Nozzle Type Ionizer

mm x 150 mm, capacitance: 20 pF) as defined in the U.S.

PFxx-OMU0002

PF3A703H (For 3000 L/min) PF3A706H (For 6000 L/min) PF3A712H (For 12000 L/min) 74 No.PF-OMU0002-D Dimensions Symbol Models A B D E F H K L N PF3A703H 130 45 79.1 55.3 22.5 25 35 60 30 4 x M4 x 0.7 depth 7 PF3A706H 170 60 94.1 70.3 30 68 45 80 40 4 x M5 x 0.8 depth 8 PF3A712H 200 70 104.1 80.3 35 85 50 100 50 4 x M6 x 1.0 depth 9 75 No.PF-OMU0002-D Lead wire with M12 connector (ZS-37-A) Pin

High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

15

Auto Switch Proper Mounting Position (mm) A B C D Auto switch model D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 36.5 41.5 56.5 67 67 83.5 92.5 D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 17.5 17.5 17.5 18 18 19.5 18.5 D-A9 D-A9V D-M9 D-M9V D-M9W D-M9WV D-M9A D-M9AV 24.5 29.5 44.5 55 55 71.5 80.5 D-A9 D-A9V K dimension (Switch rail height) Bore

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

It is already built into the rectifier circuit. 2 200 VAC 50/60 Hz 110 VAC 50/60 Hz [115 VAC 50/60 Hz] 3 4 220 VAC 50/60 Hz [230 VAC 50/60 Hz] Electrical entry D With connector DIN terminal (Type D) DC specifications of type D and DO are only available with 12 and 24 VDC. Power saving circuit is not available for D or DO types.

•

Flat wi1h rib mm Model ;A ;B .c F:M5 x O .8 F:M6 x l F: }l 1 Y Model ;A ;B c F:M 6x l F :lJllxl251 F: ~ E Y D E . G .D. E G D E 0 D ..1 D Flat Flat wit. h rib ZPTIOg 10 ! 12 I 12 5 21 8 6 21 8 6.2 27 ZPT40g 40 43 18.5 6 8 6.2 32 6.5 3.3 2PTSOl!

Vacuum Module Series ZX

Note 2) M5: Suffix -4, M6: Suffix -1 Note 3) M5: Suffix -1, M6: Suffix -2 Adapter D P3200152-12 (M2.5 x 28) Philips screw ZF M2.5 x 12 Philips screw How to order (1) Valve unit (Supply valve: Air operated) (For replacement) Adapter D (2) Individual spacer R1 ZP M2.5 x 12 Philips screw Adapter D individual spacer R1 assembly Assembly no.

Suction Guard (Produced upon receipt of order) FHG Series

150 150 120 120 120 140 140 140 170 170 30 310 380 450 520 590 45 385 485 585 685 560 650 750 850 Fixed Connection part dimensions/ Companion flange Female threaded companion flange L-type block companion flange Differential pressure indication switch d Differential pressure indicator d (75) (50) E (Rc) L-type block Y P Z G Q N Y Y (mm) (mm) Port size Weight (kg) d N P Q Y (mm) Port size

SYJ3000/5000/7000

D type DIN connector with 9.4 mm pitch between terminals is not interchangeable. 3. DIN connector except D type has the N indication in the end of voltage symbol. In case of DIN connector without light, N is not indicated. Please refer to the name plate to distinguish. 4. Dimensions are completely the same as D type connector. 5.

VZ3000

VQ7 C4 C6 VZ3000-50A-1Manifold block assembly q (a) Bolt (Both sides) EVS For D side, With D-sub connector and P/R port with One-touch fitting for 8 SUP/EXH block assembly VZ3000-51A-1D w D side For U side, With D-sub connector and P/R port with One-touch fitting for 8 For D side, set with w VFN SUP/EXH block assembly VZ3000-51A-1U e DIN rail End block assembly VZ3000-52A-2D r VZ3000-52A-

LEKF-OMZ0035

Size Order no. 25 LE-D-6-2 14 32 LE-D-6-3 40 LE-D-6-4 -12- 3. Product Outline 3.1 System construction Refer to the Driver operation manual for system construction. 4.Elictric actuators / Common precautions 4.1 Wiring/Cables Warning 1. Adjustment, installation, inspection, or wiring changes should be conducted after the power supply to this product has been turned off.

ZX

D: Unit for replacement Ex.) If an adsorption confirmation switch is replaced for a vacuum switch on ZX1071-K15LZ-PBC, indicate as ZSE2-0X-15C-D. In this case, mounting screws P3270148-49 (2 pcs.) are required. If the unit is used on its own, not combined with others, D is not required. Ex.)

Turntable Cylinder Series MGT

1) D-Z8 type D-A9 type D-F9 type D-Y6 type Ball bushing D-Y7 type Note 1) Vertical outlet types cannot be mounted.

VZ1000

connector (Station n)(Station 1) VQ7 (mm) EVS 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 VFN U D VV4Z1-25FUStation -00C (2 to 10 stations) VV4Z1-25F Station B-00C (2 to 10 stations) VV4Z1-25F Station -00C (11 to 20 stations) U D D side

Manifold Specifications

VQ7 C4 C6 VZ3000-50A-1Manifold block assembly q (a) Bolt (Both sides) EVS For D side, With D-sub connector and P/R port with One-touch fitting for 8 SUP/EXH block assembly VZ3000-51A-1D w D side For U side, With D-sub connector and P/R port with One-touch fitting for 8 For D side, set with w VFN SUP/EXH block assembly VZ3000-51A-1U e DIN rail End block assembly VZ3000-52A-2D r VZ3000-52A-

Manifold Specifications

connector (Station n)(Station 1) VQ7 (mm) EVS 2 110.5 100 88 11.5 3 135.5 125 104 16 4 148 137.5 120 14 5 160.5 150 136 12.5 6 185.5 175 152 17 7 198 187.5 168 15 8 210.5 200 184 13.5 9 223 212.5 200 11.5 10 248 237.5 216 16 Stations L1 L2 L3 L4 VFN U D VV4Z1-25FUStation -00C (2 to 10 stations) VV4Z1-25F Station B-00C (2 to 10 stations) VV4Z1-25F Station -00C (11 to 20 stations) U D D side

ARM10/11

200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow

Compact Manifold Regulator

Flow rate L/min (ANR) Flow rate L/min (ANR) Condition: Inlet pressure 0.7 MPa ARM11AA1-310-1 (One-touch fittings: IN 8, OUT 6) Condition: Inlet pressure 0.5 MPa ARM11AA1-310 (One-touch fittings: IN 8, OUT 6) 0.35 0.7 0.6 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.5 0.25 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0.00 0 0 50 100 150 200 0 50 100 150 200 250 300 Flow rate L/min (ANR) Flow

ARM10/11

200 0 50 100 150 200 250 300 Flow rate /min(ANR) Flow rate /min(ANR) Condition: Inlet pressure 0.7MPa Condition: Inlet pressure 0.5MPa ARM11AA1-312 (One-touch fittings: IN 10, OUT 6) ARM11AA1-312-1 (One-touch fittings: IN 10, OUT 6) 0.6 0.7 0.30 0.35 Outlet pressure MPa Outlet pressure MPa 0.25 0.5 0.4 0.20 0.3 0.15 0.2 0.10 0.1 0.05 0 0.00 0 50 100 150 200 250 300 0 50 100 150 200 Flow

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

BBA1: D-A5/A6/F5/J5 types *"D-F5BAL" switch is set on the cylinder with the screws above when shipped. When a switch only is shipped, "BBA1" screws are attached.