VZ5000

Valve Body Ported Series VZ5000 Type 20 Manifold VV5Z5-20Station 1 (4(A), 2(B) port) 2n-Rc 1/8 Grommet (G), (H) (Pitch) 4-4.5 (Mounting hole) VK VZ VF VFR 6-Rc 1/8 (1(P), 3/5(R) port) PE port (Pilot EXH) VP4 VZS Manual override (Non-locking) G: 300 mm H: 600 mm VFS (Lead wire length) VS4 VQ7 EVS VFN (mm) Stations L1 L2 15 306 294 14 287 275 13 268 256 12 249 237 11 230 218 10 211 199 9 192 180

90

flats B A D C Port type 1 2 3 4 5 6 7 8 9 10 06 08 07 09 9.7 12.3 8.3 11.4 10.8 11.4 8.7 11.3 4 6 4.76 6 Metric size L1 L2 L3 L4 L5 L6 30 45 56.8 67.5 62.5 73 45 60 71.8 82.5 75 85.5 60 75 86.8 97.5 87.5 98 75 90 101.8 112.5 112.5 123 90 105 116.8 127.5 125 135.5 105 120 131.8 142.5 137.5 148 120 135 146.8 157.5 150 160.5 135 150 161.8 172.5 162.5 173 150 165 176.8 187.5 187.5 198 165 180

Rotary Actuator CRA1 Series Rack & Pinion Type/Size: 30, 50, 63, 80, 100

Note) Except size 30 Auto switch Rotating angle 90 90 180 180 100* 100 190* 190 Nil Without auto switch (Built-in magnet) * For applicable auto switch model, refer to the table below. * Flange type is not available for T, J, K. * T, J, K are made to order. Type * Except size 30 Nil Pneumatic H* Air-hydro Made to Order Refer to page 189. * Except size 30.

Compact Cylinder with Air Cushion Series RQ

Double clevis: Clevis pins, type C retaining ring for axis, and Body mounting bolts. 63 D80 -X 100 Individual -X Technical data 775 Series RQ Mass Basic Mass Additional Mass (g) (g) Bore size (mm) Magnet Both ends tapped style Bore size (mm) Standard stroke (mm) 25 6 12 8 181 180 171 127 32 11 6 26 17 143 180 165 151 100 35 45 175 116 20 5 6 4 159 143 137 92 40 13 6 27 17 155 214 198 196

Electric Actuator

46 6 20 Motor option: With lock Step motor Servo motor 33 40 5.5 M4 x 0.7 thread depth 7 (F.G. terminal) Cable length y 250 (152) 65 15 15 20 20 20 24 ( ) 0.025 0 20 Lock cable (3.5) 24 3H9 depth 3 n x 3.4 4 34 [mm] 40 100 D x 100 (= E) 8 Model L 297 339 397 439 497 539 597 639 A B n D E LEFS16;-100 LEFS16;-100B LEFS16;-200 LEFS16;-200B LEFS16;-300 LEFS16;-300B LEFS16;-400 LEFS16;-400B 180

Mechanically Jointed Rodless Cylinders

Guide for Using MY3M Side Support 200 (1200) 180 160 m 140 Weight W (kg) 120 MY3M63 l 100 (800) 80 MY3M40 60 (700) m l 40 MY3M25 (600) m 20 MY3M16 0 1000 2000 3000 4000 0 l l Support spacing l1 (mm) Note) A side support must be used to keep the spacing from exceeding the value inside the parentheses.

Air Slide Table Series MXS

Pressure (MPa) x Piston area (mm2) Mass (g) Model Standard stroke (mm) Additional mass of functional option Additional mass of adjuster option DAxial piping type S: Stroke (mm) With end lock With buffer Extension end Rubber stopper Retraction end Shock absorber 10 20 30 40 50 75 100 125 150 Extension end Retraction end MXS6 (L) MXS8 (L) MXS12 (L) MXS16 (L) MXS20 (L) MXS25 (L) 10 5 30 180

LVQ

G L (H) Pilot port Rc 1/8 (NPT 1/8) Threaded type N M C A B D (mm) LVQm0-Tm Dimensions (N.C. valve) A 25.5 B 46 C 31.5 D 58 E 33.6 F 56.5 G 12 H 111.5 J 21.8 K 37 L 5 M 7 N 15 P 31.3 Q 21 R 25.3 Model LVQ20-Tm LVQ30-Tm LVQ40-Tm LVQ50-Tm LVQ60-Tm 28.5 57 34.5 69 45.4 77 16.5 136 32 50 6 7 20 37.2 25 31.2 28.5 57 34.5 69 45.4 82.5 22 137 37.5 55.5 6 7 20 37.2 25 31.2 42 84 48 96 75 127 25 180

IDX-OM-W017

180 180 208 385 420 3 A 5 10 50 dB R134aHFC g 1505 2005 2305 2705 2905 3505 Rc3/8 Rc1/2 Rc3/4 Rc1 R3/8 R1/2 R3/4 R1 mm 10 12 kg 18 22 23 27 28 46 1ANR 2065% 2 330mA 4 () 6-1 IDFA Series 6 1 IDX-OM-W017 6 6-2 GWP (GWP) Regulation (EU) No 517/2014 IPCC AR4) R134a 1,430 1,430 R404A 3,922 3,920 R407C 1,774 1,770 R410A 2,088 2,090 (1) (2) IDFA Series 6-2 GWP 6 2 IDX-OM-W017

180 ° Angular Type Air Gripper Cam Type MHY2 Series ø 10, ø 16, ø 20, ø 25

180 Angular Type Air Gripper Cam Type MHY2 Series 10, 16, 20, 25 How to Order MHY 2 16 2 D M9BW Made to Order Refer to page 705 for details. Number of fingers Number of auto switches 2 2 fingers 2 pcs. Nil 1 pc. S Bore size n pc. n 10 10 mm Auto switch 16 16 mm 20 20 mm Nil Without auto switch (Built-in magnet) 25 25 mm For the applicable auto switch model, refer to the table below.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Station 2 52 43 Station 20 340 331 Station n L1 L2 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 41 Series SYJ5000 C6 N7 Type 42: Side Ported/SS5YJ5-42Stations -01, [ ]: AC C6 N7 Grommet (G) For 01 For (Built-in one-touch fitting 65.2 [67.4] Approx. 300 (Lead

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 L1 L2 Station 2 52 43 63 54 Station 20 340 331 369 360 3 68 59 80 71 4 84 75 97 88 5 100 91 114 105 6 116 107 131 122 7 132 123 148 139 8 148 139 165 156 9 164 155 182 173 10 180 171 199 190 11 196 187 216 207 12 212 203 233 224 13 228 219 250 241 14 244 235 267 258 15 260 251 284 275 16 276 267 301 292 17 292 283 318 309 18 308 299 335 326 19 324 315 352 343 Port size M5

Air Cylinder Series MB

25 89 37.5 50 75 100 125 102 114 127 152 177 202 51 25 12.5 25 150 227 89 37.5 50 75 100 125 102 114 127 152 177 202 51 25 12.5 25 150 227 37.5 50 75 100 125 101 114 126 139 164 189 214 56 29 12.5 25 150 239 175 200 264 289 37.5 50 75 100 125 101 114 126 139 164 189 214 61 29 12.5 25 150 239 175 200 264 289 125 10 75 27 20 30 40 60 80 100 120 130 140 150 170 190 210 120 230 270 140 160 180

5 Port Solenoid Valve Series SQ1000/2000

Pressure 34 or less 180 Metal seal 44 or less SQ2530 8.1 (0.45) 24VDC DC0.5W (21mA) Note) center 34 or less 175 Rubber seal 44 or less SQ2531 9.0 (0.5) Note) Value for the low power consumption (0.5W) specification 4 position Dual SQ2 31 A B C 34 or less 155 Rubber seal 44 or less 9.0 (0.5) 3 port valve Manifold Specifications Note 1) SQ1000 values are for cylinder port size C6.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Stations (Max. 20 stations) Equation L1=10.5n+9.5 L2=10.5n+22.5 L n 2 30.5 43.5 75 85.5 16 177.5 190.5 212.5 223 17 188 201 225 235.5 18 198.5 211.5 237.5 248 19 209 222 250 260.5 20 219.5 232.5 262.5 273 7 83 96 125 135.5 8 93.5 106.5 137.5 148 9 104 117 137.5 148 10 114.5 127.5 150 160.5 11 125 138 162.5 173 12 135.5 148.5 175 185.5 13 146 159 187.5 198 14 156.5 169.5 200 210.5 15 167 180

HRX-OM-W004

Time for monitoring the communication error 180 sec When the customer's device is sending messages every 60sec, if the communication cable is disconnected and no message is received for 180sec, the product generates AL29 communication error alarm to notify the error. This product Your system Write or read Monitoring time 60 sec. Write or read Monitoring time 60 sec. Passage of 180 sec.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Not in compliance with UL standards Flow Rate Characteristics Applicable Fluid Checklist Flow rate characteristics*1 Max. operating differential [MPa] Model Weight*2 [g] Air Water, Oil C b Cv Kv Conversion Cv Stainless steel body*3 Brass body 10 1/8 2.4 0.62 0.45 0.15 0.13 0.15 0.9 JSX11U-S Cm201 180 180 Applicable fluid Seal material NBR FKM EPDM Air V V V Water V V V Oil V Orifice diameter

Thermo-con/Rack Mount Type

242 279 379 429 64 0 201 180 180 145 130 105 27 0 0 Facility water outlet Rc3/8 Circulating fluid inlet Rc3/8 Label Circulating fluid outlet Rc3/8 Facility water inlet Rc3/8 1.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

unit EX600 Serial wiring with input/output unit EX120 Dedicated output serial wiring EX260 Dedicated output serial wiring For circular connector D-sub connector Flat ribbon cable IP67 IP67 (Manifold assembly) Dusttight (IP40) IP67 2 IP67 Dusttight (IP40) Dusttight (IP40) 1 Enclosure of a gateway unit and input manifold is IP65. 2 Enclosure is IP40 when the communication connector is D-sub. 180

Support Guide/11-LEFG Series

5.52 5.73 527 11-LEFG Series Dimensions: Ball Screw Drive 11-LEFG16-S 4 x M4 x 0.7 thread depth 6.4 3H9 (+0.025 0 ) depth 3 24 40 (72) 39.4 28 3.5 3H9 (+0.025 0 ) depth 3 (37) A (Table traveling distance) 36 L 7 7 27 40 40 33 (40) 21.7 20 n x 3.5 Vacuum port M5 x 0.8 x 5 34 B D x 100 (= E) 100 F Dimensions [mm] Model L A B n D E F 11-LEFG16-S-50 144 57 130 4 15 11-LEFG16-S-100 194 107 180