High Vacuum L Type Valve

) KF (NW), K (DN) Main material Note 2) Body: aluminum alloy, Main part: SUS304 and FKM (standard sealant material) Surface treatment for body Outside: hard anodized Inside: basis material Actuation pressure MPa(G) 0.4 to 0.7 Air consumption cm3 Note 3) for 0.5MPa 31 61 220 390 680 1420 Solenoid valve SYJ319 SYJ519 Port size M5: Port1(P), 3(R) Rc1/8: Port1(P), M5: Port3(R) Weight kg 0.34

High Vacuum L Type Valve

oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1) 5 14 45 80 160 200 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Flange type KF (NW

Cylinder with Lock

100, 125, 160, 200, 250, 320, 400, 500 2000 50 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 63 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 2000 80 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 100 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 Ordering Example of Cylinder Assembly Cylinder model: CP96NDD50-100C-NW-M9BW

XLAQ/XLDQ

Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum Operating temperature (C) 5 to 60 (High-temperature type: 5 to 150) Atmospheric pressure to 1 x 10-6 Operating pressure (Pa) (abs) Conductance (L/s) Note 1) 5 14 45 80 Internal 1.3 x 10-10 at normal temperatures (in case of standard material, FKM), excluding gas permeation Leakage (Pam3/s) External Flange type KF (NW

Magnet: D (Built-in Magnet), Mounting: T (Head Trunnion), Type: N (Rubber Bumper), Bore: 63mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 125mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9PW--Solid State, 2-color Indication, 3

Magnet: D (Built-in Magnet), Mounting: U (Rod Trunnion), Type: A (Air Cushion), Bore: 63mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 125mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire

Magnet: Built-in, Mounting: Double Clevis, Bore: 16mm, Stroke: 125mm, Head Cover: Perpendicular to Axis, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Rail Mounting, Cushion:

Magnet: Built-in, Mounting: Double Clevis, Bore: 16mm, Stroke: 125mm, Head Cover: Perpendicular to Axis, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: 1m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Rail Mounting, Cushion

Magnet: Built-in, Mounting: Double Clevis, Bore: 16mm, Stroke: 125mm, Head Cover: Perpendicular to Axis, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Band Mounting, Cushion: Rubber

Magnet: Built-in Magnet, Mounting: Rod Trunnion, Type: Air Cushion, Bore: 63mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 125mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire

Magnet: D (Built-in Magnet), Mounting: T (Head Trunnion), Type: N (Rubber Bumper), Bore: 20mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 125mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire

Magnet: D (Built-in Magnet), Mounting: D (Clevis), Type: A (Air Cushion), Bore: 32mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 125mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal

Magnet: D (Built-in), Series: J2, Mounting: D (Double Clevis), Bore Size: 16mm, Stroke: 125mm, Cushion: Rubber Bumper, Head Cover Port Location: Perpendicular to Axis, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 2 pcs. (Or None

Magnet: D (Built-in), Series: J2, Mounting: D (Double Clevis), Bore Size: 16mm, Stroke: 125mm, Cushion: Rubber Bumper, Head Cover Port Location: Perpendicular to Axis, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9NW--Solid State, 2-color Indication, 3 Wire NPN, Horizontal, Lead Wire or Prewired Connector: M (1m), Number: 2 pcs.

Magnet: D (Built-in), Series: J2, Mounting: D (Double Clevis), Bore Size: 16mm, Stroke: 125mm, Cushion: Rubber Bumper, Head Cover Port Location: Perpendicular to Axis, Pivot Bracket: N (Pivot Bracket not Assembled), Rod End Bracket: W (Double Knuckle Joint), Auto Switch: M9BA--Solid State, Water Resist., 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m), Number: 2 pcs. (Or None

Magnet: Built-in Magnet, Mounting: Head Trunnion, Type: Rubber Bumper, Bore: 20mm, Port Thread Type: Rc (or M5, Depending on Style, Bore Size, and Thread Combination), Stroke: 125mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal,

Magnet: Built-in Magnet, Mounting: Head Trunnion, Type: Rubber Bumper, Bore: 63mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 125mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9PW--Solid State, 2-color Indication, 3 Wire PNP, Horizontal

Magnet: Built-in Magnet, Mounting: Clevis, Type: Air Cushion, Bore: 32mm, Port Thread Type: TN [NPT ø20 to ø100 Rubber Bumper, ø32 to ø100 Air Cushion), Stroke: 125mm, Thread: Male Rod End, Suffix for Cylinder: w/o Rod Boot, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewire

XLC-25,40 ∗ -F7NJ ∗ - ∗ Series

pressure Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1 14 45 Leakage Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperature, excluding gas permeation Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperature, excluding gas permeation Flange type KF(NW

XL-OMY0002

25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW