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Driver side crimping terminals (Note 2) Applicable tool Symbol Crimping Manufacturer Body Head Dice terminal a FVD5.5-4 YNT-1210S (Note 1)b 8-4NS YHT-8S c FVD14-6 YF-1 E-4 YNE-38 DH-112 DH122 d FVD22-6 DH-113 DH123 (Note 1)e 38-6 YPT-60-21 TD-112 TD-124 YF-1 E-4 YET-60-1 (Note 1)f R60-8 YPT-60-21 TD-113 TD-125 Japan Solderless YF-1 E-4 YET-60-1 Terminal g FVD2-4 YNT-1614 h FVD2-M3 j FVD5.5

9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Leakage test result a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e CX p r a 0.0 10 0 20 10 w 10-10 0 5 10 t i o o n L DTime [min] Operation cycles -X e e a a l l k k a t e l u w w g a a c 2 e i o

Purge air discharge tubing port for dehumidification Drain Discharge Drain Drain With drain guide Applicable tubing O.D. : E With float type auto-drain J Option: P With drain guide A B Model C D E F H J Port size: 1/4 Port size: 3/8 Port size: 1/4 Port size: 3/8 Rc 1/4 (Without valve mechanism) Hexagon width across flats 17 IDG10M/10HM IDG20M/20HM 211 187 241 212 236 89 170 266 238 268 8

Grommet: G Conduit: C (Q) Approx. 300 Approx. 280 Approx. 300 D D F Q F Q Width across flats H Class H coil Broken line section C C R G1/2 R E E A H A B B 2 x P Port size 2 x P Port size 2 x M, thread depth N 2 x M, thread depth N L L K K DIN terminal: D Conduit terminal: T Cable 6 to 12 F S Q 27.5 34 F (Q) 25 R C U C (44) R E R G1/2 E G1/2 A H D (S) B B A H D 2 x P Port size 2 x P Port size

Grommet terminal Conduit terminal DIN terminal a Model b c d e f g h i j VEX5510 VEX5511 19 130 110 9 12 2.3 204 204.5 222 221.5 32 VEX5710 VEX5711 136 120 9 20 2.3 221 221.5 239.5 239 VEX5910/5911 Bracket (Option) Pressure gauge (Option) Grommet terminal (E) DIN terminal (D) Applicable O.D. 6 to 8 Conduit terminal (T) 1/4 (P2) 1/4 (P1) Refer to page 1983.

2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

ROM E ROM6.5 E ROM OUT 0.0 0.0 (100ms) MODESHIFTSET DATA No.SET MODE No.

Determination of loads kinetic energy (E) bore size Determination of bore size Review of larger bore size E Es E Es E = m E 2 a ( ) 2 (Refer to page 29) 1000 P Ps P Ps Determination of pressure for intermediate stop (p) (Refer to page 29) Review of larger bore size and operating pressure Model determination 1 Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F Types

Cable connector (4 wire) Right angle type Cable connector (4 wire) Straight type n50 4-7 Mounting hole 31 SMC PREGULATOR E SMC PREGULATOR E RESET 40 52 ITV2090 ITV2090 SET UNLOCK LOCK 84 100 12.5 M12 X 1 Cable connecting threads 1.6 12 (99) (11) SMC PREGULATOR E ITV2090 Rc(PT)1/4 VAC port OUT 2 G ATM (Atmospheric pressure) OUT (Set pressure) VAC (vacuum pressure) 19 n36 Flat bracket P3020114

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

6 e #5 #4 w #3 @5 @7 @4 @6 REBH15 @8 @3 Parts list Parts list No. Description Material Note No.

Component Parts Replacement Parts No. u i Description Description Sub-plate Pilot valve No. q w e r t y Note Aluminum die-casted Part no.

Brazil EXW1-BMJAAE E EXW1-BMJAAN N EXW1-BMJABE E EXW1-BMJABN N A Base MJ B A B EXW1-RDXNE4AE E EXW1-RDXNE4AN N EXW1-RDXNE4BE E EXW1-RDXNE4BN N EXW1-RDYNE4AE E EXW1-RDYNE4AN N EXW1-RDYNE4BE E EXW1-RDYNE4BN N EXW1-RDMPE3AE E EXW1-RDMPE3AN N EXW1-RDMPE3BE E EXW1-RDMPE3BN N EXW1-RDMNE3AE E EXW1-RDMNE3AN N EXW1-RDMNE3BE E EXW1-RDMNE3BN N A DX N B E4 A EXW1 DY N B Remote R A P B DM E3 A N B -17No.EX-OMZ0016

Non-locking push type Push-turn locking slotted type Push-turn locking lever type R port P, E port Note) Enter the cable length symbol in .

e r w t q w q t VSR8-2-FG-DVSS8-2-FG-De r e r w q t w q t VSS8-2-DFHG FIG FJG VSR8-2-DFHG FIG FJG e r e r w q t w q t VSR8-2-DFDAG FDBG FDCG e r w q t Replacement Parts VSR8-2-DFDAG FDBG FDCG VSR8-2-DFHG FIG FJG VSR8-2-FG-DVSR8-2-FG-SVSS8-2-DFHG FIG FJG VSS8-2-FG-DVSS8-2-FG-SDescription No.

Set screw (Unused) r i y d Auto switch mounting bracket u e c Auto switch mounting screw M2.5 x 0.45 x 6 l Switch spacer (For BQ-2) e b Square nut (For BQ-2) w Cylinder q BQ-2 is a set of a, b and c shown above. BQ2-012 is a set of d and e shown above. Cylinder series Applicable bore size (mm) Auto Switch Mounting Bracket Part No.

Unit psig/bar MPa Code r e No code MPA Sample Order Number Port qIN wOUT eGauge port (Inlet) rGauge port (Outlet) w q AZ1402TS e q FV4 FV4 FV4 FV4 w FV4 FV4 FV4 FV4 r 3) Pressure gauge unit MPa or psig/bar selectable.

L E E E E L S L L L S S S S L L L L L 6 9 6 9 6 9 6 9 6 9 IN IN IN MPa MPa MPa MPa MPa Right Left Right Bracket DIN rail mounting bracket DIN rail mounting bracket Stations 1 Stations 1 Stations 1 2 3 IISA2NSR-1B1 set (1 station manifold part number) ISA2-GE41P1 set (Air catch sensor part number) IISA2NSR-3D1 set (3 stations manifold part number) ISA2-HE41P 3 sets (Air catch sensor part number