Vacuum Filter AFJ Series

AFJ40-04-80-T 6 6 4 4 2 2 Water drop removal type Nominal filtration rating: 80 m Large flow type Nominal filtration rating: 80 m 0 0 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min(ANR)] 0 100 200 300 400 500 600 800 700 900 Flow rate [L/min (ANR)] 783 AFJ20 to AFJ40 Series Construction AFJ20 AFJ30, AFJ40 OUT IN OUT IN q q r r w w (y) e (y) t e t Component Parts No.

HRS100/150

V : 150 [L] Cooled substance specific heat C : 1.0 x 103 [cal/(kgfC)] HRS 100/150 HRS 100/150 HRSH 090 HRSH Cooled substance temperature when cooling begins T0 : 30 [C] Cooled substance temperature after t hour Tt : 20 [C] Cooling temperature difference iT : 10 [C] (= T0 Tt) Cooling time it : 15 [min] Conversion factor: hours to minutes : 60 [min/h] Conversion factor: kcal/h to kW : 860

SFOD-OMT0009CN

-COM1-COM2 (b) I/O 2 20K (a) +COM3+COM4 (c (b) BUSY1BUSY4 AREA1AREA4 INP1 ) INP4*ALARM1 *ALARM4 (c) -COM3-COM4 -PNP I/O 1 (a) +COM1+COM2 (b) OUT0 OUT8 BUSY AREA SETON (a) INPSVRE *ESTOP*ALARM (c) -COM1-COM2 10K I/O 2 (b) 4.7K (a) +COM3+COM4 (c) BUSY1 BUSY4AREA1 AREA4 (b) INP1 INP4 *ALARM1 *ALARM4 (c) -COM3-COM4 37 No.SFOD-OMT0009CN-B 6.3 No.

Thermo-chiller

Q = qm x C x (T2 T1) x qv x C X T 1 x 35 x 4.186 x 103 x 3.0 60 = = 60 qm x C x (T2 T1) 860 Q = = 7325 [J/s] 7325 [W] = 7.3 [kW] x qv x 60 x C x T = Cooling capacity = Considering a safety factor of 20%, 7.3 [kW] x 1.2 = 860 8.8 [kW] 1 x 35 x 60 x 1.0 x 103 x 3.0 860 = Thermo-chiller qv: Circulating fluid flow rate Q: Heat generation amount T2: Return temperature Users equipment 7325

Thermo-con/Rack Mount Type

500 400 300 200 100 0 1000 900 800 700 600 500 400 300 200 100 0 Heating capacity [W] Heating capacity [W] Ambient temperature 35C Ambient temperature 25C Ambient temperature 25C Ambient temperature 15C Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 HECR004-A Circulating fluid: Tap water Circulating fluid: Ethylene glycol

Table of Contents

2 U seal Retaining ring for hole type C HNBR Tool steel y !

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

B 55 A A B Section BB Long stroke type Coupling H S LJ1H202 C-700 to 1000LJ1H202SC-700 to 120010.5 35.3 P.C.D Thread Motor 8 30 26 32 13 Section AA (Housing interior) Motor mounting area detail Series LJ1H S30 Motor mounting area dimensions Mitsubishi Electric Corporation Yaskawa Electric Corporation Manufacturer Matsushita Electric Industrial Co., Ltd.

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

P When mounted on the manifold, the common exhaust discharges the pilot and main valve exhaust through a common exhaust port to enable simple exhausting. 700 B 600 Max.operating speed (mm/s) Piping length1m JIS Symbol B A 500 Piping length5m A D SY (Single) 400 R P SYJ C 300 SX How to order valve with built-in speed controller SYJ5l 5l--lll l--l 200 VK Port size VZ 100 Config.

Sine Rodless Cylinder Series REA

, 800 25 4000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 32 5000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 40 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 6000 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 63 Note1) Contact P/A in case of a stroke length beyond the maximum.

CC

Data A Volume of cylinder/Capacity of converter 180 160 140 125 100 300 250 800 700 600 How to Select 200 10,000 8,000 6,000 5,000 4,000 3,000 500 400 qSelect the bore size of air-hydro cylinder 80 First of all, select a bore size from data .

RSH/RS1H

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

RSH/RS1H

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

Compact Type

A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38

Compact Type Dual-Rod Cylinder Series CXSJ

A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38

3 Port Air Operated Valve Series SYJA300

Prefix it to the part nos. of the solenoid valve, etc. 5-4-6 3 Port Air Operated Valve Series SYJA500/700 Specifications Fluid Operating pressure range (MPa) Pilot pressure range (MPa) Note 1) Air 0.15 to 0.7 (0.4 x P + 0.1) to 0.7 P: Operating pressure range Ambient and fluid temperature (C) Lubrication Mounting orientation Impact/Vibration resistance (m/s2) Note 2) 10 to 50 (No freezing

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

C side parallelism to A side D M D side parallelism to B side B W A Port C MX M MTS B Distance from 0 of gauge dial when guide block is moved to full stroke after body is fixed on a base.

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Standard stroke -X Bore size (mm) Standard stroke (mm) Piping port location 15, 32 100, 150, 200, 250, 300, 350 400, 450, 500, 600, 700 Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left Operating direction: Right Operating direction: Left a b c d e f g h 20Nil Note 1) Please consult

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Slide table Cylinder tube Special cylinder tube Long stroke (Max. 700 mm) A special cylinder tube using extruded aluminum material is employed.

Heavy Duty Stopper Cylinder

1,000 900 800 700 600 500 400 300 200 100 0 1,000 900 800 700 600 500 400 300 200 100 0 Mass of transferred object m [kg] Mass of transferred object m [kg] Upper limit 80 Operating range 80 Operating range Upper limit Lower limit Lower limit 10 20 30 40 0 10 20 30 40 0 Transfer speed [m/min] Transfer speed [m/min] 592 Model Selection RS2H Series Lateral Load and Operating Pressure The greater

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2