SMC Corporation of America
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P V RESET SET Approx. 500 (L: Approx. 2900) Section A Pressure supply port One-touch fitting Vacuum port One-touch fitting 2-5.4 Mounting hole Label MULTISTAGE EJECTOR 59.5 59 56 8.5 30 Section A with digital vacuum pressure switch 4.5 166 175 36 (N)ZL112-E (ZSE4) (N)ZL112-EB (ZSE4B) (N)ZL112-EE (ZSE4E) 28 (2) (1.6) 4-M4 x 0.7 Thread depth 8 (mounting hole) 59 85 8 Multistage Ejector Series

2 r w e i !0 !5 t u y Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MDHR2 !4 q !3 @0 o !2 !1 !9 w !8 i !6 !7 i e r !5 !0 y u t Component Parts Note Description Material Note Description Material No. q w e r t y No. !1 !

2 r w e i !0 !5 t u y MDHR2 q !4 !3 o @0 !2 !1 !9 w !8 i !6 i !7 e r !5 !0 t y u Component Parts Component Parts Description Material Description Material Note No. q w e r t y No. !1 !2 !3 !4 !5 !6 !7 !8 !

2 w y r u e !2 t i q o !0 !1 i q o !0 !1 Component Parts No. Material Note No.

Weight Material: NBR, Mounting: A [g] qWeight Difference by Mounting Style [g] ZHP63BMNA-C6S 184 ZHP80BMNA-C6S 224 ZHP63UMNA-C6S 167 ZHP80UMNA-C6S 175 B C D E F G H 20 5 14 7 25 1 11 wWeight Difference by Material [g] For the ZHPA-00 (without ejector), weight shown above 12 g.

5 y e o r q !0 !6 !5 y e o i r !9 r u e y o i q t !2 q !1 @0 !7 t !2 u !1 !7 !0 i !2 !7 !1 !5 !6 !0 t Component Parts Description Note Note Description No. Material Material No. U seal Body A NBR PBT q !2 Elbow body Cassette POM, Stainless steel PBT w !3 Seal Handle NBR PBT e !4 O-ring Body B NBR Stainless steel 303 r !5 O-ring Body B NBR Stainless steel 303 t !

Furthermore, the "90" and "180" designations of the rotary actuator bodies are approximate; they should be used for angle adjustments within 85 and 175, respectively. w All of the connecting port positions are on the body side. e The allowable kinetic energy is the same as that of the rotary actuator unit specifications. 0.2 to 0.7 MPa 0.15 to 1.0MPa 0.15 to 0.7MPa Operating press. range

However, one station is used for the E type. There is a maximum of 10 stations, including the control unit mounting stations. Notes Applicable valves and options Part No. Quantity Part No. Quantity Order no. Clerk (code no.) Branch code Please copy this page for use as needed. 34 Manifold Specification Sheet Series VQ7-8 1.

9 @0 @1 @2 Description Wearing Serrated washer Cushion seal Rod seal/Gasket Piston seal Cushion screw seal Cylinder tube gasket Piston gasket Magnet ring Material Note Description Aluminum alloy Aluminum alloy Aluminum alloy 1.4301stainless steel Aluminum alloy Rolled steel Rolled steel Lead bronze casting Steel Steel Steel Steel wire Steel No. q w e r t y u i o !0 !1 !2 !

P V RESET SET Approx. 500 (L: Approx. 2900) Section A Pressure supply port One-touch fitting 6 Vacuum port One-touch fitting 12 2-5.4 Mounting hole Label MULTISTAGE EJECTOR 59.5 59 56 8.5 30 Section A with digital vacuum pressure switch 4.5 166 175 36 ZL112-E (ZSE4) ZL112-EB (ZSE4B) ZL112-EE (ZSE4E) 28 (2) (1.6) 4-M4 x 0.7 Thread depth 8 (mounting hole) 59 85 5 Series ZL Dimensions/Series

g 105 g LCPPBT()HNBR() FKM()SiAuSUS()304 AWG26 0.50 mm 1.00 mm PVC 3.5 -56No.PF-OMJ0005CN-I CO2 3[V]12[mA] (15V) (420 mA) [mA] [V] [L/min] [L/min] PFM710--C/E 10(5) PFM710--D/F 10(5) PFM725--C/E 25(12.5) PFM725--D/F 25(12.5) PFM750--C/E 50(25) PFM750--D/F 50(25) PFM711--C/E 100(50) PFM711--D/F 100(50) ( )CO2 ( ) CO2 () 25[L/min] 10[L/min] [L/min] [L/min] 50[L/min] 100[L/min]

2 r w u e !5 y !9 u t MDHR3 !4 !3 q !1 @0 @1 w o e i !5 r !7 !6 t !8 !0 !2 i !9 y u MHZ Component Parts MHF Description Material Description Material Note Note No. No.

Model Max. rated flow Model Max. rated flow [L/min] [L/min] PFM710--C/E 10 (5) PFM710--D/F 10 (5) PFM725--C/E 25 (12.5) PFM725--D/F 25 (12.5) PFM750--C/E 50 (25) PFM750--D/F 50 (25) PFM711--C/E 100 (50) PFM711--D/F 100 (50) : ( ): Fluid: CO2 : ( ): Fluid: CO2 Flow adjustment needle revolution Flow characteristics (reference value) -57No.PF-OMJ0006-J Pressure loss (at 350 [kPa]) -58No.PF-OMJ0006

BJ6-016S (A set of a, b, d, e) D-H7C 8 9 D-M9m/M9mV D-M9mW/M9mWV D-M9mA/M9mAV 3 3.5 Switch bracket (Resin) Transparent (Nylon) Note 1) Band mounting c e Smooth Cylinders Low Speed Cylinders White (PBT) D-A9m/A9mV 6 6.5 Rail mounting D-A7m/A80/A7H/A80H D-A73C/A80C 8 9 d Switch holder (Zinc die-casted) b D-A79W 11 13 Auto switch mounting screw D-F7m/J79/F7mW/J79W D-F7mV/F7mWV/F79F D-J79C/F7BA

CJ1 CJP CJ2 CM2 C85 Component Parts CG1 No. q w e r t y No. u i o !0 !1 !

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

CJ216 16 15, 30, 45, 60, 75, 100, 125, 150, 175, 200 Air cushion is not available for 21-/22-.

. -8No.D-S-OMG0006-C Model Indication and How to Order Sensor unit : One sensor connector (e-con) is included in each package. : One sensor connector (e-con) is included in each package. Amplifier unit Accessories (Option) Product number Contents Remarks ZS-28-C-1 Sensor Connector (e-con) 1 pc. D-MS-A Mounting screw (M2.5 x 4 L, Steel (Black zinc chromate)) 1 pc.

116 134 167 174 G 0.7 90 78 97 96 111 138 144 Rod side 0.3 433 386 476 462 528 655 688 Head L Foot: side Frang flange e F 0.5 334 297 367 355 406 505 530 L G F 0.7 281 250 309 299 342 425 446 0.3 210 185 229 223 256 317 332 0.5 160 141 175 170 195 242 253 G 0.7 134 117 129 142 163 202 211 9 - OUT IN 5) Theoretical output Table 3.

5 Cylinder: Standard/Non-rotating Type Double Acting, Single/Double Rod Series C76 32, 40 How to Order CJ1 C Double acting Single rod K R2 76 J D E C A 32 100 CJP CJ2 C Double acting Double rod W 76 D E 32 100 C JJ B CM2 Auto switch mounting type CG1 Rail mounting Band mounting A B Built-in magnet MB None Built-in magnet Nil D Applicable auto switches and bands are shown on pages 6-10-45