 (R2) 1 (P) R1 A P B R2 2-2-7 8 Base Mounted: Variations F Kit P Kit T Kit L Kit M Kit S Kit Sonic

MXS

Applicable Auto Switches /Refer to p.5.3-2 for further information on auto switch.

High Vacuum Angle Valve

Bellows seal Dust free, P.3 cleaned Single acting (N.C.) XLAV-2 New New Bellows seal Dust free, Solenoid valve P.4 cleaned (With solenoid valve) XLC-2 Double acting Bellows seal Dust free, P.7 Air operated cleaned High-speed operation XLF-2 Single acting (N.C.) O-ring seal P.10 High operating cycles Solenoid valve High-speed operation Single acting (N.C.)

JXCx-OMT0002

Actuator Specifications Supplement 1.1 Initial setting of LEY/LEYG series Model LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 Lead symbol A B C A B C A B C A B C Lead [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 Stroke (mm) 300 300 300 400 400 400 500 500 500 500 500 500 Max. speed [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 Min. speed [mm/s] (Independent and interpolation) 15 8 4 18

SFOD-OMT0010

Actuator Specifications Supplement 1.1 Initial setting of LEY/LEYG series Model LEY16/LEYG16 LEY25/LEYG25 LEY32/LEYG32 LEY40/LEYG40 Lead symbol A B C A B C A B C A B C Lead [mm] 10 5 2.5 12 6 3 16 8 4 16 8 4 Stroke [mm] 300 300 300 400 400 400 500 500 500 500 500 500 Max. speed [mm/s] 500 250 125 500 250 125 500 250 125 300 150 75 Min. speed [mm/s] (Independent and 15 8 4 18 9 5 24 12 6 24

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 (Both sides) 1300 25 12-CY3B25 Non-lube 32 12-CY3B32 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B40 40 Note 1) Stroke exceeding the standard stroke but below the maximum possible stroke is available for special order upon request.

Water-cooledThermo-chiller

50 or less Chloride ion (Cl) [mg/L] 50 or less Sulfuric acid ion (SO42) p p p p p [mg/L] 50 or less Acid consumption amount (at pH4.8) [mg/L] 70 or less Total hardness 1.Thoroughly read the Operation Manual.

CS1

Bore size (mm) 125 140 160 180 200 250 300 Refer to p.1.10-7 for How to Order Auto Switches Style.

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

/See 3.2 Caution (13) on p.18 end plate is tightened too much. 6) The bolt that is the fixation of Please use the bolt of appropriate length. /See 3.2 Caution (13) on p.18 work on the table presses the guide block.

Air Cylinder

, 175, 200, 250, 300, 350, 400 400 67 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400 400 80 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 500 85 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 500 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 500 Precautions Theoretical Output Be sure to read this before handling the products

VCA

S = 38mm VCA21 200 300 400 500 600 700 VCA21 VCA31 VCA31 VCA41 VCA41 VCA41 Other 200 400 400 600 800 1000 1200 1. Material HNBR: Nitrile hydride rubber 500 700 500 1000 1500 800 1000 1200 1000 500 Flow rate Q l/min (ANR) Viewing the graph The sonic range pressure to generate a flow rate of 500l/min (ANR) is P = 0.64MPa for a 3 orifice, and P = 0.35MPa for a 4 orifice.

Sine Cylinder Series REC

If supply pressure is other than P = 0.5 MPa, please figure out a max. stroke, using proportional calculation.

Cylinder with Lock Series MNB

B Rc(PT)P Rear cylinder port ??C ??

Sine Cylinder Series REC

If supply pressure is other than P = 0.5 MPa, please figure out a max. stroke, using proportional calculation.

Sine Cylinder Series REC

If supply pressure is other than P = 0.5 MPa, please figure out a max. stroke, using proportional calculation.

PFxx-OMX0007

Common setting Output mode Hysteresis mode Switch operation Normal output Set value (P) 25 Hysteresis (H) 10 Initial setting Zero cut-off setting CUt: 1.0 (displays 0 for a value below 10 L/min) Switch ON point 25 L/min or more Switch OFF point Below 15 L/min Change the zero cut-off setting The set value (P) and hysteresis (H) cannot be changed.