Series IDG

Performance Charts IDG1 IDG3 P1 = 0.3MPa Outlet air atmospheric pressure dew point C 0 0 Outlet air atmospheric pressure dew point C P1 = 0.3MPa P1 = 0.5MPa P1 = 0.5MPa 10 10 20 20 P1 = 0.7MPa P1 = 0.7MPa 30 30 40 40 4 8 12 16 0 10 20 30 40 0 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG10 IDG5 P1 = 0.3MPa P1 = 0.3MPa 0 0 Outlet air atmospheric pressure dew point C

LV50-OMQ0002

(at 80 mA load current) Response time *5 *7 0.25 s/0.5 s/1 s/2 s/5 s Outputprotection Short circuit protection Output Mode Select from Hysteresis mode, Window comparator mode, Accumulated output mode or Accumulated pulse output mode Response time*6*7 0.25 s/0.5 s/1 s/2 s/5 s Analogue output Voltage output Output voltage: 1 to 5V (Output impedance approx. 1k) Current output Output current

E-P HYREG ® Series VY1 1

F .S. 3% F .S. 5% F .S.

PSE550/300

(Not including sensor accuracy), Response time: 150 ms or less Accuracy (To display value) (25C) 1.0% F .S. or less 1.5% F .S. or less 2.0% F .S. or less PF2 0.5% F .S.

Air Slide Table Long Stroke Type Series MXY ø6, ø8, ø12 1

weight W kg 1.5 Metal stopper screw 3 1.0 1 100 50 200 300 400 560 2 100 50 200 300 400 500 Average speed Va mm/s Collision speed V mm/s 0.5 Average speed Va mm/s 0.0 Collision speed V mm/s 0 100 200 300 400 500 280 560 Note) Use the average speed when calculating static moment.

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

TR d d W D E E D TY W TDe8 MA a MA a C NA F K A A K F NA B H S + Stroke H + Stroke TX 0 -0.5 ZZ + 2 strokes TZ (mm) Bore size (mm) TR A a B C d E F G GA J K M MA MM NA P R S T D TDe8 H 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 -0.032 -0.059 -0.032 -0.059 -0.032 -0.059 -0.040 -0.073 -0.050 -0.089 -0.050 -0.089

HRX-OM-W060

Indication Item Output Setting, selection and display CH1 circulating fluid temperature 0C to 100C: 0 to 10 V CH2 circulating fluid Analog temperature 0C to 100C: 0 to 10 V (1) Analog output signal 1 Output 1 CH2 electrical conductivity 0.1 to 50.0 S/cm: 0.02 to 10.0 V CH1 circulating fluid temperature 0C to 100C: 0 to 10 V Analog CH2 circulating fluid temperature 0C to 100C: 0 to 10 V (2

Air Slide Table Series MXQ

C side perpendicularity to A side 0.05mm End Lock Type Specifications M dimension tolerance 0.08mm (0.1mm)1 W dimension tolerance 0.1mm 4 to 0 4 to 0 6 to 0 14 to 0 Radial internal clearance (m) 10 to 0 12 to 0 MXQ8 MXQ25 MXQ12 MXQ16 MXQ20 Model 1 0.1mm for 75mm or longer stroke Cylinder bore size (mm) 8 12 25 16 20 Operating speed range 50 to 500mm/s B side parallelism to A side Table

HRX-OM-Y098

range Circulating fluid return 0.1 10 0 0 0 2 4 6 8 10 12 14 16 18 20 Circulating fluid flow [L/min] It is available in case of Pressure control mode or Set output mode.

Cylinder with Lock Series MNB

+0.058 0 +0.070 0 +0.084 0 +0.084 0 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 +0.30 +0.10 Note) Pin, cotter pin and plain washer are included with the double knuckle joint. +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 -0.10 -0.30 11

LVQ

T) View Z Dimensions (N.O valve, double acting valve) (mm) A B C D M N T U V Model LVQ2 -S-2 LVQ3 -S-2 LVQ4 -S-2 LVQ5 -S-2 LVQ6 -S-2 2 1 25.5 46 31.5 58 7 15 35.3 10.6 7 2 1 23.5 47 29.5 59 7 15 36.9 16.5 10 2 1 23.5 47 29.5 59 7 20 37.9 22 2 1 17 35 70 41 82 7 20 64 25 2 1 35 70 41 82 7 20 66 32 17-5-72 11 Space Saving/Space Saving Connection Series LVQ How to Order VC LVQ 2 0 S 07 S VDW

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

1(0) 2(0) 7 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66 70 Hs 69.5 72 75.5 79.5 Bore (mm) 20 25 32 40 4.5(2.5) 3.5(1.5) 2.5(0.5) 4.5(2.5) 3.5(1.5) 2.5(0.5) MGF 2.5(0.5) 7.5

RB/RBL/RBQ

0 !

LFE-OMY0008

[F 1] OUT1 33 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 49 34 No.LFE*-OMY0008 H_1(H_2) H_1(H_2) H_1(H_2) H_1(H_2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) H1(H2) 0 0 0 0 ON ON ON ON 0 0 0 0 0 0 0 0 ON ON ON ON 35 No.LFE*-OMY0008 [F 2] OUT2

MXH Series Compact Slide

2 Maximum speed 300(mm/s) or less 10 1 20 16 0.1 10 6 0.01 20 40 60 80 100 0 Overhang L(mm) 1 kg = 2.2046 lb 28 Compact Slide MXH Series Model Selection Method Selection Graphs 4 to 12 (Horizontal Mounting) Maximum speed 100mm/s or less Maximum speed 300mm/s or less Maximum speed 500mm/s or less Graph 4 Load eccentricity 50mm Graph 7 Load eccentricity 50mm Graph 10 Load eccentricity 50mm

Electric Actuator / Slider Type 《 AC Servo Motor 》

Initial value Recommended value Regenerative option PA02 0 0(Non) / 0002(LEC-MR-RB-032) Rotation direction selection PA14 0 1(+Counter motors side) Adaptive tuning mode PB01 0 0 Load to motor inertia moment ratio PB06 7 7 Machine resonance suppression filter 1 PB13 4500 4500 Notch shape selection 1 PB14 0 0 LECSS LEFB25 LEFB25U LEFB32 LEFB32U LEFB40 LEFB40U Lead symbol S Series Lead 54 Parameter

Ionizer Nozzle type IZN10 Series IZS

Also, regularly check there is no deterioration due to ozone. 444 Technical Data IZN10 Series Blow Velocity Distribution (Supply Pressure: 0.3 MPa) IZS (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 IZN IZN IZF ZVB IZD IZE IZH 0 0 100 100 200 200 Distance [mm] Distance [mm] 3 [m/s] 14 [m/s] 300 300 2 [m/s] 11 [m/s] 400 400 1 [m/s] 9 [m/s] 500 30

VM

(Except for push-pull) 3.5-40 VZM500 How to Order S 01 01 0 VZM55 Suffix of actuator Foot bracket Option F Actuator G B Red Hard steel roller R S Port size Basic Roller lever One way roller lever Straight plunger Roller plunger Toggle lever Push button (Mushroom) Push button (Extended) Push button (Flash) Twist selector (2 position) Key selector (2 position) 00 01 02 05 06 08 30 32 33 34

MXW Series Long Stroke Slide Table

A F L=200mm F F L=200mm A L L L L=200mm A MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 MXW8, MXW12, MXW16 0.03 0.03 0.10 MXW12 MXW8 MXW16 MXW12 MXW8 MXW16 0.08 Table deflection quantity mm Table deflection quantity mm Table deflection quantity mm MXW12 MXW8 MXW16 0.02 0.02 0.06 0.04 0.01 0.01 0.02 0 0 0 100 75 50 25 100 20 40 60 75 50 25 Load N 1N = 0.2248 lbf Load N 1N = 0.2248 lbf Load N 1N =

High Power Cylinder:

[mm] 300 100 200 50 100 50mm/s 20 25 32 40 0 1.0 0 2.0 10 Time [s] Cylinder size [mm] 4.10-2 Series RHC low/medium speed opration with heavy loads 20 , 25 , 32 , 40 Cushion Ring MK/MK2 RSQ/RSG The long cushion ring can absorb larger energy (in terms of speed and weight).