VCL

A B C D E F G H J L Port size Valve model VCS21 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCS31 VCW30-12-04A 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04A 1/2 VCS41 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting

Vacuum Pad

(per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Lateral A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 ZP3-Y015U:J3-B3 ZP3-Y015U:J6-B3 ZP3-Y015U:K3-B3 ZP3-Y015U:K6-B3 ZP3-Y02U:J3-B3 ZP3-Y02U:J6-B3 ZP3-Y02U:K3-B3 ZP3-Y02U:K6-B3 Note)

Vacuum Pad

(per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Lateral A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 ZP3-Y015U:J3-B3 ZP3-Y015U:J6-B3 ZP3-Y015U:K3-B3 ZP3-Y015U:K6-B3 ZP3-Y02U:J3-B3 ZP3-Y02U:J6-B3 ZP3-Y02U:K3-B3 ZP3-Y02U:K6-B3 Note)

Vacuum Pad

(per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Dimensions (per stroke) Model Weight (g) Lateral A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 A 17 20 B 34 40.5 D 11 14.5 11.0 12.2 A 17 20 B 30 37 D 10 14 7.7 8.6 ZP3-Y015U:J3-B3 ZP3-Y015U:J6-B3 ZP3-Y015U:K3-B3 ZP3-Y015U:K6-B3 ZP3-Y02U:J3-B3 ZP3-Y02U:J6-B3 ZP3-Y02U:K3-B3 ZP3-Y02U:K6-B3 Note)

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

B B B B 19 P 40 39 P 35 A A A A A 19 2 MAX.5 10 10 (Lead wire length) G : About 300 H : About 600 24.5 (Pitch) P=10.5 10.5 (Mounting holes) L2 4 L1 (Non-locking) Manual override A A 20 48.5 [55] 15 B B 5 36.1 1.5 29.5 A A (Pitch) P=10.5 17.5 2n-One-touch fitting (A, B port) 20 15 B B 5 1.5 2n-M5 0.8 (A, B port) (Pitch) P=10.5 15.7 Other dimensions are the same as the M5T.

Hydraulic Filters

N.C. and N.O. common 2 x Rc (d) Removal dimension G INLET INLET B C E (F) B N COM. N.O. N.C.

100

/set 14 ZL1 Series Dimensions ZL112A(N)(-B) Valve (Without supply valve or release valve) 2 x 5.3 Mounting hole ( ) Recommended tightening torque: 1.2 to 1.5 Nm 53.2 114 Vacuum (V) port Applicable tubing O.D. B Air pressure supply (P) port Applicable tubing O.D.

Digital Flow Switch ( compatible)

Name Lead wire colour Function 1 L+ Brown 18 to 30 VDC 2 N.C.

OMR0032

30 [V] 100 Peak voltage b) Circuit (class 2) with maximum 30 Vrms (42.4 V peak) or less, which uses a class 2 power supply unit in accordance with UL1310 or class 2 transformer in accordance with UL 1585 as the power supply 17.5 Grounding Warning 1.

Rotary Table/Vane Style Series MSU

For 90 rotation Single vane (S): 80 to 100 adjustable Double vane (D): 85 to 95 adjustable A B 180 Adjustment range of adjustment bolt (A) Adjustment range of adjustment bolt (B) 10 10 22.5 DSize Allowable radial load (N) Allowable thrust load (N) Allowable moment (Nm) 1 10 15 20 0.3 A B Positioning pin hole 3 15 30 40 0.7 Adjustment bolt (A) Adjustment bolt (B) 7 30 60 50 0.9 20 For 180

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Hs Auto switch 12 15 Reed switches D-B5, D-B6 22.5 B A 33 113 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW Proper auto switch mounting positions (mm) D-F5F D-A5, D-A6 D-A3, D-A44 D-G39, D-K39 D-A59W D-F5, D-J5 D-F5W, D-J5W D-F5BAL D-F5NTL D-B5, D-B64 Auto switch types D-B59W Bore size (mm) A A A B A A A B A B B B B B 40 21 10.5 14 11.5 14.5 17 22 23 11

JXCx-OMU0026

cable Orange 9 B B-6 Black 8 B A-6 3 Actuator side Controller side (14.2) (b) 2 1 (8) (a) B 1 A1 (14) B1 (17.7) 6 5 (c) 2 1 (18) A6 B6 15 16 L (11) (30.7) 12.4 Actuator cable (8-20m) (a) (b) L E C P Signal name Terminal Cable colour Terminal number number Brown 2 A B-1 Red 1 A A-1 Cable length [L] Orange 6 B B-2 8 8mNote) Yellow 5 B A-2 Green 3 COM-A/COM B-3 A 10mNote) Blue 4 COM-B/ A-3

Precautions 1

Height D-M9 D-M9W D-A9 Reed auto switch Solid state auto switch 16.5 16.5 B A Hs Hs B A 22 22 (24.5) ( ): For D-A93 type D-H7/H7W/H7NF D-C7/C8 8.5 16 16 29 Hs Hs 26 B A B A D-B5/B6/B59W D-G5NTL 12 24.5 24.5 Hs B A 33 Hs 33 A B D-H7C D-C73C/C80C CV MVGQ 16 16 Hs Hs B A 36.7 B A 36.7 Auto Switch Proper Mounting Position (Detection at Stroke End) and Mounting Height Auto Switch Proper

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

Compact Type Dual-Rod Cylinder Series CXSJ

Bore size/Stroke (mm) Bore size 6 10 15 20 25 32 Standard strokes 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switches/Refer to page 15 for detailed auto switch specifications.

HRX-OM-X071

This produuct Your system Circulating fluid temperature 30 Serial communication Discharge temperature 31 Circulating fluid display temperature 30 Heat radiation Circulating fluid set 1 temperature 30 Offset temperature 30 1 To switch the offset mode, press the [ENT] key. "OFF" flashes, press the [], [] key, select "OFF", "MD1", "MD2", "MD3" and confirm with [ENT] key.

EX120/121/122

EX510-VSS EX510-VSQ L 20 20 L 20 20 2.8 2.8 B C A How to Order EX510-V + 10 S S EX510-VWS EX510-VWQ Output Valve connector L 20 20 L 20 20 S W 1 point 2 points Nil S Q None For SY, SYJ series For VQ, VQZ series Note) Cable length (L) 2.8 2.8 10 30 1 m 3 m B C A + Note) VQ is compatible with the positive common only.

CLQ

locking Double end taps 63 80 100 Features 2 Compact Cylinder with lock Double Acting: Single Rod Series CLQ 20, 25, 32, 40, 50, 63, 80, 100 How to Order B 40 30 D F CLQ Without Auto Switch B 40 30 D F A73 S CDLQ With Auto Switch Number of auto switches With auto switch (built-in magnet) Nil S n 2 pcs. 1 pc.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

(PT)1/8 Width across flats 13 Additional dimensions by stroke (mm) H I J Stroke M14 x 1 20 +10 +38 6.2 +28 Width across flats 19 30 +20 +48 40 +30 +84 5 5 D C +54 50 +40 +94 I J Width across flats 7 Width across flats 12 M8 x 1.25 H F Width across flats 12 Width across flats 3 3 2 A B With a stroke of 20 to 50mm Dimensions/10mm stroke A (mm) B C D F H I J Model ZPT20F10-B01-A14 20 22 12.5

%silltr

Supply NC output NO output Exhaust of NC exhaust of NO Pilot tor NC Pilot for NO P A B R s z Y P A B R1 R2 z Y P A B EA EB PA PB 1 2 4 3 5 12 1 4 Table 7.2 Typical port identitications M O N O S T A B L E A N D B I S T A B L E Spring returned valves are monostable. They have a defined prefened position to which they automatically retum.