High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

A B C A B A B A B A B Application Same tubing size 1 2 1 2 1 2 3 1 2 1 2 1 2 Refer to the applicable tubing table.

Flow Control Equipment

Metric size 23 04 06 08 10 12 Inch size With One-touch fittings 3.2 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 4 6 8 10 12 Use 1/8" tubing. 4.1-9 Series TMH Holder Specifications A holder for securing a speed controller (in-line style) with a One-touch fitting. 20 to 60C Ambient temperature Material Polypropylene White Color Accessory: Round head Phillips screw for mounting

LVQ

T) LVA V LVH M N LVD LVQ30, LVQ50 V SMC LVQ SMC B A SMC C LQ B A U D LVN Z (Max. T) TI/ TIL PA M N PAX LVQ40, LVQ60 PB C B A D (Max.

3 Port Air Operated Valve

SYJA 2(A) 2(A) Standard VZA (P)1 3(R) (P)1 3(R) i VFA 2(A) 2(A) 2(A) 3(R) VFRA o For vacuum (P)1 3(R) (P)1 3(R) VPA4 SYJA X VZA 1(P) VTA For vacuum u y t r e w q VGA VPA VPA VPA3 i 2(A) 3(R) o X Component Parts No.

VQ5000

B 2 A 4 VQZ 5 SMC SMC SMC SMC SMC B A VQD B 2 A 4 4 B A P = 41 L1 L2 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 46 68.5 P = 41 A 4 B 2 1 B A 58.5 X 12 Stations 2-Rc 1/8 (External pilot port) 15.5 22 51 69 117 42 16 107.8 179 D side With connector on D side (FD) Formula: L1 = 41n + 76, L2 = 41n + 96 n: Stations (Maximum 12 stations) Dimensions L n 12 568 588 L1 L2 11 527 547 10 486 506 9 445 465 8

4/5 Port Air Operated Valve Series SYJA3000

A A A A 10 SZ 2-4.5 (For mounting) (Station 1) (Station n) L2 4 SY (Light/Surge voltage suppressor) L1 (Station n) (Station 1) SYJ (Light/Surge voltage suppressor) + + 48.5 [55.5] A A 20 SX 15 + + B B 5 33.1 1.5 One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" (Pitch) P = 10.5 A A 20 15 5 11.8 B B 1.5 (Pitch) P = 10.5 M5 x 0.8 (A, B port) 11.8 M8 connector (WO) L plug connector

VQC

B A B A B A B A A A B 143 80 34.5 Mounting hole for 2-M5 101 n 1 2 3 4 5 6 7 Stations D-side 8 U-side 2-Rc 3/4 3(R) port 2-Rc 1/2 1(P) port 12 20.5 43.5 77.5 95.5 2-Rc 1/8 (External pilot port) 2-Rc 1/4, 3/8, C8, C10, C12 (2(B), 4(A) port) 11.5 21.5 (6.5) 2-Rc 1/8 (Pilot EXH port) 27 31 38.7 Formulas: L1 = 25n + 106, L2 = 25n + 192 n: Stations (maximum 20 stations) n L L1 L2 20 606 692 19

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Able to control and set a constant speed easily.

PF2A/PF2W

ON P OFF P-3 High flow rate Error correction LED display Contents Solution OUT1 Output mode Note 1) A current of more than 80mA is flowing to OUT1 Check the load and wiring for OUT1. Note 2) ON A current of more than 80mA is flowing to OUT2. Check the load and wiring for OUT2. Note 1) OFF n-3 High flow rate Note 1) n Note 2) The setting data has changed for whatever reasons.

Free Mount Cylinder

Use a 3-wire switch if this specification cannot be satisfied. Moreover, leakage current flow to the load will be n times larger when n auto switches are connected in parallel. 6. Do not use a load that generates surge voltage. If driving a load such as a relay which generates a surge voltage, use a contact protection box.

ZP

D D 10 14 B B 24 31 A 8 11 A 7 10 Model ZP3-T035U;K3-B3 ZP3-T035U;K6-B3 Note) ;in the table indicates the pad material "N, S, U, F, GN, GS."

ZP

K Hexagon width across flats 12 Hexagon width across flats 12 ZU ZL ZY ZQ ZF ZP ZCU AMJ Bellows Bellows A D E F N P A E F N P B B Y Y C C D Misc.

ZP

3.5 x 7 4 x 10 5 x 10 6 x 10 4 x 20 5 x 20 Symbol Size 6 x 20 8 x 20 4 x 30 5 x 30 6 x 30 8 x 30 N S U F GN GS 3507 4010 5010 6010 4020 5020 6020 8020 4030 5030 6030 8030 Pad type Type Oval Symbol W Dimensions: Pad Unit ZP2W ZP220 W ZP230 W 7 7 8 7 12 20 30 8 8 Y Y Y a A a A a A C C C b 20 30 B 31 21 Dimensions Dimensions Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8 C Y a 4 5 6 8 A 5 6 7 9

Digital Flow Switches, Series PF2A, Series PF2W

Connector pin numbers 2 1 (43.5) 4 3 A B Pin no. 1 2 3 4 Output specification Pin description DC(+) NC/Analog output DC() OUT A Pulse output only 42 62 52 Pulse output + Analog output 72 Flow direction 18 Series PF2W Dimensions: Remote Type Sensor Unit for Water PF2W511-(N)B 148 80 32 70 58 46 45 2-Port size 2 45 4-5.5 36 (43.5) A A B Output specification 63 Pulse output only 77 73 87 Pulse

Series IDG

and 50HM are 03 only.

125

(Station n) (Station 1) VVEX4-1 (Internal pilot) 83.3 A A 62.8 47.5 P R 13.5 38.5 P=46 n x Port 2(A): 1/4, 3/8 L Dimensions L1=46n+31, L2=46n+15 n: Stations Station L dimension 2 3 4 5 6 L1 123 169 215 261 307 L2 107 153 199 245 291 1736 VEX3 Series Specific Product Precautions 1 Be sure to read this before handling the products.

IDG

When air with high purity is required, please either mount the above separator on the outlet side or use a made-to-order product (refer to page 14-19-50), which is provided with a micro mist separator (Series AWD) instead of a regulator. 3.

RQ

YA-03 Joint. YU-03 Joint Part No.

VSA4

4 T Symbol EA, EB Side Side A, B Side P F 0 Side Side 2 Option 1 9 Bottom Others Manifold type Type V N Type E E Symbol Type Stations A and B port sizes are same as port sizes in standard body size.

CLQ

CLS YA YB YU Type A mounting bracket Type B mounting bracket Joint 32, 40 50, 63 80 100 YA-03 YA-05 YA-08 YA-10 56 67 83 100 18 22 28 36 6 8 10 12 55 100 195 340 CLQ MLGP Applicable mounting bracket Bore size (mm) Joint RLQ Type A mounting bracket Type B mounting bracket Type B Mounting Bracket 32, 40 YU-03 YA-03 YB-03 MLU 50, 63 YU-05 YA-05 YB-05 80 YU-08 YA-08 YB-08 ML1C 100 YU-10 YA-10