PFxx-OMS0001CN

d. == 1 / ,/ ([F20](47 )) e. ( (53 )) f. -46No.PF-OMS0001CN-A [F20] [---] =00 = ON EEPROM 100 +100 OFF <> [F20] [iNP][] [iNP][-] [inP] [] [F20] GND 30 msec.

Digital Flow Switch (Remote type monitor unit)

PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521 30 250 Analogue output (Fluid temperature) A B C D Voltage output 0.6 V 1 V 5 V 5.4 V Current output 2.4 mA 4 mA 20 mA 21.6 mA Be sure to connect to a flow sensor with a temperature sensor. -70No.PF-OMN0012-H Dimensions Front protective cover + Panel mount adapter -71No.PF-OMN0012-H Cut-out dimensions for panel mounting : The

Manifold Specifications

VQ7 C4 C6 VZ3000-50A-1Manifold block assembly q (a) Bolt (Both sides) EVS For D side, With D-sub connector and P/R port with One-touch fitting for 8 SUP/EXH block assembly VZ3000-51A-1D w D side For U side, With D-sub connector and P/R port with One-touch fitting for 8 For D side, set with w VFN SUP/EXH block assembly VZ3000-51A-1U e DIN rail End block assembly VZ3000-52A-2D r VZ3000-52A-

VZ100/300/500

R A: 0.19 A P: 0.13 VP VG Grommet (G) Body Ported Base Mounted VZ300 VP S070 M5 x 0.8 0.66 2 3 (A R) VQ L plug connector (L) VKF (Standard) VQZ 100 VAC 50/60 Hz With surge voltage suppressor (G) (L) (M) (D) With light/ surge voltage suppressor (L) (M) (D) VZ500 200 VAC 50/60 Hz 24 VDC VZ VS 2.5 2 3 (A R) (Option) N. C. N. O.

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(mm) Bore size D-A9, D-A9V D-M9, D-M9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum Stroke for Auto Switch Mounting (2 pcs.)

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

(mm) Bore size D-A9, D-A9V D-M9, D-M9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum Stroke for Auto Switch Mounting (2 pcs.)

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

(same side) D-Z73, Z76, Z80 Reed switch 1 pc., 2 pcs. (different sides) 20 2 pcs. (same side) 60 D-Y59A(B), Y69A(B) Y7P(V) 1 pc., 2 pcs. (different sides) 20 2 pcs. (same side) 70 D-Y7NW(V), Y7PW(V) Y7BW(V) Solid state switch 1 pc., 2 pcs. (different sides) 25 2 pcs. (same side) 70 D-Y7BAL 1pc., 2 pcs.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Size: 10 to 200 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed switch Solid state switch D-M9 D-M9V, D-F9W, D-F9WV, D-F9BAL D-A9, D-A9V Rotation Size Operating angle m Operating angle m Operating angle m Hysteresis angle A Hysteresis angle Hysteresis angle A B B B A 10 10 10 10 10 10 10 90 80 65 50 45

A-HEC-OM-J004

/humidity Ambient air quality Liquid Tank W 200 H 332 D 207mm(excluding protrusion) Dimensions Controller W 250 H 180 D 340mm(excluding protrusion) Liquid Tank Approx. 8.5kg (Empty) Weight Controller Approx. 6.5kg Connection cable DC cable, Signal cable: 3m each Accessory cable Power supply cable: 2m 7.2 Specifications 7-2 A_HEC-OM-J004-4 Chapter 7 Appendix Note 1) Differs depending on

13

Basic Type ZX ZR (a) Full system (b) 3 port valve selection ZM ZH ZU ZL ZY ZQ (c) Switching on the vacuum side (d) Centralized exhaust type ZF Exhaust pipe with enough capability ZP ZCU AMJ Misc. EXH Diagrams (a) to (d) show the combination with peripherals. 13-5-9 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

(For details, refer to catalog on page 22.) 17 Series SYJ500 Construction c f a e b d c f a e b d N.C. N.O.

Intrinsically Safe Valve

Electrical entry TT is approved for Class I, II, III, Division 1, Groups A, B, C, D, E, F, G. Electrical entry L and LL is approved for Class I, Division 1, Groups A, B, C, D. 4.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Note) Note) For the special voltages, please consult with SMC. 4-14-33 Base Mounted 34 Series VQZ100/200/300 How to Order Manifold: VQZ200/300 VV3QZ 2 5 08 C6 C D Series Option 2 3 VQZ200 VQZ300 Nil None DIN rail mounting style (With DIN rail in standard length) DIN rail mounting style (Without DIN rail ) External pilot specifications D DO R Note) Manifold Note) Order DIN rail separately.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

A L D VT KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 D VP Color: White VG VP L DIN rail 12.5 (Pitch) 5.25 7.5 AXT100-DR-l VQ Enter suffix the number from DIN rail dimensions table below.

ISO Standard (15552) Air Cylinder: Standard Type Double Acting, Single/Double Rod ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 CP96 Series

, 320, 400, 500 2000 40 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Intermediate strokes are available

Non-contact Gripper

C 2 x M depth ML 11.6 P depth PL Air supply port 4 x M depth ML 4 x M depth ML 16.5 16.5 16.5 D D D XT661-10A-(R, L) XT661-8A-(R, L) P depth PL Air supply port P depth PL Air supply port 45 45 45 45 P.C.D. C P.C.D. C 4 x M depth ML 4 x M depth ML 16.5 16.5 D D ZP3 (mm) ZP3E Part no.

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

240

0 Controller/Driver mounting LEC Nil Screw mounting D DIN rail mounting LEC S DIN rail is not included. Order it separately.

Thermo-con/Rack Mount Type

WO Edition D Safety Instructions Be sure to read the Handling Precautions for SMC Products (M-E03-3) and Operation Manual before use.

ISO Cylinder: Standard Double Acting, Single/Double Rod Series C96 ø32, ø40, ø50, ø63, ø80, ø100, ø125

80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 125 Intermediate strokes are available.