Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: VA (CC-Link - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: D (D Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: B (DIN Rail Mounting, Name Plate, w/o Station

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: D (D Side), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: DB (EtherCAT - 16 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: U (U Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: A (DIN Rail Mounting, Name Plate, w/Station

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: VB (CC-Link - 16 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: D (D Side), SUP/EXH Block: Internal Pilot, A, B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate, w/o Station Number)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: VB (CC-Link - 16 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: D (D Side), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate, w/o Station Number)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: VB (CC-Link - 16 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: D (D Side), SUP/EXH Block: Internal Pilot, A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: A (DIN Rail Mounting, Name Plate, w/Station Number), DIN Rail Option:

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: U (U Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting), Mounting: A (DIN Rail Mounting, Name Plate, w/

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: DA (EtherCAT - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: EB (EtherNet/IPâ„¢ - 16 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: D (D Side), SUP/EXH Block: R (External Pilot), A, B Port Size: C6 (ø6 One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: VB (CC-Link - 16 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: Internal Pilot, A, B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate, w/o Station Number)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: DB (EtherCAT - 16 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate, w/o

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: FA (PROFINET - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: D (D Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting)

Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: EA (EtherNet/IPâ„¢ - 32 Outputs - Connector M12), SI Unit Output Polarity: N (PNP), Valve Stations: 04 Stations, P, E Port Location: U (U Side), SUP/EXH Block: S (Internal Pilot, Built-in Silencer), A, B Port Size: C6 (ø6 One-touch Fitting), Mounting: AA (Direct Mounting, Name Plate w/Station

ASR/ASQ (PFC/QFC valve) can reduce air consumption by 25%. The PFC control valve has a pressure adjustment and speed control function.The QFC control valve offers a high speed exhaust and cylinder speedcontrol function. Series ASR/ASQ with one-touch fitting (Pressure/Flow valve),can reduce air consumption by 40%. The pressure valve has a regulator withcheck valve, plus speed controller.

PFMB.eng

PFMB7201 : If the error cannot be reset after the above measures are taken, then please contact SMC. [ inP] External input 3 [F20] [r AC] Accumulated flow external reset G1/4 21 mm PFMB7501 Mounting screws Screw is prepared by customer.

PFMC.eng

[H_2] Hysteresis of OUT2 [ inP] External input 3 [REACUM] Accumulated flow external reset 25 50 100 [F20] Accumulated flow error Do not touch the terminals and connectors while the power is on. Otherwise electric shock, malfunction or damage to the product can result.

PF3W7.eng

[F20] Setting of external input Accumulated flow external reset Free range analogue output for instantaneous flow: OFF * (Analogue output for fluid temperature) Temperature lower limit exceeded The fluid temperature is below -10 oC. Rise the fluid temperature. Avoid any sealing tape getting inside the piping. Ensure there is no leakage from loose piping.

PF3W3.eng

Panel mount adapter (Part number: ZS-26-B) Front protective cover (Part number: ZS-26-01) [F20] Setting of external input Accumulated flow external reset [F22] Setting of analogue output Free range analogue output for instantaneous flow: OFF * Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids.

SL5200

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

CS1

Foot CS1-L12 CS1-L14 CS1-L16 CS1-L18 CS1-L20 CS1-L25 CS1-L30 Flange CS1-F12 CS1-F14 CS1-F16 CS1-F18 CS1-F20 CS1-F25 CS1-F30 Single clevis CS1-C12 CS1-C14 CS1-C16 CS1-C18 CS1-C20 CS1-C25 CS1-C30 Double clevis CS1-D12 CS1-D14 CS1-D16 CS1-D18 CS1-D20 CS1-D25 CS1-D30 Order 2 foot brackets for one cylinder.