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U H with effective thread depth C 4-N through hole 8-O counter bore F F I 26 13 Connector auto switch 20 (22) D D Z M E 10 (11) Approx. U Min. bending radius of lead wire 10 Auto switch K M E J S B + Stroke L + Stroke L A + 2 strokes Note) The drawings above show type D-A7 and D-A8 reed switches. The values shown inside ( ) are for switches other than types D-A7 and D-A8.

20 10 20 6 10 20 10 20 10 20 10 20 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 LTF6 LTF8 P.2 Horizontal 10 10 P.10 Standard motor 6 6 P.18 Vertical 10 10 P.26 Frame-type linear guide LTF 6 6 P.34 Horizontal 10 10 P.42 Non-standard motor 6 6 P.50 Vertical 10 10 P.58 Options P.66 Construction P.67 Mounting P.68 Non-standard Motor Mounting P.69 Deflection Data P.71 Part Number Designations P 1 E

/www.smcpneumatics.ca (800) SMC.SMC1 (762-7621) e-mail: sales@smcusa.com For International inquires: www.smcworld.com 2012 SMC Corporation All Rights Reserved 11-E597 QT -RRD-5M Information AC Servo Motor Driver Series LECSm Power Supply Voltage 100 to 120 VAC 200 to 230 VAC Motor Capacity 100/200/400W Series LECSA (Pulse Input Type/Positioning Type) Incremental Type Absolute Type Up to 7

h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x 16 M8 x 1.25 x 16 188 176 M14 x 1.5 x 11.5 M12 x 1.25 x 7.5 192 180 0 26

Refer to gauge guide (P.94). r w q w q Sample Order Number Port 2P 4PL 01 S BP10 e r t 0 4 4 4 4 1 MPA e 2P 4PL qIN wOUT erGauge port (Inlet) Specifications BP1030 15 to 300 psig (0.1 to 2.1 MPa) BP1001 0.5 to 10 psig (0.0034 to 0.07 MPa) BP1002 1 to 30 psig (0.007 to 0.2 MPa) BP1006 2 to 60 psig (0.014 to 0.4 MPa) BP1010 5 to 100 psig (0.034 to 0.7 MPa) BP1020 15 to 200 psig (0.1 to 1.4

Welded Connection Series Back Pressure Regulator for Ultra High Purity Series BP1000 For UHP gas delivery Operating pressure: 0.5 to 300 psig (0.0034 to 2.1 MPa) Body material: 316L SS secondary remelt Hastelloy internals available for corrosion resistance How to Order Port Number q w e BP10 01 2PW FV4 FV4 S Bonnet option Operating pressure Code Bonnet Standard Panel Installation 3) Code

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

12.4 ) LED LED PWR CN2 STAT CN2(TB/PC ) BUS STAT IF ALM L ERR CC-Link L RUN CC-Link LED 10.LED ALM LED (7) 12.LEC 9 - 3. 3.1 DC24V10% 200mA () 300mA () (LEC ) 12 UL , UL1310 Class2 CC-Link CC-Link Version 2.0 4 8 ( 896 108word / 896 108word) 156k/625k/2.5M/5M/10Mbps NRZI (EIA RS485) HDLC 16+X 12+X 5+1) CRC(X CC-Link (bps) 156k 625k 2.5M 5M 10M (m) 1200 900

D G F C P J M N H K O L mm A B C D E F G H J K L M N O P IDFA60 R1 307 745 605 161 405 681 94 71 46 12.5 330 704 355 126 IDFA70 R1-1/2 342 890 825 176 480 905 68 365 849 390 81 20 IDFA80 R2 438 957 863 169 480 958 219 78 100 11.0 463 916 485 170 IDFA90 13 IDFA80 IDFA90 mm IDFA60 745 957 () () 704 916 () () 355 330 485 463 IDFA70 890 () 849 () 390 365 IDFA60/70/80/90 Series 7-3 IDX-OM-W094

60C (14 to 140F) (with no freezing) Non-lube Lubrication 50 to 700mm/s (2 to 27.5in/s) Piston speed +1.4 0 +1.0 0 Stroke length tolerance to 250 , 251 to 1000 mm Rubber bumper Cushion JIS class 2 Thread tolerance 1/4 1/4 1/4 Port size Standard strokes Bore size (mm) Standard strokes (mm) Long strokes (mm) 75, 100, 125, 150, 175 350, 400, 450, 500, 600 40, 50, 63 200, 250, 300 700, 800, 900

Motorless Type Electric Actuator/Slider Type Ball Screw Drive LEFS Series LEFS25, 32, 40 How to Order LEFS 100 A 25 q e y NZ w r t H R q Accuracy r Motor type e Motor mounting position y Stroke [mm] t Lead [mm] Nil Basic type H High precision type 50 50 to to 1200 1200 Nil In-line R Right side parallel L Left side parallel Symbol LEFS25 LEFS32 LEFS40 H 20 24 30 A 12 16 20 B 6 8 10 Symbol

Electric Actuator/Guide Rod Slider Belt Drive RoHS Step Motor (Servo/24 VDC) LEL25 Series LEL LEL LECP6 LECP1 Model Selection Step Motor (Servo/24 VDC) Specific Product Precautions How to Order LEL 25 100 M T 1 1 6N q w e r t y !1 u i o !

1 ARM Diaphragm (B) e w r y Exhaust Bleed w ARP Diaphragm (C) SUP(1) OUT(2) SUP(1) OUT(2) OUT(2) SUP(1) Exhaust Valve IR u !0 !0 !2 t r !

Bit 3 of SW2 SW1 Station Address Bit 3 of SW2 SW1 Station Address OFF 0 Disabled ON 0 50H OFF 1 41H ON 1 51H OFF 2 42H ON 2 52H OFF 3 43H ON 3 53H OFF 4 44H ON 4 54H OFF 5 45H ON 5 55H OFF 6 46H ON 6 56H OFF 7 47H ON 7 57H OFF 8 48H ON 8 58H OFF 9 49H ON 9 59H OFF A 4AH ON A 5AH OFF B 4BH ON B 5BH OFF C 4CH ON C 5CH OFF D 4DH ON D 5DH OFF E 4EH ON E 5EH OFF F 4FH ON F 5FH Turn the power

F G H J K L M N P IDF22E R1 775 6001 IDF37E R11/2 855 6801 85 340 (698) (93) 46 25 290 623 (134) (405) 13 314 IDF55E, IDF75E Guige Guige 10 (10, 1m 1m) 4-13 17 (911)[] mm A B C D E F G H J K L M N P Q R IDF55E 800 (868) IDF75E 900 (968) 526 (250) 5195 13 500 75 7001 (455) (110) 36 50 R2 470 855 (128) IDF Series 6-3 6 2 IDX-OM-W026 6 6-4 IDF22E-20, IDF37E-20 IDF22E-30, IDF37E-30 GFCI

7.1 Specifications Models Specification IDFA60-23 IDFA70-23 IDFA80-23 IDFA90-23 Fluid Compressed air Operati Inlet air temperature oC 5 to 65 ng range Inlet air pressure MPa 0.15 to 1.0 (Note 3) (Note 1) Ambient temperature (Humidity) oC 2 to 45 (Relative humidity 85 % or less) Outlet air 3 oC 204 312 552 810 pressure dew Standard condition (ANR) (Note 2) point Outlet air 7 oC 300 408 654 900

port size Rc 1/4 M5 x 0.8 Rc 1/8 DStandard Stroke -X Bore size (mm) Long stroke (mm) Standard stroke (mm) Model Bearing type 20JIS Symbol 20 25 32 75, 100, 125, 150, 200 250, 300, 350, 400 MGCM Slide bearing Data 350, 400, 450, 500 350, 400, 450, 500, 600 75, 100, 125, 150, 350, 400, 450, 500, 600, 40 200, 250, 300 Ball bushing bearing 700, 800 MGCL 350, 400, 450, 500, 600, 50 700, 800, 900

When there are large quantities of dust (solid foreign matter), install an air filter or main line filter to the inlet side of the mist separator. e. Install a regulator on the outlet side of the membrane air dryer. Dehumidification performance will be reduced if a regulator is a regulator is installed on the inlet side of the membrane dryer. f.

EX122-SMJ1 SY3000/5000 EX124U/D-SMJ1 VQ2000/4000/5000 IP65 Plug-in SY3000/5000/7000 SV1000/2000/3000 VQC1000/2000/4000 Direct EX126D-SMJ1 IP67 -31No.EX-OMB0014-H Dimensions EX120-SMJ1 EX121-SMJ1 -32No.EX-OMB0014-H EX122-SMJ1 EX124D/U-SMJ1 -33No.EX-OMB0014-H EX126D-SMJ1 -34No.EX-OMB0014-H Revision history C: Complete revision D: Terminal screw change Switch cover change (EX124U/D, EX126D) E: